Special fixture for coating film on outer surface of tubular or rod-shaped optical element

文档序号:1794257 发布日期:2021-11-05 浏览:13次 中文

阅读说明:本技术 一种管状或棒状光学元件外表面镀膜专用夹具 (Special fixture for coating film on outer surface of tubular or rod-shaped optical element ) 是由 王奔 孙顺文 原清海 于 2021-07-30 设计创作,主要内容包括:本发明提供了一种管状或棒状光学元件外表面镀膜专用夹具,所述专用夹具设置于镀膜机的工件盘上,所述专用夹具包括驱动装置和多个传动齿轮,驱动装置的驱动轴连接驱动轮,传动齿轮与驱动轮啮合传动;传动齿轮的内圈过盈配合装配夹具转轴,夹具转轴的端部开设夹具孔,夹具孔中过盈配合设置硅胶棒,硅胶棒从端面向内部开设中空腔,中空腔中过盈配合装配待镀膜的管状或棒状光学元件,使待镀膜的管状或棒状光学元件被所述夹具转轴带动旋转。本发明适于真空沉积镀膜中对于管状、棒状、柱面和光纤外表面等光学元件镀膜,可以用于批量生产,且能有效保证膜厚均匀性。(The invention provides a special fixture for coating a film on the outer surface of a tubular or rod-shaped optical element, which is arranged on a workpiece disc of a film coating machine and comprises a driving device and a plurality of transmission gears, wherein a driving shaft of the driving device is connected with a driving wheel, and the transmission gears are in meshing transmission with the driving wheel; the inner ring of the transmission gear is in interference fit with a rotating shaft of the assembling fixture, a fixture hole is formed in the end portion of the rotating shaft of the assembling fixture, a silica gel rod is arranged in the fixture hole in interference fit, a hollow cavity is formed in the silica gel rod from the end face to the inside, and a tubular or rod-shaped optical element to be coated is assembled in the hollow cavity in interference fit, so that the tubular or rod-shaped optical element to be coated is driven to rotate by the rotating shaft of the assembling fixture. The invention is suitable for coating optical elements such as tubular, rod-shaped, cylindrical and optical fiber outer surfaces in vacuum deposition coating, can be used for batch production, and can effectively ensure the uniformity of film thickness.)

1. A special fixture for coating the outer surface of a tubular or rod-shaped optical element is arranged on a workpiece disc of a coating machine and is characterized by comprising a driving device and a plurality of transmission gears, wherein a driving shaft of the driving device is connected with a driving wheel, and the transmission gears are in meshing transmission with the driving wheel; the inner ring interference fit assembly fixture comprises a transmission gear and is characterized in that a fixture rotating shaft is assembled in an interference fit mode, a fixture hole is formed in the end portion of the fixture rotating shaft, a silica gel rod is arranged in the fixture hole in an interference fit mode, a hollow cavity is formed in the end face of the silica gel rod towards the inside, and a tubular or rod-shaped optical element to be coated is assembled in the hollow cavity in an interference fit mode, so that the tubular or rod-shaped optical element to be coated is driven to rotate by the fixture rotating shaft.

2. The special fixture for coating the outer surface of the tubular or rod-shaped optical element according to claim 1, wherein the fixture holes are formed at both ends of the rotating shaft of the fixture, silica gel rods are arranged in the fixture holes at both ends, and the tubular or rod-shaped optical element to be coated is arranged in the silica gel rods at both ends.

3. The special fixture for coating the outer surface of the tubular or rod-shaped optical element according to claim 2, further comprising a bearing, wherein the bearing is mounted on the outer wall of each of the two ends of the rotating shaft of the fixture.

4. The special fixture for coating the outer surface of the tubular or rod-shaped optical element according to any one of claims 1 to 3, wherein the transmission gear is disposed on one side of the driving wheel or symmetrically disposed on both sides of the driving wheel.

5. The special fixture for coating the outer surface of the tubular or rod-shaped optical element according to claim 4, wherein the inner diameter of the hollow cavity of the silica gel rod is 0.5-1mm smaller than the diameter of the tubular or rod-shaped optical element to be coated.

6. The special fixture for coating the outer surface of the tubular or rod-shaped optical element according to claim 5, wherein the tubular or rod-shaped optical element to be coated is held in the hollow cavity of the silicone rod for a length of 1/4-1/3 of the total length of the tubular or rod-shaped optical element to be coated.

