阅读说明：本技术 一种工艺腔室 (Process chamber ) 是由 李冲 吴琼 孙红霞 于 2019-04-30 设计创作，主要内容包括：本发明公开了一种工艺腔室,用于柔性太阳能电池的柔性衬板镀膜,包括：腔室主体,具有围成一收容空间的顶壁、前侧壁、后侧壁、左侧壁、右侧壁、底壁,所述左侧壁开设有进料口、所述右侧壁开设有出料口；限位装置,所述顶壁和所述底壁中的至少一个壁设置有所述限位装置,所述限位装置限制所述柔性衬板上下移动。本发明通过在腔室中设置限位装置,限位装置限制传动过程中的柔性衬板上下移动,从而保证柔性衬板在传动过程中始终保持表面平整,防止柔性衬板在传动过程中因上下浮动导致柔性衬板上端翘曲和下端翘曲,而出现划伤或褶皱等不良问题,从而提升生产良率。(The invention discloses a process chamber for flexible liner plate coating of a flexible solar cell, which comprises the following steps: the cavity body is provided with a top wall, a front side wall, a rear side wall, a left side wall, a right side wall and a bottom wall which enclose an accommodating space, wherein the left side wall is provided with a feeding hole, and the right side wall is provided with a discharging hole; and at least one wall of the top wall and the bottom wall is provided with the limiting device, and the limiting device limits the flexible lining plate to move up and down. According to the invention, the limiting device is arranged in the cavity and limits the flexible lining plate to move up and down in the transmission process, so that the surface of the flexible lining plate is always kept flat in the transmission process, the problems of scratching or wrinkling and the like caused by the warping of the upper end and the warping of the lower end of the flexible lining plate due to up-and-down floating of the flexible lining plate in the transmission process are prevented, and the production yield is improved.)

1. A process chamber is used for coating a flexible lining plate of a flexible solar cell and is characterized in that: the method comprises the following steps:

the cavity body is provided with a top wall, a front side wall, a rear side wall, a left side wall, a right side wall and a bottom wall which enclose an accommodating space, wherein the left side wall is provided with a feeding hole, and the right side wall is provided with a discharging hole;

and at least one wall of the top wall and the bottom wall is provided with the limiting device, and the limiting device limits the flexible lining plate to move up and down.

2. The process chamber of claim 1, wherein: the stop device includes:

A housing coupled to the chamber body;

and the limiting roller is transversely and rotatably arranged on the shell, and the outer surface of the limiting roller is abutted against the edge of the flexible lining plate.

3. The process chamber of claim 2, wherein: and grooves are formed in the circumferential direction of the outer surface of the limiting roller.

4. The process chamber of claim 2, wherein: the stop device still includes:

the pinch roll set comprises a first pinch roll and a second pinch roll, and the first pinch roll and the second pinch roll are both longitudinally and rotatably arranged on the shell;

and a crack is formed between the first pinch roll and the second pinch roll and is used for the flexible lining plate to pass through.

5. The process chamber of claim 4, wherein: the distance between the first pinch roll and the second pinch roll is adjustable.

6. The process chamber of claim 4, wherein: the housing includes: the first shell is in an E shape; the second shell is in an E shape; the first shell and the second shell are oppositely arranged, and an I-shaped cavity is formed between the first shell and the second shell;

The first pinch roll is arranged on the first shell, and the second pinch roll is arranged on the second shell and is relatively accommodated in the upper cavity of the I-shaped cavity;

one end of the limiting roller is arranged on the first shell, the other end of the limiting roller is arranged on the second shell, and the limiting roller is accommodated in the lower cavity of the I-shaped cavity.

7. The process chamber of claim 6, wherein: the first shell is provided with a first supporting part, the second shell is provided with a second supporting part, the transverse shaft rod penetrates through the limiting idler wheel, one end of the transverse shaft rod is rotatably connected with the first supporting part, and the other end of the transverse shaft rod is rotatably connected with the second supporting part.

8. The process chamber of claim 1, wherein: the limiting idler wheels are arranged in a plurality of numbers and distributed at intervals along the horizontal direction, and the outer surfaces of the limiting idler wheels are at the same height.

