阅读说明：本技术 用于镀膜仪制备连续导电薄膜的装置 (Device for preparing continuous conductive film by coating apparatus ) 是由 马宏图 张丽娜 李琳琳 李国庆 何伟 李帅 韩华 于 2019-10-10 设计创作，主要内容包括：本发明涉及薄膜制备技术,具体涉及一种用于镀膜仪制备连续导电薄膜的装置。为了解决现有方式得到的镀膜条带连续性、导电性差的问题,本发明提出的用于镀膜仪制备连续导电薄膜的装置包括基体和控制部,基体上设置有：转接口,其用于使基体连接到镀膜仪上；条带运载头,其末端固定在基体上,在基体连接于镀膜仪之后,条带运载头的前端伸入到镀膜仪的真空腔内；主腔室,在基体连接于镀膜仪之后,主腔室与镀膜仪的真空腔连通；送带卷轴和收带卷轴,其位于主腔室内；控制部能够控制送带卷轴和收带卷轴转动以使条带沿条带运载头绕转,并因此使条带从送带卷轴运转到收带卷轴上。利用本发明的装置能够有效改善制备的连续导电薄膜材料表面导电性差的问题。(The invention relates to a film preparation technology, in particular to a device for preparing a continuous conductive film by using a coating instrument. In order to solve the problems of poor continuity and poor conductivity of a coating strip obtained by the existing method, the device for preparing the continuous conductive film by the coating instrument provided by the invention comprises a substrate and a control part, wherein the substrate is provided with: the adapter is used for connecting the substrate to the coating instrument; the tail end of the strip carrying head is fixed on the substrate, and the front end of the strip carrying head extends into a vacuum cavity of the coating instrument after the substrate is connected with the coating instrument; the main cavity is communicated with the vacuum cavity of the coating instrument after the substrate is connected to the coating instrument; a tape feed spool and a tape take-up spool located within the main chamber; the control portion is capable of controlling the payout and take-up spools to rotate to cause the tape to orbit along the tape carrying head and thereby cause the tape to be transferred from the payout spool onto the take-up spool. The device can effectively solve the problem of poor surface conductivity of the prepared continuous conductive film material.)

1. The device for preparing the continuous conductive film by the coating instrument is characterized by comprising a base body and a control part, wherein the base body is provided with:

The adapter interface is used for connecting the substrate to a coating instrument;

The tail end of the strip carrying head is fixed on the substrate, and the front end of the strip carrying head extends into a vacuum cavity of the coating instrument after the substrate is connected to the coating instrument;

The main cavity is communicated with the vacuum cavity of the coating instrument after the substrate is connected to the coating instrument;

A tape feed spool and a tape take-up spool located within the main chamber, and a tape located on the tape feed spool passes around the tape carrier head and is adhered to the tape take-up spool;

The control portion may be capable of controlling the payout and take-up spools to rotate to cause the strip to orbit along the strip carrier head and thereby cause the strip to orbit from the payout spool onto the take-up spool; and in the process that the strip rotates along the strip carrying head, the coating instrument coats the strip.

2. The apparatus for preparing a continuous conductive film of a plating apparatus according to claim 1, wherein a first strip limiting module and a second strip limiting module are provided in the main chamber at a position near the end of the strip carrying head,

The strip on the tape feeding reel passes through the first strip limiting module, then bypasses the strip carrying head, passes through the second strip limiting module and then is adhered to the tape collecting reel.

3. The apparatus for preparing a continuous conductive film of a plating instrument according to claim 2, wherein the first strip limiting module is located above the second strip limiting module;

The first strip limiting module consists of a first cylinder and a second cylinder which are arranged in the main chamber, a gap for the strip to pass through is reserved between the first cylinder and the second cylinder, and the strip is prevented from deviating in the movement process through the gap;

the second strip limiting module consists of a third cylinder and a fourth cylinder which are installed in the main chamber, a gap for the strip to pass through is reserved between the third cylinder and the fourth cylinder, and the strip is prevented from deviating in the moving process through the gap.

4. The apparatus for manufacturing a continuous conductive film by a coater according to claim 2, wherein the strip carrier head is detachably attached to the base;

And/or a groove matched with the width of the strip is preset on the strip carrying head at a position close to the front end; the coating apparatus is capable of coating a strip passing through the slot.

5. the apparatus according to claim 4, wherein a plurality of strip position-limiting rollers are provided on the strip-carrying head in the direction of the strip rotation,

the strip passing through the first strip limiting module sequentially passes through the strip running limiting rollers in the process of bypassing the strip carrying head so as to prevent the strip from shifting in the process of revolving along the strip carrying head.