7. The special fixture for coating the outer surface of the tubular or rod-shaped optical element according to claim 6, wherein the rotation shaft of the fixture drives the tubular or rod-shaped optical element to be coated to rotate at a speed of 1-2 rpm.

8. The special fixture for coating the outer surface of the tubular or rod-shaped optical element according to claim 7, wherein the special fixture revolves with a workpiece plate of a coating machine at a speed of 15-30 rpm.

9. The special fixture for coating the outer surface of the tubular or rod-shaped optical element according to claim 3, further comprising a housing, wherein the housing comprises a front shell and a rear shell, the front shell and the rear shell are fixedly connected by a screw to form an inner cavity, so as to seal the transmission gear and the bearing in the inner cavity of the housing.

10. The special fixture for coating the outer surface of the tubular or rod-shaped optical element according to claim 9, further comprising a sealing ring disposed at the joint seal of the front shell and the rear shell.

Technical Field

The disclosure relates to the technical field of optical coating, in particular to a special fixture for coating the outer surface of a tubular or rod-shaped optical element.

Background

With the rapid development of optical communication and laser manufacturing technologies, optical elements such as optical fibers, cylindrical mirrors, and tubes are widely used, such as quartz glass tubes for helium neon lasers, optical fibers for special applications, etc., the outer surface of which needs to be plated with an optical thin film, and the uniformity of the film thickness is a key problem to be solved at present. The conventional clamp has the defects of small loading capacity, difficulty in batch production, complex structure, complex clamping and easiness in damage.

Disclosure of Invention

In view of this, the embodiments of the present disclosure provide a special fixture for coating an outer surface of a tubular or rod-shaped optical element, which is suitable for coating optical elements such as tubular, rod-shaped, cylindrical, and outer surface of an optical fiber in vacuum deposition coating, and can be used for mass production, and can effectively ensure uniformity of film thickness.

In order to achieve the purpose, the invention adopts the following technical scheme:

a special clamp for coating the outer surface of a tubular or rod-shaped optical element is arranged on a workpiece disc of a coating machine and comprises a driving device and a plurality of transmission gears, wherein a driving shaft of the driving device is connected with a driving wheel, and the transmission gears are in meshing transmission with the driving wheel; the inner ring interference fit assembly fixture comprises a transmission gear and is characterized in that a fixture rotating shaft is assembled in an interference fit mode, a fixture hole is formed in the end portion of the fixture rotating shaft, a silica gel rod is arranged in the fixture hole in an interference fit mode, a hollow cavity is formed in the end face of the silica gel rod towards the inside, and a tubular or rod-shaped optical element to be coated is assembled in the hollow cavity in an interference fit mode, so that the tubular or rod-shaped optical element to be coated is driven to rotate by the fixture rotating shaft.

In a preferred embodiment, the two ends of the rotating shaft of the clamp are both provided with the clamp holes, the clamp holes at the two ends are both provided with silica gel rods, and the silica gel rods at the two ends are both provided with tubular or rod-shaped optical elements to be coated.

In a preferred embodiment, the clamp further comprises a bearing, and the bearing is assembled on the outer wall of each of two ends of the rotating shaft of the clamp.

In a preferred embodiment, the transmission gear is arranged on one side of the driving wheel or symmetrically arranged on two sides of the driving wheel.

In a preferred embodiment, the inner diameter of the hollow cavity of the silica gel rod is 0.5-1mm smaller than the diameter of the tubular or rod-shaped optical element to be coated.

In a preferred embodiment, the holding length of the tubular or rod-shaped optical element to be coated in the hollow cavity of the silicone rod is 1/4-1/3 of the total length of the tubular or rod-shaped optical element to be coated.

In a preferred embodiment, the rotating shaft of the clamp drives the tubular or rod-shaped optical element to be coated to rotate at a speed of 1-2 rpm.

In a preferred embodiment, the special fixture revolves along with a workpiece disc of the coating machine, and the revolving speed is 15-30 revolutions per minute.

In a preferred embodiment, the gear box further comprises a housing, wherein the housing comprises a front shell and a rear shell, and the front shell and the rear shell are fixedly connected through screws to form an inner cavity so as to seal the transmission gear and the bearing in the inner cavity of the housing.

In a preferred embodiment, the sealing device further comprises a sealing ring, and the sealing ring is arranged at the connecting sealing position of the front shell and the rear shell.

