阅读说明：本技术 沉积装置 (Deposition apparatus ) 是由 李相硅 崔虔熏 文炳竣 曹永秀 于 2019-11-29 设计创作，主要内容包括：本发明的沉积装置包括将沉积原料蒸发成沉积材料的坩埚、以及被构造成加热所述坩埚的加热器单元,所述坩埚包括上表面开口并将沉积原料蒸发成沉积材料的坩埚主体、在所述坩埚主体的上部向外延伸的坩埚法兰、连接至所述坩埚法兰的上侧并设置有用于排出所述沉积材料的至少一个或多个的喷嘴的坩埚盖,所述加热器单元包括与所述坩埚主体的外侧间隔开的加热器框架、以及安装在所述加热器框架的内壁上并与所述坩埚主体间隔开的加热器,并且所述坩埚法兰支撑在所述加热器框架的上端。(The deposition apparatus of the present invention includes a crucible that evaporates a deposition raw material into a deposition material, the crucible including a crucible main body having an upper surface opened and evaporating the deposition raw material into the deposition material, a crucible flange extending outward at an upper portion of the crucible main body, a crucible cover connected to an upper side of the crucible flange and provided with at least one or more nozzles for discharging the deposition material, and a heater unit including a heater frame spaced apart from an outer side of the crucible main body, and a heater mounted on an inner wall of the heater frame and spaced apart from the crucible main body, and the crucible flange being supported at an upper end of the heater frame.)

1. A deposition apparatus, comprising:

a crucible for evaporating the deposition material into a deposition material; and

a heater unit configured to heat the crucible;

wherein the crucible comprises:

a crucible main body having an upper surface opened and in which a deposition raw material is evaporated into a deposition material;

a crucible flange extending outward at an upper portion of the crucible main body;

a crucible cover coupled to an upper side of the crucible flange and provided with at least one or more nozzles for discharging the deposition material,

wherein the heater unit includes:

a heater frame spaced apart from an outer side of the crucible body; and

a heater installed on an inner wall of the heater frame and spaced apart from the crucible body, and

wherein the crucible flange is supported at an upper end of the heater frame.

2. The deposition apparatus of claim 1, wherein an outer wall of the crucible body and an inner wall of the heater frame are spaced apart from each other by a predetermined distance.

3. The deposition apparatus of claim 1, wherein the heater unit further comprises side reflectors installed on both side surfaces of the outer wall of the heater frame.

4. The deposition apparatus of claim 1, wherein the heater unit further comprises a lower reflector installed at a lower portion of the heater frame to be located below the crucible body.

5. The deposition apparatus of claim 1, further comprising a cooling unit configured to insulate heat exhausted from the heater unit.

6. The deposition apparatus as claimed in claim 5,

wherein the cooling unit includes a cooling block spaced apart from an outer side of the heater unit, and

wherein the cooling block includes a heat insulating material installed therein or a cooling flow path formed therein.

7. The deposition apparatus according to claim 6, wherein the cooling unit comprises an upper reflector installed at an upper portion of the cooling block to be located above the crucible cover.

8. The deposition apparatus of claim 1, further comprising a fastening unit configured to connect the crucible cover to the crucible flange.

9. The deposition apparatus of claim 8, wherein the fastening unit comprises:

fastening holes respectively provided in at least one or more of the crucible flange and the crucible cover;

a double nut arranged in the fastening hole of the crucible flange; and

a bolt disposed in the fastening hole of the crucible cover and fastened to the double nut.

10. The deposition apparatus as claimed in claim 9,

wherein the fastening hole of the crucible flange is formed in a stepped shape such that the diameter of the upper side thereof is greater than the diameter of the lower side thereof;

wherein the fastening hole of the crucible cover is formed in a stepped shape such that the diameter of the upper side thereof is greater than the diameter of the lower side thereof; and is

Wherein the diameter of the upper side of the fastening hole of the crucible flange is smaller than the diameter of the lower side of the fastening hole of the crucible cover.

11. The deposition apparatus as claimed in claim 9,

wherein the double nut includes:

an inner nut disposed at an upper side of each fastening hole of the crucible flange and having an inner thread and an outer thread;

an outer nut disposed at a lower side of each fastening hole of the crucible flange and fastened to the outer thread of the inner nut; and is

Wherein the bolt is fastened to the internal thread of the inner nut.