9. The process chamber of claim 4, wherein: the pinch roll group is arranged in a plurality of rows and is distributed at intervals along the transverse direction.

10. The process chamber of claim 1, wherein: the limiting devices are arranged in two, and are oppositely arranged on the top wall and the bottom wall.

Technical Field

The invention belongs to the technical field of solar cell processing equipment, and particularly relates to a process chamber.

Background

Disclosure of Invention

The technical problem to be solved by the invention is to overcome the defects of the prior art and provide a process chamber, wherein the surface of a flexible lining plate is always kept flat in the transmission process, and the problems of scratches, folds and the like caused by the warping of the upper end and the lower end of the flexible lining plate due to the up-and-down floating of the flexible lining plate in the transmission process are prevented, so that the production yield is improved.

In order to solve the technical problems, the invention adopts the technical scheme that: a process chamber for flexible liner plating of flexible solar cells, comprising:

the cavity body is provided with a top wall, a front side wall, a rear side wall, a left side wall, a right side wall and a bottom wall which enclose an accommodating space, wherein the left side wall is provided with a feeding hole, and the right side wall is provided with a discharging hole;

And at least one wall of the top wall and the bottom wall is provided with the limiting device, and the limiting device limits the flexible lining plate to move up and down.

Further, stop device includes:

a housing coupled to the chamber body;

and the limiting roller is transversely and rotatably arranged on the shell, and the outer surface of the limiting roller is abutted against the edge of the flexible lining plate.

Furthermore, the outer surface circumference of spacing gyro wheel sets up the recess.

Further, stop device still includes:

the pinch roll set comprises a first pinch roll and a second pinch roll, and the first pinch roll and the second pinch roll are both longitudinally and rotatably arranged on the shell;

and a crack is formed between the first pinch roll and the second pinch roll and is used for the flexible lining plate to pass through.

Further, the distance between the first pinch roll and the second pinch roll is adjustable.

Further, the housing includes: the first shell is in an E shape; the second shell is in an E shape; the first shell and the second shell are oppositely arranged, and an I-shaped cavity is formed between the first shell and the second shell;

The first pinch roll is arranged on the first shell, and the second pinch roll is arranged on the second shell and is relatively accommodated in the upper cavity of the I-shaped cavity;

one end of the limiting roller is arranged on the first shell, the other end of the limiting roller is arranged on the second shell, and the limiting roller is accommodated in the lower cavity of the I-shaped cavity.

Furthermore, the first shell is provided with a first supporting part, the second shell is provided with a second supporting part, the transverse shaft rod penetrates through the limiting idler wheel, one end of the transverse shaft rod is rotatably connected with the first supporting part, and the other end of the transverse shaft rod is rotatably connected with the second supporting part.

Furthermore, the limiting idler wheels are arranged in a plurality of numbers and distributed at intervals along the horizontal direction, and the outer surfaces of the limiting idler wheels are at the same height.

Further, the pinch roll group is arranged in a plurality of groups and distributed at intervals in a straight line in the transverse direction.

Furthermore, the two limiting devices are arranged on the top wall and the bottom wall oppositely.

According to the invention, the limiting device is arranged in the cavity and limits the flexible lining plate to move up and down in the transmission process, so that the surface of the flexible lining plate is always kept flat in the transmission process, the problems of scratching or wrinkling and the like caused by the warping of the upper end and the warping of the lower end of the flexible lining plate due to up-and-down floating of the flexible lining plate in the transmission process are prevented, and the production yield is improved.

The following describes embodiments of the present invention in further detail with reference to the accompanying drawings.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention, are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention without limiting the invention to the right. It is obvious that the drawings in the following description are only some embodiments, and that for a person skilled in the art, other drawings can be derived from them without inventive effort. In the drawings:

FIG. 1 is a schematic view of the overall structure of a process chamber according to the present invention;

FIG. 2 is a schematic view of a structure of a position limiting device provided by the present invention;

FIG. 3 is a schematic diagram of a right-view structure of the limiting device provided by the present invention;

fig. 4 is a schematic sectional view taken along line a-a in fig. 3.