6. The apparatus for manufacturing a continuous conductive film according to claim 5, wherein the number of the strip running limit rollers is three, and the three strip running limit rollers are respectively disposed on the upper surface of the strip carrier head, the front end of the strip carrier head and the lower surface of the strip carrier head;

and/or the strip running limiting roller is a rotatable metal cylinder or a polytetrafluoroethylene rubber cylinder.

7. The device for preparing the continuous conductive film of the coating machine according to claim 1, wherein a detection module is further arranged on the substrate and used for detecting whether the strip is used up.

8. The apparatus for preparing a continuous conductive film according to claim 7, wherein the detection module is a stress detection module or an infrared object detection module.

9. The device for preparing the continuous conductive film by the coating machine according to any one of claims 1 to 8, wherein an LED lamp is mounted on the inner wall of the main chamber and used for illuminating the inside of the main chamber.

10. The apparatus according to any one of claims 1 to 8, wherein the main chamber comprises a main chamber door made of transparent material.

Technical Field

the invention relates to a film preparation technology, in particular to a device for preparing a continuous conductive film by using a coating instrument.

Background

With the wide application of a method (ssSEM) based on scanning electron microscope imaging of continuous ultrathin sections in recent years, the acquisition of three-dimensional structure information of cells and even larger-scale cubic millimeter levels on a tissue level in neurobiology, cytobiology and the like is rapidly realized. The technology is mainly characterized in that a collection belt, a diamond knife and an ultrathin slicer are used for automatically collecting continuous ultrathin sections of resin-embedded samples, then the sections are subjected to plasma thinning and significance processing, atomic force microscope measurement, conducting film plating on the surfaces of the sections and then transferred to a scanning electron microscope, and then high-resolution large-scale three-dimensional reconstruction is carried out on the obtained series of electron microscopic images. Its unique advantage lies in that the sequence section can be preserved, can be at different resolutions down many times formation of image simultaneously, therefore, some precious samples just can supply researcher to "look up" repeatedly like the book in the library, and the researcher can distinguish the secondary research to the section of interest to collection efficiency and flexibility have been improved.

The strip width that surface smoothness and flexibility all accord with continuous ultra-thin section automatic collection demand sold in the market is invariable to be 8mm, and the material is mostly polyimide high molecular film material such as polyimide, and it is all very poor to receive material component influence strip surface conductivity. If the slice is collected on the surface, if the slice is directly used for scanning electron microscope imaging, the surface charge is very serious, and not only a clear neural network structure image cannot be obtained, but also the sample is permanently damaged. Therefore, the problem of poor conductivity of the surface of the strip carrying the continuous cut must be solved. The traditional solution is to use a non-conductive strip to automatically collect continuous slices, stick the strip to the surface of the wafer through a conductive adhesive tape after cutting, and then perform spray plating conductive layer treatment on the whole surface of the wafer. Therefore, although the conductivity problem of the surface of the continuous slice array is solved, a carbon film or a precious metal film is covered on the surface of the slice, which has a certain influence on high-resolution electron microscope imaging, so that the sharpness of the structure edge of the neuron film is reduced, and further the automatic identification and segmentation of the neuron by a later algorithm are influenced.

The conventional high vacuum coating apparatus has a carbon wire evaporation carbon plating mode, a carbon rod evaporation mode, a pulse carbon wire evaporation mode and a precious metal sputtering mode as common continuous strip surface conductivity treatment modes. In any mode, the coating range area is limited to the surface of a 4-inch sample platform, if the continuous collection strip is subjected to surface conductivity treatment, the continuous collection strip can only be cut for coating, the length of the continuous coating which can be coated each time is less than 100mm, and after the coating is finished each time, the treated strip is taken out by breaking vacuum, and is replaced by the strip which needs to be subjected to conductivity treatment. It takes a long time not to obtain a sufficiently continuous collecting strip and the strip obtained in this way has a poor continuity and is not at all satisfactory for use.