12. The deposition apparatus of claim 1, further comprising a positioning unit fittingly disposed between the crucible flange, the crucible cover, and the heater frame.

13. The deposition apparatus of claim 12, wherein the positioning unit comprises:

at least one or more pins protruding upward from an upper end of the heater frame; and

at least one or more holes provided in the crucible flange and the crucible cover, respectively, to engage with the pins of the heater frame.

[ technical field ]

The present invention relates to a deposition apparatus that deposits a deposition material on a vapor deposition object, and more particularly, to a deposition apparatus that can uniformly maintain the internal temperature of a crucible and effectively prevent a clogging phenomenon at a crucible-side nozzle.

[ background art ]

Deposition is a method of spraying gaseous particles onto the surface of an object, such as metal or glass, to form a thin solid film.

Recently, as the use of an Organic Light Emitting Diode (OLED) display on an electronic device such as a TV or a mobile phone increases, research into devices for an OLED display panel is also active. In particular, a method of manufacturing an OLED display panel includes a process of depositing an organic material on a glass substrate in a vacuum state.

Specifically, the deposition process includes a process of heating a crucible containing an organic material to evaporate the organic material into a gaseous state, and a process of depositing the gaseous organic material on the substrate through a nozzle.

In order to deposit an organic thin film on a large-area substrate, a large crucible is used, but variations in the internal temperature and pressure distribution of the large crucible may be large.

When temperature unevenness occurs inside the crucible, the deposition material is differently consumed according to the position of the crucible, and thus the organic thin film formation efficiency may be reduced. In addition, when the temperature applied to the organic material is higher than the sublimation temperature of the organic material, the organic material is denatured. It is difficult to provide uniform temperature and pressure conditions over the entire area and to suppress denaturation of the organic material due to continuous fixation for a long time.

Korean patent registration No. 1671489 (filed on 29/7/2010) discloses an organic material evaporation source for uniformly maintaining the temperature inside a crucible and a deposition apparatus including the same.

The organic material evaporation source includes a main body, a crucible including a nozzle connected to an opening formed at one side of the main body, a heater disposed near the crucible, a heater frame supporting the crucible and the heater, and a support supporting the heater frame.

Since the heater can be fixed at a position spaced apart from the crucible by the heater frame and the support, the heat of the heater can be uniformly transferred to the crucible as radiant heat.

However, since the temperature difference between the crucible and the heater frame is large, the heat of the heater may be transferred as conduction heat to the crucible through the support. Even if the shape and material of the supporter are improved, there is a limitation in solving the temperature unevenness inside the crucible.

In addition, when the heater frame is deformed, the support may be separated from the prescribed position, and the degree of contact between the support and the crucible may vary, which may further cause temperature unevenness inside the crucible.

Meanwhile, in the deposition process, a gaseous organic material may be deposited around the nozzle to form a film, or a blocking phenomenon blocking the hole of the nozzle may occur.

Therefore, when such a clogging phenomenon occurs, the organic material may be unevenly deposited on the glass substrate. If the clogging phenomenon occurs more seriously, the deposition process needs to be stopped to clean the nozzle.

Korean patent registration No. 662624 (filed on 3/9/2003) discloses a reflector for reducing a heat transfer rate to an upper portion and improving a thermal emissivity to a lower portion and a deposition source for organic electroluminescent layer deposition including the same to solve a clogging phenomenon in which an organic material clogs around a nozzle during deposition.

The reflector includes a body composed of ceramic or metal having a low heat transfer rate, a metal layer formed at the bottom of the body and having a low emissivity, and a support member for contact between the body and an upper member of the deposition source and made of ceramic.

However, the reflector only maintains the temperature of the upper part of the crucible. There is a limitation in completely removing the clogging phenomenon of the nozzle located at the upper portion of the crucible only by the reflector structure.

Korean patent registration No. 1561852 (filed 3/31/2014) discloses a linear evaporation source (from which a heater is detachable) including a first heater unit attached to or detached from a nozzle of a crucible, and second and third heater units corresponding to upper and lower sides of the crucible.