In the figure: 1. a top wall; 2. a front side wall; 3. a rear sidewall; 4. a left side wall; 5. a right side wall; 6. a bottom wall; 7. a chamber body; 8. a limiting device; 9. a housing; 91. a first housing; 92. a second housing; 10. a first pinch roll; 11. a second pinch roll; 12. limiting the idler wheel; 13. a groove; 14. a discharge port; 15. and (4) feeding a material inlet.

It should be noted that the drawings and the description are not intended to limit the scope of the inventive concept in any way, but to illustrate it by a person skilled in the art with reference to specific embodiments.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and the following embodiments are used for illustrating the present invention and are not intended to limit the scope of the present invention.

In the description of the present invention, it should be noted that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

As shown in fig. 1 to 4, the present invention provides a process chamber for coating a flexible substrate of a flexible solar cell, the process chamber including a chamber body 7 and a position limiting device 8.

Specifically, the chamber body 7 has a top wall 1 enclosing an accommodating space, a front side wall 2, a rear side wall 3, a left side wall 4, a right side wall 5 and a bottom wall 6, the left side wall 4 has a feed inlet 15, the right side wall 5 has a discharge outlet 14, at least one of the top wall 1 and the bottom wall 6 of the limiting device 8 is provided with the limiting device 8, further, the limiting device 8 can be arranged on the top wall 1 of the chamber body 7 and also on the bottom wall 6 of the chamber body 7, and the limiting device 8 can be arranged on both the top wall 1 of the chamber body 7 and on the bottom wall 6 of the chamber body 7.

When the flexible lining plate enters from the feeding hole 15 and is transmitted to the discharging hole 14 in the process chamber, the limiting device 8 limits the flexible lining plate to move up and down in the chamber. Prevent that flexible welt from reciprocating at the transmission in-process to guarantee that flexible welt keeps the surfacing throughout at the transmission in-process, prevent that flexible welt from leading to flexible welt upper end warpage and lower extreme warpage because of reciprocating in the transmission, and bad problems such as fish tail or fold appear, thereby promote the production yield.

Further, the limiting device 8 comprises a housing 9 and a limiting roller 12, the housing 9 is connected with the chamber body 7, the housing 9 and the chamber can be integrally formed, or can be connected by an existing mechanical connection method, which is not limited herein. The limiting roller 12 is rotatably arranged on the shell 9 along the transverse direction, and the outer surface of the limiting roller 12 is abutted against the edge of the flexible lining plate. When the flexible lining plate tends to move upwards or downwards in the transmission process, the limiting idler wheel 12 can provide a blocking acting force for the flexible lining plate due to the fact that the outer surface of the limiting idler wheel 12 abuts against the edge of the flexible lining plate, and therefore the flexible lining plate is limited from moving up and down in the transmission process.

Preferably, a groove 13 is circumferentially formed on the outer surface of the limit roller 12. The edge of the flexible liner rests against the groove bottom surface of the groove 13. The side walls of the recess 13 limit the horizontal movement of the edges of the flexible liner.

Further, the limiting device 8 comprises a pinch roll set, the pinch roll set comprises a first pinch roll 10 and a second pinch roll 11, the first pinch roll 10 and the second pinch roll 11 are both longitudinally and rotatably arranged on the shell 9, a gap is formed between the first pinch roll 10 and the second pinch roll 11, and the gap is used for a flexible lining plate to pass through. The pinch rollers can limit the movement of the flexible lining plate in the horizontal direction during the transmission process.

Preferably, the width of the slit is the same as the thickness of the flexible lining plate, the flexible lining plate passes through the slit formed between the first pinch roller 10 and the second pinch roller 11 in the transmission process of the flexible lining plate, and the first pinch roller 10 and the second pinch roller 11 generate a clamping force on the flexible lining plate, wherein the clamping force can not only guide the transmission direction of the flexible lining plate, but also limit the movement of the flexible lining plate in the horizontal direction in the transmission process and the movement of the flexible lining plate in the height direction in the transmission process.