The special fixture for coating the outer surface of the tubular or rod-shaped optical element has the beneficial effects that:

(1) the fixture can stably fix rod-shaped or tubular workpieces with small diameter and length, light weight, solid or hollow, and realize uniform coating on the outer surface;

(2) the hollow silica gel rod is used for elastically clamping the workpiece, so that the workpiece is prevented from being damaged, and the workpiece is convenient to take and place;

(3) according to the production condition of the workpieces and the clamping positions of the workpiece disks, the number of clamped workpieces can be increased or decreased properly, and the labor productivity is improved.

(4) The service life is long.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings needed to be used in the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present disclosure, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a front view of a special fixture for coating an outer surface of a tubular or rod-shaped optical element according to an embodiment of the present invention;

FIG. 2 is a cross-sectional view of a drive gear of the clamp in an embodiment of the present invention;

FIG. 3 is a side view of a clamp shaft in an embodiment of the present invention;

FIG. 4 is a top view of a front housing of a fixture in an embodiment of the invention;

FIG. 5 is a side view of the front housing of the clamp in an embodiment of the present invention;

FIG. 6 is a top view of a back shell of a clip in an embodiment of the present invention;

FIG. 7 is a rear shell side view of a clip in an embodiment of the present invention;

FIG. 8 is a cross-sectional end view of a silicone rod of the fixture in an embodiment of the present invention;

FIG. 9 is a schematic side cross-sectional view of a silicone rod of the fixture in an embodiment of the invention;

FIG. 10 is a front view of a special fixture in another embodiment of the present invention;

fig. 11 is a top view of a special fixture in another embodiment of the present invention.

Detailed Description

The embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.

The embodiments of the present disclosure are described below with specific examples, and other advantages and effects of the present disclosure will be readily apparent to those skilled in the art from the disclosure in the specification. It is to be understood that the described embodiments are merely illustrative of some, and not restrictive, of the embodiments of the disclosure. The disclosure may be embodied or carried out in various other specific embodiments, and various modifications and changes may be made in the details within the description without departing from the spirit of the disclosure. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict. All other embodiments, which can be derived by a person skilled in the art from the embodiments disclosed herein without making any creative effort, shall fall within the protection scope of the present disclosure.

It is noted that various aspects of the embodiments are described below within the scope of the appended claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the disclosure, one skilled in the art should appreciate that one aspect described herein may be implemented independently of any other aspects and that two or more of these aspects may be combined in various ways. For example, an apparatus may be implemented and/or a method practiced using any number of the aspects set forth herein. Additionally, such an apparatus may be implemented and/or such a method may be practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.

It should be noted that the drawings provided in the following embodiments are only for illustrating the basic idea of the present disclosure, and the drawings only show the components related to the present disclosure rather than the number, shape and size of the components in actual implementation, and the type, amount and ratio of the components in actual implementation may be changed arbitrarily, and the layout of the components may be more complicated.

In addition, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects may be practiced without these specific details.

As shown in fig. 1 to 9, the embodiment of the present disclosure provides a special fixture for coating an outer surface of a tubular or rod-shaped optical element, the special fixture is disposed on a workpiece tray of a coating machine, the special fixture includes a driving device 1 and a plurality of transmission gears 3, a driving shaft of the driving device 1 is connected to a driving wheel, and the transmission gears 3 are in meshing transmission with the driving wheel; the inner ring interference fit assembly fixture comprises a transmission gear 3 and is characterized in that a fixture rotating shaft 2 is assembled in an interference fit mode through an inner ring, a fixture hole is formed in the end portion of the fixture rotating shaft 2, a silica gel rod 8 is arranged in the fixture hole in an interference fit mode, a hollow cavity is formed in the silica gel rod 8 from the end face to the inside, and a tubular or rod-shaped optical element to be coated is assembled in the hollow cavity in an interference fit mode, so that the tubular or rod-shaped optical element to be coated is driven to rotate by the fixture rotating shaft 2.

In an embodiment of the present invention, the two ends of the fixture rotating shaft 2 are both provided with the fixture holes, the fixture holes at the two ends are both provided with the silica gel rods 8, and the silica gel rods 8 at the two ends are both provided with the tubular or rod-shaped optical elements (such as the front workpiece 9 and the rear workpiece 10 shown in fig. 1) to be coated.