When the nozzle of the crucible is blocked, the first heater unit directly heats the nozzle of the crucible to a certain temperature, so that the blockage of the nozzle is effectively eliminated.

However, in order to separately construct the first heater unit at the nozzle of the crucible, a separate power supply and power line need to be added to control the first heater unit. When deposition is performed on a vapor deposition object, such as a FMM that is temperature sensitive, a separate cooling device needs to be provided in order to prevent overheating of the nozzle. Therefore, maintenance may be difficult due to a complicated structure.

[ summary of the invention ]

[ problem ] to

The present invention is designed to solve the problems of the related art, and an object of the present invention is to provide a deposition apparatus capable of uniformly maintaining the internal temperature of a crucible and effectively preventing a clogging phenomenon at a crucible side nozzle.

Another object of the present invention is to provide a deposition apparatus capable of easily performing maintenance by providing a simple crucible mounting structure.

[ solution ]

A deposition apparatus of an embodiment of the present invention includes a crucible that evaporates a deposition raw material into a deposition material, the crucible including a crucible main body having an upper surface opened and in which the deposition raw material is evaporated into the deposition material, a crucible flange extending outward at an upper portion of the crucible main body, a crucible cover connected to an upper side of the crucible flange and provided with at least one or more nozzles for discharging the deposition material, and a heater unit that includes a heater frame spaced apart from an outer side of the crucible main body, and a heater mounted on an inner wall of the heater frame and spaced apart from the crucible main body, and the crucible flange being supported at an upper end of the heater frame.

The outer wall of the crucible body and the inner wall of the heater frame may be spaced apart from each other by a predetermined distance.

The heater unit may further include side reflectors installed on both side surfaces of an outer wall of the heater frame, and a lower reflector installed at a lower portion of the heater frame to be located below the crucible body.

The deposition apparatus may further include a cooling unit configured to insulate heat discharged from the heater unit.

The cooling unit may include a cooling block spaced apart from an outer side of the heater unit and an upper reflector installed at an upper portion of the cooling block to be located above the crucible cover, and the cooling block may include an insulating material installed therein or a cooling flow path formed therein.

The deposition apparatus may further include a fastening unit configured to connect the crucible cover to the crucible flange.

The fastening unit may include fastening holes respectively provided in at least one or more of the crucible flange and the crucible cover, a double nut disposed in the fastening holes of the crucible flange, and a bolt disposed in the fastening holes of the crucible cover and fastened to the double nut.

The fastening hole of the crucible flange may be formed in a stepped shape such that the diameter of the upper side thereof is greater than the diameter of the lower side thereof, the fastening hole of the crucible cover may be formed in a stepped shape such that the diameter of the upper side thereof is greater than the diameter of the lower side thereof, and the diameter of the upper side of the fastening hole of the crucible flange may be smaller than the diameter of the lower side of the fastening hole of the crucible cover.

The double nut may include an inner nut disposed at an upper side of each of the fastening holes of the crucible flange and having an internal thread and an external thread, an outer nut disposed at a lower side of each of the fastening holes of the crucible flange and fastened to the external thread of the inner nut, and wherein the bolt is fastened to the internal thread of the inner nut.

The deposition apparatus may further include a positioning unit fittingly disposed between the crucible flange, the crucible cover, and the heater frame.

The positioning unit may include at least one or more pins protruding upward from an upper end of the heater frame and at least one or more holes provided in the crucible flange and the crucible cover, respectively, to engage with the pins of the heater frame.

[ Effect of the invention ]

In the deposition apparatus of the present invention, the crucible main body may be located inside the heater frame, the crucible flange formed at an upper portion of the crucible main body may be supported at an upper side of the heater frame, the crucible cover may be fastened to an upper side of the crucible flange by bolts, and the pins of the heater frame may penetrate through the holes of the crucible flange and the crucible cover.

Therefore, since the crucible flange is supported at the upper side of the heater frame, the inside of the crucible main body can be uniformly maintained at a relatively high temperature. Therefore, it is possible to improve the film formation efficiency and control the denaturation of the temperature-sensitive organic material.