More preferably, due to the difference in the thickness of the flexible substrate or the long-term tightening fit between the first pinch roller 10 and the second pinch roller 11 and the flexible substrate, the outer surfaces of the first pinch roller 10 and the second pinch roller 11 are worn, so that the distance between the first pinch roller 10 and the second pinch roller 11 is increased, and the distance between the first pinch roller 10 and the second pinch roller 11 is larger than the thickness of the flexible substrate. So that the first pinch roll 10 and the second pinch roll 11 do not exert a clamping force on the flexible liner, and to solve this problem, the distance between the first pinch roll 10 and the second pinch roll 11 is adjustable. The first pinch roll 10 may be movable towards the second pinch roll 11, or the second pinch roll 11 may be movable towards the first pinch roll, or the first pinch roll 10 and the second pinch roll 11 may be movable relative to each other. The moving implementation mode is an existing pinch roll set control distance adjusting mode and is not specifically set forth herein.

As shown in fig. 1 to 4, the present invention provides a process chamber for coating a flexible substrate of a flexible solar cell, the process chamber including a chamber body 7 and a position limiting device 8.

The chamber body 7 is provided with a top wall 1, a front side wall 2, a rear side wall 3, a left side wall 4, a right side wall 5 and a bottom wall 6 which enclose an accommodating space, the left side wall 4 is provided with a feeding hole 15, the right side wall 5 is provided with a discharging hole 14, the limiting device 8 comprises a shell 9 and a limiting roller 12, the shell 9 is connected with the chamber body 7, the shell 9 and the chamber can be integrally formed and can also be connected in the existing mechanical connection mode, and limitation is not performed here.

Specifically, the limiting device 8 comprises a shell 9, the shell 9 comprises a first shell 91 and a second shell 92, and the first shell 91 is in an "E" shape; the second shell 92 is in an E shape, the first shell 91 and the second shell 92 are oppositely arranged, an i-shaped cavity is formed between the first shell 91 and the second shell 92, the first pinch roll 10 is arranged on the first shell 91, the second pinch roll 11 is arranged on the second shell 92 and is oppositely accommodated in an upper cavity of the i-shaped cavity, one end of the limiting roller 12 is arranged on the first shell 91, the other end of the limiting roller is arranged on the second shell 92, and the limiting roller 12 is accommodated in a lower cavity of the i-shaped cavity.

The first pinch roll 10 is mounted on the first housing 91 through a longitudinal shaft, and is located in an upper cavity of the i-shaped cavity, and the first pinch roll 10 can rotate circumferentially around the longitudinal shaft.

The second pinch roll 11 is mounted on the second housing 92 through a longitudinal shaft, and is located in an upper cavity of the cavity shaped like an i, and the second pinch roll 11 can rotate circumferentially around the longitudinal shaft.

A gap is formed between the first pinch roll 10 and the second pinch roll 11, and the gap is used for the flexible lining plate to pass through. The flexible lining plate passes through a gap formed between the first pinch roll 10 and the second pinch roll 11, and the first pinch roll 10 and the second pinch roll 11 generate a clamping force on the flexible lining plate, wherein the clamping force can not only guide the transmission direction of the flexible lining plate, but also limit the horizontal movement of the flexible lining plate in the transmission process.

The first housing 91 is provided with a first supporting portion which is located in the lower cavity of the cavity shaped like the Chinese character 'gong', the second housing 92 is provided with a second supporting portion which is located in the lower cavity of the cavity shaped like the Chinese character 'gong', the transverse shaft rod penetrates through the limiting idler wheel 12, one end of the transverse shaft rod is rotatably connected with the first supporting portion, and the other end of the transverse shaft rod is rotatably connected with the second supporting portion.

The limiting idler wheel 12 is rotatably arranged on the shell 9 along the transverse direction, the limiting idler wheel 12 is positioned in a lower cavity of the I-shaped cavity, and the outer surface of the limiting idler wheel 12 abuts against the edge of the flexible lining plate. When the flexible lining plate tends to move upwards or downwards in the transmission process, the limiting roller 12 can provide a blocking acting force for the flexible lining plate due to the fact that the outer surface of the limiting roller 12 abuts against the edge of the flexible lining plate, and therefore the up-and-down movement of the flexible lining plate in the transmission process is limited.