Based on the problems, the invention provides a device for preparing a continuous conductive film by using a coating instrument to solve the problems.

disclosure of Invention

In order to solve the above problems in the prior art, that is, to solve the problems of poor continuity and conductivity of the coating strip obtained in the prior art, the present invention provides a device for preparing a continuous conductive film by a coating apparatus, the device comprising a substrate and a control part, wherein the substrate is provided with: the adapter interface is used for connecting the substrate to a coating instrument; the tail end of the strip carrying head is fixed on the substrate, and the front end of the strip carrying head extends into a vacuum cavity of the coating instrument after the substrate is connected to the coating instrument; the main cavity is communicated with the vacuum cavity of the coating instrument after the substrate is connected to the coating instrument; a tape feed spool and a tape take-up spool located within the main chamber, and a tape located on the tape feed spool passes around the tape carrier head and is adhered to the tape take-up spool; the control portion may be capable of controlling the payout and take-up spools to rotate to cause the strip to orbit along the strip carrier head and thereby cause the strip to orbit from the payout spool onto the take-up spool; and in the process that the strip rotates along the strip carrying head, the coating instrument coats the strip.

In a preferred embodiment of the above apparatus for preparing a continuous conductive film for a coating machine, a first tape limiting module and a second tape limiting module are disposed in the main chamber near the end of the tape carrying head, and a tape on the tape feeding reel passes through the first tape limiting module, then bypasses the tape carrying head, then passes through the second tape limiting module, and then is adhered to the tape collecting reel.

In a preferred embodiment of the above apparatus for preparing a continuous conductive film by a coating machine, the first strip limiting module is located above the second strip limiting module; the first strip limiting module consists of a first cylinder and a second cylinder which are arranged in the main chamber, a gap for the strip to pass through is reserved between the first cylinder and the second cylinder, and the strip is prevented from deviating in the movement process through the gap; the second strip limiting module consists of a third cylinder and a fourth cylinder which are installed in the main chamber, a gap for the strip to pass through is reserved between the third cylinder and the fourth cylinder, and the strip is prevented from deviating in the moving process through the gap.

In a preferred embodiment of the above apparatus for coating machine preparation of a continuous conductive film, the strip carrier head is detachably mounted on the base; and/or a groove matched with the width of the strip is preset on the strip carrying head at a position close to the front end; the coating apparatus is capable of coating a strip passing through the slot.

In a preferred embodiment of the above apparatus for preparing a continuous conductive film in a coating machine, the strip carrying head is provided with a plurality of strip running limiting rollers along a strip revolving direction, and a strip passing through the first strip limiting module sequentially passes through the strip running limiting rollers while bypassing the strip carrying head, so as to prevent the strip from deviating during the revolving process along the strip carrying head.

In a preferred embodiment of the above apparatus for manufacturing a continuous conductive film in a coating machine, the number of the strip operation limiting rollers is three, and the three strip operation limiting rollers are respectively disposed on the upper surface of the strip carrier head, the front end of the strip carrier head and the lower surface of the strip carrier head; and/or the strip running limiting roller is a rotatable metal cylinder or a polytetrafluoroethylene rubber cylinder.

In a preferred embodiment of the above apparatus for preparing a continuous conductive film by a coating apparatus, the substrate is further provided with a detection module, and the detection module is used for detecting whether the strip is used up. In a preferred embodiment of the above apparatus for preparing a continuous conductive film by a coating apparatus, the detection module is a stress detection module or an infrared object detection module.

In a preferred embodiment of the above apparatus for preparing a continuous conductive film in a coating apparatus, an LED lamp is mounted on an inner wall of the main chamber, and the LED lamp is used for illuminating the inside of the main chamber.

In a preferred embodiment of the above apparatus for preparing a continuous conductive film in a coating apparatus, the main chamber includes a main chamber door made of a transparent material.

the device can effectively solve the problem of poor surface conductivity of the prepared continuous conductive film material. When the device is used, the device is only required to be connected to a coating instrument through the adapter, then the blank strip is arranged on the strip conveying reel, the blank strip bypasses the strip conveying head and is adhered to the strip collecting reel, the blank strip passes through the control part in the atmosphere of conductive particles (in a vacuum cavity of the coating instrument) at a constant speed, and the landing number of the conductive particles on the surface of the blank strip is regulated and controlled by regulating the rotating speed of the blank strip, so that the thickness of the conductive film is controlled. This makes it possible to obtain a continuous strip having a good surface conductivity and a continuous and uniform conductive layer.

drawings

FIG. 1 is a sectional structural view of an apparatus for manufacturing a continuous conductive film of a coating apparatus according to the present invention

FIG. 2 is a schematic view (front view) of the overall structure of the apparatus for manufacturing a continuous conductive film by a coating machine of the present invention;

FIG. 3 is a schematic view of the overall structure (side view) of the apparatus for manufacturing a continuous conductive film of a coating apparatus according to the present invention

Detailed Description

In order to make the embodiments, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the embodiments are some, but not all embodiments of the present invention. It should be understood by those skilled in the art that these embodiments are only for explaining the technical principle of the present invention, and are not intended to limit the scope of the present invention. The device for preparing the continuous conductive film by the coating instrument is suitable for various film materials.