In this embodiment, the same number of transmission gears 3 are symmetrically arranged on both sides of the driving wheel, and as shown in fig. 1, the number of transmission gears can be increased or decreased according to the number of workpieces to be coated. The driving device 1 is preferably a driving motor, the motor drives a driving wheel to rotate, the driving wheel drives the transmission gear 3 to rotate, and then the fixture rotating shaft 2 assembled on the transmission gear 3 drives the workpiece to be coated to rotate. The hollow silica gel rod 8 fixes the workpiece to be coated, the workpiece to be coated is clamped by the elasticity of silica gel, the hollow silica gel rod 8 is in interference fit with the fixture hole of the fixture rotating shaft 2, and the workpiece to be coated is in interference fit with the hollow cavity of the silica gel rod 8, so that the workpiece is not damaged, and the workpiece is prevented from sliding down.

The rotation speed of the workpiece is adjustable, the rotation speed of the workpiece is adjusted according to the uniformity distribution condition of the film layer, the film thickness distribution of the workpiece in the circumferential direction is ensured to be uniform, and the film thickness in the circumferential direction is more uniform when the rotation speed is 1-2 revolutions per second through experiments, so that the rotation speed of the fixture rotating shaft 2 for driving the workpiece to be coated to rotate is preferably 1-2 revolutions per second. In addition, the special fixture revolves along with the whole workpiece disc of the film plating machine, the revolution speed is 15-30 revolutions per minute, and the film thickness in the length direction is ensured to be uniform.

The workpiece to be coated is clamped in the hollow silica gel rod 8, the inner diameter of the hollow cavity of the silica gel rod 8 can be processed according to the size of the workpiece, but the diameter of the hollow cavity in the silica gel rod 8 is smaller than that of the workpiece, and the workpiece is clamped by the elasticity of silica gel. The preferable structure is that the diameter of the workpiece which can be clamped is within 15mm, if the diameter is higher than 15mm, the clamping length is properly increased, and the clamping is ensured to be reliable and stable. In addition, the diameter of the hollow cavity of the silica gel rod 8 is smaller than the diameter of the workpiece by about 0.5-1mm, otherwise, the diameter of the hollow cavity is too small, clamping is difficult, clamping force is insufficient due to the larger diameter, and the workpiece is easy to fall off. In another preferred structure, the clamping length of the element to be coated in the hollow cavity of the silica gel rod 8 is 1/4-1/3 of the total length of the element to be coated, so that the clamping stability is ensured.

In another embodiment of the invention, the clamp further comprises a bearing 7, the bearing 7 is assembled on the outer wall of each of the two ends of the clamp rotating shaft 2, the bearing 7 is assembled to ensure the precision and the stability of rotation, the bearing 7 can be a high-temperature-resistant oilless bearing, and the lubricant is high-temperature-resistant silicone grease.

In another embodiment of the present invention, the present invention further comprises a housing, wherein the housing comprises a front housing 6 and a rear housing 4, the front housing 6 and the rear housing 4 are fixedly connected by a screw to form an inner cavity, so that the transmission gear 3 and the bearing 7 are sealed in the inner cavity of the housing. Further, still include sealing washer 5, sealing washer 5 sets up at the sealed department edge of connecting of preceding shell 6 and backshell 4, seals bearing 7 in the casing through sealing washer 5, prevents that deposited membrane material from getting into bearing 7, leads to rotating unstably. The front shell 6, the rear shell 4 and the clamp rotating shaft 2 are made of stainless steel, aluminum alloy and other materials.

In the invention, the silica gel rod 8 can bear the temperature of more than 150 ℃, and the temperature is controlled to be below 150 ℃ in the deposition process. The cross-sectional view of the plateable tubular or rod-shaped optical element may be circular, square, hexagonal, triangular, etc. The special fixture can be produced in batches, is easy to clamp, and the workpiece is not easy to damage, revolves along with the workpiece disc while rotating in the plating process, so that the film thickness of the workpiece in the circumferential direction and the length direction is ensured to be uniformly distributed.

In another embodiment of the present invention, the transmission gears 3 are disposed on the same side of the driving wheel, as shown in fig. 10-11, since the special fixture is clamped on the workpiece disk of the film plating machine and revolves along with the whole workpiece disk of the film plating machine, the specific arrangement form and the arrangement number of the transmission gears 3 are determined according to the shape of the workpiece disk, which is convenient for clamping.

The above description is only for the specific embodiments of the present disclosure, but the scope of the present disclosure is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present disclosure should be covered within the scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be subject to the protection scope of the claims.

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