Furthermore, the limiting idler wheels 12 are arranged in a plurality of numbers and distributed at intervals along the horizontal direction, and the outer surfaces of the limiting idler wheels 12 are at the same height. The pinch roll group is arranged in a plurality of rows and is distributed at intervals along the transverse direction.

Because the length of the process chamber in the transverse direction is different, when the length is longer, the limiting rollers 12 are arranged in a plurality and are distributed at intervals in a straight line in the transverse direction.

The outer surfaces of the limiting rollers 12 are abutted against the edge of the flexible lining plate together at a height, so that the flexible lining plate is more effectively limited from moving up and down in the transmission process.

Likewise, the pinch roll group is provided in plurality, and is distributed at intervals in a line in the transverse direction. The plurality of pinch roll sets jointly generate clamping force to the flexible lining plate, can better guide the transmission direction of the flexible lining plate, and can limit the horizontal direction in the transmission process of the flexible lining plate and the height direction in the transmission process of the flexible lining plate.

Preferably, the outer surfaces of the first pinch roll 10, the second pinch roll 11 and the limiting idler wheel 12 are provided with anti-abrasion layers, so that the abrasion resistance is enhanced, and the damage is prevented.

The invention provides a process chamber for coating a flexible lining plate of a flexible solar cell, which comprises a chamber main body 7 and a limiting device 8.

Specifically, the chamber body 7 has a top wall 1 enclosing an accommodating space, a front side wall 2, a rear side wall 3, a left side wall 4, a right side wall 5 and a bottom wall 6, the left side wall 4 has been provided with a feed inlet 15, the right side wall 5 has been provided with a discharge outlet 14, at least one of the top wall 1 and the bottom wall 6 of the chamber body 7 is provided with a limiting device 8, further, the limiting device 8 can be arranged on the top wall 1 of the chamber body 7 and also can be arranged on the bottom wall 6 of the chamber body 7, and the limiting device 8 can be arranged on both the top wall 1 of the chamber body 7 and the bottom wall 6 of the chamber body 7.

Because the pinch roll set in the limiting device 8 generates a clamping force on the flexible lining plate, the clamping force can not only guide the transmission direction of the flexible lining plate, but also limit the horizontal movement of the flexible lining plate in the transmission process and the height movement of the flexible lining plate in the transmission process.

So as long as at least one wall in roof 1 and the diapire 6 of chamber main part 7 is provided with stop device 8, just can realize preventing that flexible welt from reciprocating at the transmission in-process to guarantee that flexible welt remains the surfacing throughout at the transmission in-process, prevent that flexible welt from leading to flexible welt upper end warpage and lower extreme warpage because of reciprocating in the transmission, and bad problems such as fish tail or fold appear, thereby promote the production yield.

Preferably, the limiting means 8 are provided in two, oppositely arranged to the top wall 1 and the bottom wall 6.

When the flexible lining plate enters the process chamber from the feeding hole 15 and is transmitted to the discharging hole 14, the flexible lining plate enters the process chamber from the feeding hole 15, the upper end surface of the flexible lining plate is leaned against the outer surface of the limiting roller 12 of the limiting device 8 arranged on the top wall 1. The upper end of the flexible lining board passes through a gap formed between a first pinch roller 10 and a second pinch roller 11 of a limiting device 8 arranged on the top wall 1.

The lower end surface of the flexible lining plate is leaned against the outer surface of a limiting roller 12 of a limiting device 8 arranged on the bottom wall 6. The lower end of the flexible lining plate passes through a gap formed between a first pinch roll 10 and a second pinch roll 11 of a limiting device 8 arranged on the bottom wall 6.

The flexible lining plate enters from the feeding hole 15, passes through the process chamber and reaches the discharging hole 14, and the flexible lining plate is guided and limited in the transmission process through the limiting devices 8 which are oppositely arranged on the top wall 1 and the bottom wall 6. The flexible lining plate is enabled to keep the surface smooth all the time in the transmission process, the problems that the upper end of the flexible lining plate is warped and the lower end of the flexible lining plate is warped due to the fact that the flexible lining plate moves up and down in the transmission process, scratches or wrinkles occur and the like are not good are solved, and the production yield is improved.

Although the present invention has been described with reference to a preferred embodiment, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.