Referring to fig. 1 to 3, fig. 1 is a sectional structural view of an apparatus for a coating machine to prepare a continuous conductive film according to the present invention; FIG. 2 is a schematic view (front view) of the overall structure of the apparatus for manufacturing a continuous conductive film by a coating machine of the present invention; fig. 3 is a schematic view (back view) of the overall structure of the apparatus for coating a film on a continuous conductive film according to the present invention. Fig. 1 corresponds to the sectional view of fig. 2, which clearly shows the internal structure of the device according to the invention. As shown in fig. 1 to 3, the apparatus of the present invention comprises a base 1 and a control section (the control section is not shown in the drawings). The base 1 is provided with an adapter 11, a tape carrier head 12, a main chamber 13, a tape feed spool 14 and a take-up spool 15.

In particular, the adapter 11 is used to connect the substrate 1 to a coating apparatus, which is omitted from the figures of the present application. As an example, the coating apparatus is provided with an expansion port in advance, the adapter port 11 is positioned at the front end of the substrate 1 and is matched with the expansion port of the coating apparatus in size, and the substrate 1 can be directly installed on the coating apparatus through the adapter port 11.

The tip (right position in fig. 1) of the tape carrier head 12 is fixed to the base 1, and after the base 1 is attached to the coater, the front end (left position in fig. 1) of the tape carrier head 12 is inserted into the vacuum chamber of the coater. The strip carrier head 12 is, for example, an elongated body made of metal or teflon, the end of which can be fixed to the inner wall of the main chamber 13. Under the condition that the strip carrying head 12 extends into the vacuum cavity of the coating instrument, the strip to be coated can run on the surface of the strip carrying head 12, so that the coating instrument can conveniently coat the strip. In other words, the tape carrier head 12 can function to support the movement of the tape in the conductive atmosphere.

The main chamber 13 can be made of stainless steel, and after the substrate 1 is connected to the coating instrument, the main chamber 13 is communicated with a vacuum cavity of the coating instrument. The payout ribbon spool 14 and the take-up ribbon spool 15 are located within the main chamber 13, and the tape on the payout ribbon spool 14 is passed around the tape carrier head 12 and adhered to the take-up ribbon spool 15. The control section is capable of controlling the payout and take-up spools 14, 15 to rotate to cause the tape to wrap around along the tape carrier head 12 and thereby cause the tape to be transferred from the payout spool 14 onto the take-up spool 15; wherein the coating instrument coats the strip during its revolution along the strip carrier head 12, so that a continuous conductive film can be prepared.

As an example, the tape is wound on a tape carrier tray having an axial center specification corresponding to the axial center specifications of the feed reel 14 and the take-up reel 15. In this way, the carrier tray carrying the blank tape may be mounted on the tape feeding reel 14, and then the empty carrier tray may be mounted on the tape take-up reel 15, and the control unit may select the control of the stepping motor, the stepping motor drives the tape feeding shaft 14 to rotate, and the tape take-up reel 15 may be driven to rotate along with the tape feeding shaft 14, so that the tape on the tape feeding reel 14 is wound on the tape take-up reel 15 around the tape carrier head 12. The control part can also control the rotating speed of the tape feeding reel 14 and the tape collecting reel 15, so as to control the speed of the strip revolving strip carrier head 12, further regulate and control the landing quantity of conductive particles in a vacuum cavity of the coating instrument on the surface of a blank strip, and control the thickness of a conductive film.

It will be appreciated by those skilled in the art that the stepping motor may also drive the take-up spool 15 to rotate, with the payout ribbon spool 14 rotating as a driven wheel following the take-up spool 15; alternatively, the control unit may control the rotation of the payout ribbon spool 14 and the take-up ribbon spool 15 in other suitable manners to transfer the ribbon from the payout ribbon spool 14 to the take-up ribbon spool 14. It should be noted that the tape feeding reel 14 and the tape collecting reel 15 are reels of the same specification, and can be interchanged from top to bottom, that is, which reel is the tape feeding reel on which the blank reel is placed, and the other reel is the tape collecting reel for collecting the coated tape.