In addition, even if conductive heat transfer occurs, relatively high thermal energy can be transferred to the nozzle through the crucible flange, thereby effectively preventing a clogging phenomenon.

In addition, the position of the crucible is easily defined using the positioning pin on the upper side of the heater frame. In addition, even if the heater frame is deformed, the crucible can be easily and effectively fixed at a predetermined position by using the positioning pin.

[ description of the drawings ]

Fig. 1 is a side sectional view showing a deposition apparatus of an embodiment of the present invention.

Fig. 2 is an exploded perspective view illustrating a deposition apparatus according to an embodiment of the present invention.

Fig. 3 is a perspective view showing a part of a deposition apparatus of an embodiment of the present invention.

Fig. 4 is a side view showing a mounting structure of the crucible and the heater unit applied to the present invention.

Fig. 5 is a side sectional view showing a crucible fastening structure applied to the present invention.

FIG. 6 is a side sectional view showing a crucible setting structure applied to the present invention.

[ detailed description of the invention ]

Fig. 1 and 2 are a side sectional view and an exploded perspective view, respectively, illustrating a deposition apparatus according to an embodiment of the present invention.

The deposition apparatus of the present invention may include a vacuum chamber 1 and a deposition source 100 that is conveyably installed in the vacuum chamber 1.

A transfer mechanism 3 that fixes the vapor deposition object 2 is provided on the ceiling of the vacuum chamber 1, and the transfer mechanism 3 can horizontally fix the vapor deposition object 2 above the deposition source 100. The vapor deposition object 2 may be variously configured to include a glass substrate.

A driving unit 4 on which the deposition source 100 is disposed is provided at a lower portion of the vacuum chamber 1, and at least one or more driving units 4 are movable in a horizontal or vertical direction of the vapor deposition object 2 fixed to the vacuum chamber 1. The driving unit 4 may move the deposition source 100 at least in a wider range than the width of the vapor deposition object 2. However, the deposition source 100 may not move and may be in a prescribed position.

The deposition source 100 is an apparatus that supplies a deposition material to form a thin film M on the vapor deposition object 2, and may include a crucible 110 that contains a deposition raw material, a heater unit 120 disposed to surround the crucible 110, and a cooling unit 130 disposed to surround the heater unit 120.

The crucible 110 evaporates the deposition raw material into a deposition material and may include a crucible main body 111, a crucible flange 112, and a crucible cover 113.

The crucible main body 111 is configured in the shape of a container with an open upper surface, and can accommodate a deposition source material and evaporate the deposition source material into a deposition material at a high temperature. The crucible main body 111 may be a rectangular container that is long in the longitudinal direction, and the length of the crucible main body 111 may be greater than at least one of the width or the length of the vapor deposition object 2.

The deposition source material is a solid/liquid material contained in the crucible main body 111, and the deposition material is a gaseous material evaporated in the crucible main body 111. The deposition raw material and the deposition material are the same and are distinguished only for convenience of description, but are not limited thereto.

The crucible flange 112 is configured in a flange shape extending in a radial direction at an upper portion of the crucible main body 111, and may be integrally configured with the crucible main body 111. The crucible flange 112 may support an upper end of a heater frame 121, an upper end of the heater frame 112 and a side reflector 123 or an upper end of a heater 122, which will be described below, or an upper end of a heater bracket (not shown) fixing the heater to the heater frame 112.

The structure in which the crucible flange 112 is mounted on the heater frame 121 will be described in detail below.

The crucible cover 113 may be configured in a cover shape to uniformly discharge the deposition material, and may be installed on the crucible flange 112 to block the upper surface of the crucible main body 111. The crucible cover 113 may be formed in a rectangular shape in the longitudinal direction, similar to the shape of the crucible main body 111 and the crucible flange 112. The structure in which the crucible cover 113 is mounted on the crucible flange 112 will be described in detail below.

The crucible cover 113 is provided with a nozzle 114 through which the deposition material can pass. The plurality of nozzles 114 are provided to uniformly supply the deposition material to the vapor deposition object 2. The nozzles 114 may be arranged in a line at predetermined intervals in the longitudinal direction of the crucible cover 113. The nozzle 114 may be formed in various shapes such as, but not limited to, a hole or a slit.

The heater unit 120 heats the crucible 110, and may include a heater frame 121, a heater 122, a side reflector 123, and a lower reflector 124.

The heater frame 121 is installed to surround the crucible main body 111 to install the heater 122, and may be formed in the shape of a rectangular cylinder that is larger than the crucible main body 111 and has open upper/lower surfaces.

The heater frame 121 may receive the crucible main body 111 and support the crucible flange 112. The height of the heater frame 121 may be greater than that of the crucible body 111, the width of the heater frame 121 may be greater than that of the crucible body 111, and the heater frame may be larger in consideration of the heater installation space and the radiation heat transfer space.

The heater frame 121 may maintain a predetermined distance from the outer wall of the crucible body 111 and face the outer wall of the crucible body 111. The crucible main body 111 is installed at the center of the heater frame 121, and may be installed to maintain a uniform distance between both side outer walls of the crucible main body 111 and both side inner walls of the heater frame 121.

The heater 122 is installed on an inner wall of the heater frame 121 to heat the crucible body 111, and the heater 122 may be disposed so as to maintain a predetermined distance from both sides of the crucible body 111.

The side reflectors 123 and the lower reflector 124 may be configured in a plate shape of a material and a surface state capable of better reflecting radiant heat generated by the heater 122. Heat generated by the heater 122 may be reflected to both sides and the upper side of the crucible 110, and the reflected heat may make heating (e.g., temperature distribution or temperature increase) of the crucible 110 more effective. Therefore, when the heater 122 is operated to increase the internal temperature of the crucible 110 to a set temperature, power consumption of the heater 122 may be reduced.

The side reflector 123 may be installed on an outer wall of the heater frame 121, the height of the side reflector 123 being smaller than that of the heater frame 121, or the side reflector 123 may be installed to avoid the heater frame 121, and the side reflector 123 and an upper surface of the heater frame 121 may constitute the same plane. That is, the crucible flange 123 may be simultaneously supported at the upper ends of the heater frame 121 and the side reflector 123.

The lower reflector 124 may be installed at a lower portion of the heater frame 121, located near a lower portion of the crucible body 111, and installed to face the lower portion of the crucible body 111 and to cross the lower portion of the heater frame 121.

The cooling unit 130 prevents heat of the heater unit 120 from escaping to the outside and may include a side cooling block 131, a lower frame 132, and an upper reflector 133.

The side cooling block 131 is installed to surround the heater frame 121 to prevent heat of the heater unit from escaping to the outside, and may be formed in the shape of a rectangular cylinder that is larger than the heater frame 121 and is opened in the up/down direction.

The height of the side cooling block 131 may be greater than that of the heater frame 121, and the side cooling block may be configured to cover the height of the crucible flange 112 and the crucible cover 113 disposed on the heater frame 121. The width of the side cooling block 131 is greater than that of the heater frame 121 and may be greater in consideration of a predetermined insulation space.

The side cooling block 131 is maintained at a predetermined distance from the outer wall or the side reflector 123 of the heater frame 121 and may face the outer wall or the side reflector 123 of the heater frame 121. The heater frame 121 may be installed at the center of the side cooling block 131, and may be installed to maintain a uniform distance between both side outer walls of the heater frame 121 and both side inner walls of the side cooling block 131.

The side cooling block 131 may include an insulating material built therein or a cooling flow path built therein, but is not limited thereto.

The lower frame 132 may be installed at the lower side of the side cooling block 131, the lower portion of the heater frame 121 is supported by a separate support 132a, and the lower frame may directly support the lower portion of the side cooling block 131. The lower moving frame 132 may move along an upper side of the driving unit 4 provided in the above-described vacuum chamber 1, but is not limited thereto.

The upper reflector 133 is configured in a plate shape made of a material capable of reflecting heat to reflect the heat generated by the heater 122 to the upper side of the crucible 110 and to minimize the influence of the heat generated by the heater 122 on the vapor deposition object 2 or the thin film M formed on the vapor deposition object 2.

The upper reflector 133 may be installed at an upper end of the side cooling block 131 to cover an upper surface of an opening of the side cooling block 131, and may be provided with a hole 133h facing at least a portion of the crucible cover 113 and exposing an upper portion of the nozzle 114 at one side of the crucible cover 113 to the outside.

Hereinafter, the fastening structure and the mounting structure of the crucible 110 will be described in detail.

Fig. 3 is a perspective view showing a part of a deposition apparatus according to an embodiment of the present invention, fig. 4 is a side view showing a mounting structure of a crucible and a heater unit applied to the present invention, and fig. 5 and 6 are side sectional views showing a crucible fastening structure and a mounting structure applied to the present invention.

A crucible flange 112 (shown in fig. 1) integrally formed at an upper portion of the crucible main body 111 may be fastened to the crucible cover 113 and supported at an upper end of the heater frame 121.

The fastening structure of the crucible flange 112 and the crucible cover 113 is as follows.

The crucible cover 113 may be fastened to an upper side of the crucible flange 112 by a fastening unit, and the fastening unit may include a bolt 141 and double nuts 142 and 143.

At least one or more fastening holes 112H and 113H are provided at points corresponding to each other in the crucible flange 112 and the crucible cover 113, and the fastening hole of the crucible flange (hereinafter, referred to as a lower fastening hole 112H) and the fastening hole of the crucible cover (hereinafter, referred to as a lower fastening hole 113H) may penetrate in a vertical direction.

A plurality of upper/lower fastening holes 112H and 113H are provided at certain intervals in the longitudinal direction of the crucible flange 112 and the crucible cover 113, and a groove 121H may be provided in the upper end of the heater frame 121 corresponding to the upper/lower fastening holes 112H and 113H to secure a space in which a fastening unit, which will be described below, may be located.

Diameter D of the upper side of the upper fastening hole 113H₂Is larger than the diameter d of the lower side of the upper fastening hole₂And the bolt head 141a may be seated in the upper fastening hole 113H. No thread is formed in the inner circumferential surface of the upper fastening hole 113H, and the upper fastening hole has a stepped hole shape penetrating in the vertical direction. The bolt head 141a may be exposed to an upper side of the upper fastening hole 113H.

Similarly, the diameter D of the upper side of the lower fastening hole 112H₁Is greater than the diameter d of the lower side of the lower fastening hole₁And double nuts 142 and 143 may be seated in the lower fastening hole 112H. Diameter D of the upper side of the lower fastening hole 112H₁Preferably larger than the diameter d of the lower side of the upper fastening hole 113H₂. No thread is formed in the inner circumferential surface of the lower fastening hole 112H, and the lower fastening hole has a stepped hole shape penetrating in the vertical direction. The inner nuts 142 and 143 may be exposed to the lower side of the lower fastening hole 112H.

Double nuts 142 and 143 may include an inner nut 142 and an outer nut 143.

The outer diameter of the upper side of the inner nut 142 is greater than the outer diameter of the lower side of the inner nut 142, and the upper portion 142a of the inner nut may be seatedIn the lower fastening holes 112H. The outer diameter of the upper portion 142a of the inner nut may be smaller than the diameter D of the upper side of the lower fastening hole 112H₁And may be greater than the diameter d of the lower side of the lower fastening hole 112H₁. The outer diameter of the lower portion 142b of the inner nut may be smaller than the diameter d of the lower side of the lower fastening hole 112H₁. An installation space of the outer nut 143, which will be described below, may be secured between the lower portion 142b of the inner nut and the lower side of the lower fastening hole 112H, and an external thread 142c may be formed on an outer circumferential surface of the lower portion 142b of the inner nut.

A vertical penetration hole may be provided in the center of the inner nut 142, an internal thread 142d may be formed in an inner circumferential surface of the hole of the inner nut 142, and a bolt thread 141b may be fastened to the internal thread 142d of the inner nut.

The outer diameter of the lower side of the outer nut 143 may be greater than the outer diameter of the upper side of the outer nut, and the lower portion 143b of the outer nut may be supported on the lower peripheral portion of the lower fastening hole 112H. The outer diameter of the upper portion 143a of the outer nut may be smaller than the diameter d of the lower side of the lower fastening hole 112H₁And the outer diameter of the lower portion 143b of the outer nut may be greater than the diameter d of the lower side of the lower fastening hole 112H₁。

A vertical penetration hole may be provided in the center of the outer nut 143, an internal thread 143c may be formed in an inner circumferential surface of the hole of the outer nut, and an external thread 142c of the inner nut may be fastened to the internal thread 143c of the outer nut.

The assembly process of the crucible flange and the crucible cover will now be described.

The inner nut 142 is seated on an upper side of the lower fastening hole 112H of the crucible flange 112, the outer nut 143 is assembled on a lower side of the lower fastening hole 112H of the crucible flange 112, and the external thread 142c of the inner nut is fastened to the internal thread 143c of the outer nut.

After the crucible cover 113 is positioned on the crucible flange 112 such that the lower fastening hole 112H of the crucible flange 112 corresponds to the upper fastening hole 113H of the crucible cover 113, the bolt head 141a is seated in the upper fastening hole 113H of the crucible cover 113, and the bolt thread 141b is fastened to the internal thread 142d of the internal nut.

Therefore, although the bolt threads 141b, the external threads 142c and the internal threads 142d of the internal nut, and the internal threads 143c of the external nut are damaged, the bolt 141, the internal nut 142, and the external nut 143 may be disassembled when the internal nut 142 or the external nut 143 exposed to the lower side of the crucible flange 112 is cut.

The crucible cover 113 can be easily separated from the crucible flange 112 without damaging the crucible flange 112 and the crucible cover 113, and access and maintenance of the crucible main body 111 (shown in fig. 1) are easy. Even if the screw thread is damaged, the entire crucible 111 (shown in fig. 1) does not need to be replaced, thereby reducing the production cost.

Meanwhile, the crucible flange 112 and the crucible cover 113 may be placed at prescribed positions of the upper end of the heater frame 121 by a positioning unit, and the positioning unit may be fittingly disposed between the crucible flange 112, the crucible cover 113, and the heater frame 121.

In some embodiments, the positioning unit may be a pin 121a protruding upward from the upper end of the heater frame 121, and holes 112h and 113h provided in the crucible flange 112 and the crucible cover 113, respectively, to be engaged with the pin 121a of the heater frame, but is not limited thereto.

The plurality of pins 121a of the heater frame may be disposed at intervals in the longitudinal direction of the heater frame 121, and the plurality of holes 112h of the crucible flange and the plurality of holes 133h of the crucible cover may be disposed at intervals in the longitudinal direction of the crucible flange 112 and the crucible cover 113.

The diameter of the pins 121a of the heater frame is preferably smaller than the predetermined tolerance of the holes 112h of the crucible flange and the holes 112h of the crucible cover. The pin 121a of the heater frame may have a diameter narrowed toward an upper portion thereof so as to be easily inserted. The hole 112h of the crucible flange and the hole 113h of the crucible cover may be configured to have the same size, and may be formed to have a size greater than the maximum diameter of the portion of the pin 121a of the heater frame.

With the above-described configuration, when the crucible flange 112 and the crucible cover 113 are supported on the heater frame 121, if the pins 121a of the heater frame are inserted into the holes 112h and 113h of the crucible flange and the crucible cover, the crucible 110 (shown in fig. 1) can be easily placed at a prescribed position of the heater unit 120 (shown in fig. 1).

In addition, even if the heater frame 121 is deformed, the diameter of the pin 121a of the heater frame may be changed to prevent the position of the crucible 110 (shown in fig. 1) from being changed. The crucible body 111 (shown in fig. 1) may be located at the center of the heater frame 121 to provide uniform radiant heat to the crucible body 111 (shown in fig. 1).

The above description is only illustrative of the technical idea of the present invention, and various modifications and changes can be made by those skilled in the art to which the present invention pertains without departing from the essential features of the present invention.

Therefore, the disclosed embodiments of the present invention are not intended to limit the technical spirit of the present invention, but are intended to explain the technical spirit of the present invention, and the scope of the technical spirit of the present invention is not limited by these embodiments.

The scope of the present invention should be construed by the claims set forth below, and all technical ideas within the equivalent scope thereof should be construed to be included in the scope of the present invention.

[ Industrial Applicability ]

The present embodiment may provide a deposition apparatus that deposits an organic material on a glass substrate in a thin film shape when manufacturing an OLED display panel.