In a specific embodiment, a slot (shown as an S-region in fig. 3, which is a coating region) matching the width of the strip is preset near the front end of the strip carrier head 12, and the coating instrument can coat the strip passing through the slot. Specifically, when a strip having a width of 8mm is selected, the width of the groove is also 8mm, and during the rotation of the strip along the strip carrier head 12, the conductive particles in the vacuum chamber of the coating apparatus land on the surface of the strip at a position passing through the groove to form a conductive film. In addition, the strip carrying head 12 is detachably mounted on the base 1, so that the strip carrying head 12 can be detached without affecting the normal use of the coating apparatus when the preparation of the continuous conductive film is not required.

In a more specific embodiment, a first strap restraining module 16 and a second strap restraining module 17 are disposed within the main chamber 13 proximate the distal end of the strap carrier head 12 (the first strap restraining module 16 being positioned above the second strap restraining module 17; the strap on the strap feed spool 14 passes through the first strap restraining module 16, around the strap carrier head 12, and through the second strap restraining module 17 and then is adhered to the strap feed spool 15). The first tape stop module 16 and the second tape stop module 17 can effectively prevent the tape from deviating during the transfer around the tape carrying head 12. Specifically, the first strap restraining module 16 is composed of a first cylinder 161 and a second cylinder 162 installed in the main chamber 13, and a gap for the strap to pass through is left between the first cylinder 161 and the second cylinder 162, and the strap is prevented from deviating during the movement through the gap. The second tape limiting module 17 is composed of a third cylinder 171 and a fourth cylinder 172 installed in the main chamber 13, and a gap for the tape to pass through is left between the third cylinder 171 and the fourth cylinder 172, and the tape is prevented from being deviated during the movement by the gap. More specifically, the first cylinder 161, the second cylinder 162, the third cylinder 171 and the fourth cylinder 172 are teflon rubber cylinders fixed to the main chamber 13 through metal cores, and after the strip passes through the gap between the cylinders, the first cylinder 161 and the second cylinder 162 (the third cylinder 171 and the fourth cylinder 172) are pressed against each other to limit the moving strip and prevent the strip from deviating during the moving process. Preferably, the four cylinders leave a hollow in the center, and the width of the hollow may be set to 6mm (not limited to this width), which prevents the deterioration of the flatness of the surface of the strip due to the friction between the first cylinder 161 and the second cylinder 162 (the third cylinder 171 and the fourth cylinder 172).

Further, a plurality of strap running limiting rollers 121 are arranged on the strap carrying head 12 along the strap revolving direction, and the strap passing through the first strap limiting module 16 passes through the strap running limiting rollers 121 in sequence in the process of passing around the strap carrying head, so as to prevent the strap from deviating in the process of revolving along the strap carrying head 12. In other words, after the tape passes around the tape carrier head 12, the tape running-limiting roller 121 is located above the tape, thereby restraining the tape to the surface of the tape carrier head 12 to prevent the tape from shifting during the revolution of the tape along the tape carrier head 12. Specifically, three tape running limit rollers 121 are provided, respectively, on the upper surface of the tape carrier head 12, the front end of the tape carrier head 12, and the lower surface of the tape carrier head 12. The strip running limiting roller 121 is a metal cylinder or a polytetrafluoroethylene rubber cylinder with extremely high surface flatness so as to ensure that the position of the strip does not deviate when the surface of the strip carrying head 12 moves; also, the tape running-limiting roller 121 may be rotated to prevent hard friction from being generated between it and the moving tape.

Further, a detection module 18 is arranged on the base body 1, and the detection module 18 is used for detecting whether the strip is used up. The detection module 18 is, for example, a stress detection module or an infrared object detection module, and those skilled in the art may select other suitable detection modules. Taking the stress detection module as an example, the stress detection module can be connected with the main chamber 13 through a soft spring. When the strip is not installed, the stress value borne by the stress detection module is 0, and in the process of installing the strip, the strip passes through the stress detection module, and the stress borne by the strip after the strip is installed is a non-0 value. In a working state, when the strip in the tape feeding reel 14 is used up, the strip finally rotates through the second limiting module 17 below, the stress on the stress detection module is relieved at the moment, namely the stress value returns to 0, buzzing is started, a worker is reminded that the experiment process is about to be completed, the operation is automatically stopped after 5 seconds, and the next experiment process can be prepared.

Optionally, an LED lamp 19 is mounted on the inner wall of the main chamber 13, and the LED lamp is used for lighting the inside of the main chamber 13. An LED lamp switch may also be installed to control the on and off of the LED lamp 19. In addition, the main chamber 13 further includes a main chamber door 131 made of a transparent material, after the main chamber door 131 is opened, the blank strip with the plated film can be mounted on the tape-feeding reel 14, and after the mounting is completed, the main chamber door 131 is closed.

the specific application mode of the invention is as follows: