Vacuum coating box for coating film on middle part of plate

文档序号:983227 发布日期:2020-11-06 浏览:2次 中文

阅读说明:本技术 一种板件中部部分镀膜真空镀膜箱体 (Vacuum coating box for coating film on middle part of plate ) 是由 吴广龙 于 2020-07-14 设计创作,主要内容包括:本发明公开了一种板件中部部分镀膜真空镀膜箱体,包括主箱体,所述主箱体的底板的底面固定有多个支撑腿,底部横向板的侧壁固定在多个支撑腿的侧壁上,提升板插套在主箱体中,提升板的底面中部固定有提升螺套,提升螺套插套在主箱体的底板的中部具有的贯穿通孔,提升螺套上螺接有提升螺杆,提升螺杆的底部通过轴承铰接在底部横向板上,提升螺杆的底端伸出底部横向板的底面并固定有传动齿轮。本发明采用可多次使用的上盖体和防护套筒进行局部覆盖,方便待加工件的局部镀膜,其可以重复利用,利用率高,同时,其提升板可以进行高低升降,可以满足不同高度的待加工件的表面镀膜,使用范围广。(The invention discloses a vacuum coating box body for partially coating a film on the middle part of a plate, which comprises a main box body, wherein a plurality of supporting legs are fixed on the bottom surface of a bottom plate of the main box body, the side wall of a bottom transverse plate is fixed on the side walls of the plurality of supporting legs, a lifting plate is inserted and sleeved in the main box body, a lifting screw sleeve is fixed in the middle of the bottom surface of the lifting plate, a through hole is formed in the middle of the bottom plate of the main box body in an inserted and sleeved mode, a lifting screw rod is screwed on the lifting screw sleeve, the bottom of the lifting screw rod is hinged on the bottom transverse plate through a bearing, and the bottom end of the lifting screw rod extends out. The invention adopts the upper cover body and the protective sleeve which can be used repeatedly to carry out local covering, is convenient for local coating of the workpiece to be processed, can be reused, has high utilization rate, can carry out high-low lifting on the lifting plate, can meet the requirements of surface coating of the workpiece to be processed with different heights, and has wide application range.)

1. The utility model provides a partial coating film vacuum coating box in panel middle part, includes main tank body (10), its characterized in that: the bottom surface of the bottom plate of the main box body (10) is fixed with a plurality of supporting legs (11), the side wall of a bottom transverse plate (12) is fixed on the side wall of the supporting legs (11), a lifting plate (13) is inserted in the main box body (10), the middle part of the bottom surface of the lifting plate (13) is fixed with a lifting screw sleeve (14), the lifting screw sleeve (14) is inserted in a through hole (15) formed in the middle part of the bottom plate of the main box body (10), a lifting screw rod (141) is screwed on the lifting screw sleeve (14), the bottom of the lifting screw rod (141) is hinged on the bottom transverse plate (12) through a bearing, the bottom end of the lifting screw rod (141) extends out of the bottom surface of the bottom transverse plate (12) and is fixed with a transmission gear (142), a lower connecting transverse plate (16) is arranged under the bottom transverse plate (12), the side wall of the lower connecting transverse plate (16) is fixed on the side wall of, a lifting motor (17) is fixed on the bottom surface of the lower connecting transverse plate (16), an output shaft of the lifting motor (17) penetrates through the lower connecting transverse plate (16) and is fixed with a driving gear (171), and the driving gear (171) is meshed with the transmission gear (142);

a sealing ring (131) is fixed on the side wall of the lifting plate (13), the outer side wall of the sealing ring (131) is tightly attached to the inner side wall of the main box body (10), the top surface of the lifting plate (13) is fixedly connected with an upper cover body (18) through bolts, an inner cavity (1) is arranged between the upper cover body (18) and the top surface of the lifting plate (13), a workpiece (100) to be machined is placed on the top surface of the lifting plate (13), and the workpiece (100) to be machined is located in the inner cavity (1) and clamped between the upper cover body (18) and the lifting plate (13);

treat central through hole (181) that the middle part of the top surface middle part bellying plug bush of machined part (100) had at the middle part of the roof of upper cover body (18), treat that the top surface middle part shaping of the top surface middle part bellying of machined part (100) has screw post (101), protective sleeve (19) spiro union is on screw post (101), protective sleeve (19) the bottom plug bush in treat in the annular groove (102) that the top surface middle part bellying of machined part (100) formed, protective sleeve (19) cover the top surface and the lateral wall of screw post (101).

2. The vacuum coating box for partially coating the middle part of a plate according to claim 1, wherein: and a sealing ring (182) is fixed on the inner side wall of the central through hole (181), and the side wall of the middle protruding part of the top surface of the workpiece (100) to be machined is pressed against the inner side wall of the sealing ring (182).

3. The vacuum coating box for partially coating the middle part of a plate according to claim 1, wherein: the bottom surface of the edge of the upper cover body (18) is provided with an annular groove, the lower sealing ring (2) is nested in the annular groove, and the bottom surface of the lower sealing ring (2) is pressed against the top surface of the edge of the lifting plate (13).

4. The vacuum coating box for partially coating the middle part of a plate according to claim 1, wherein: a guide self-lubricating sleeve (151) is fixed on the inner side wall of the through hole (15), the lifting screw sleeve (14) is inserted in the guide self-lubricating sleeve (151), and the outer side wall of the lifting screw sleeve (14) is tightly attached to the inner side wall of the guide self-lubricating sleeve (151).

5. The vacuum coating box for partially coating the middle part of a plate according to claim 1, wherein: a plurality of magnetron sputtering targets (6) are fixed on the bottom surface of the top plate of the main box body (10).

6. The vacuum coating box for partially coating the middle part of a plate according to claim 1, wherein: a plurality of guide rods (131) are fixed on the bottom surface of the lifting plate (13), and the guide rods (131) are inserted into vertical guide through holes (3) formed in the bottom plate of the main box body (10).

7. The vacuum coating box for partially coating the middle part of a plate according to claim 6, wherein: an inner guide sleeve (4) is fixed on the inner side wall of the vertical guide through hole (3), and the guide rod (131) is inserted in the inner guide sleeve (4).

8. The vacuum coating box for partially coating the middle part of a plate according to claim 6, wherein: the bottom end of the guide rod (131) is fixed with a lower limiting plate (132).

9. The vacuum coating box for partially coating the middle part of a plate according to claim 1, wherein: the side wall of the front wall surface of the main box body (10) is hinged with a box door (20) through a hinge shaft.

10. The vacuum coating box for partially coating the middle part of a plate according to claim 1, wherein: and a sealing layer (5) is fixed at the bottom end of the protective sleeve (19), and the sealing layer (5) is inserted into the annular groove (102) and pressed against the bottom surface of the annular groove (102).

Technical Field

The invention relates to the technical field of vacuum coating equipment, in particular to a vacuum coating box body for coating a middle part of a plate.

Background

Vacuum coating is an important aspect in the field of vacuum application, and provides a new process for preparing a film for scientific research and practical production by using a physical or chemical method based on a vacuum technology and absorbing a series of new technologies such as electron beams, molecular beams, ion beams, plasma beams, radio frequency, magnetic control and the like.

The existing specific parts only need to be partially coated, at the moment, the covering can be fixed only through the positions on the parts without coating, the existing covering generally has a one-time use effect, cannot be repeatedly used and is limited in effect, meanwhile, the height of the fixed position of the existing parts is fixed, the parts cannot be adjusted according to objects to be processed with different heights, and the use range is limited.

Disclosure of Invention

The invention aims to overcome the defects of the prior art and provides a vacuum coating box body for partially coating the middle part of a plate, which adopts an upper cover body and a protective sleeve which can be used repeatedly to partially cover, is convenient for the local coating of a workpiece to be processed, can be repeatedly used, has high utilization rate, can be lifted up and down by a lifting plate, can meet the requirements of surface coating of workpieces to be processed with different heights, and has wide application range.

The scheme for solving the technical problems is as follows:

a vacuum coating box for partially coating a film on the middle part of a plate comprises a main box body, wherein a plurality of supporting legs are fixed on the bottom surface of a bottom plate of the main box body, the side wall of a bottom transverse plate is fixed on the side wall of the plurality of supporting legs, a lifting plate is inserted in the main box body, a lifting screw sleeve is fixed in the middle of the bottom surface of the lifting plate, a through hole is formed in the middle of the bottom plate of the main box body in an inserted manner, a lifting screw rod is screwed on the lifting screw sleeve, the bottom of the lifting screw rod is hinged on the bottom transverse plate through a bearing, the bottom end of the lifting screw rod extends out of the bottom surface of the bottom transverse plate and is fixed with a transmission gear, a lower connecting transverse plate is arranged under the bottom transverse plate, the side wall of the lower connecting transverse plate is fixed on the side wall of the corresponding supporting leg, a lifting motor is fixed on the, the driving gear is meshed with the transmission gear;

the side wall of the lifting plate is fixedly provided with a sealing ring, the outer side wall of the sealing ring is tightly attached to the inner side wall of the main box body, the top surface of the lifting plate is fixedly connected with an upper cover body through bolts, an inner cavity is arranged between the upper cover body and the top surface of the lifting plate, a workpiece to be machined is placed on the top surface of the lifting plate, and the workpiece to be machined is positioned in the inner cavity and clamped between the upper cover body and the lifting plate;

treat the central through hole that the top surface middle part bellying plug bush of machined part has at the middle part of the roof of upper cover body, treat the top surface middle part shaping of the top surface middle part bellying of machined part and have the spiro union post, a protection sleeve spiro union is on the spiro union post, the bottom plug bush of a protection sleeve covers the top surface and the lateral wall of spiro union post in the annular groove that the shaping has on the top surface middle part bellying of treated machined part.

And a sealing ring is fixed on the inner side wall of the central through hole, and the side wall of the middle protruding part of the top surface of the workpiece to be machined is pressed against the inner side wall of the sealing ring.

The bottom surface of the edge of the upper cover body is provided with an annular groove, the lower sealing ring is nested in the annular groove, and the bottom surface of the lower sealing ring is pressed against the top surface of the edge of the lifting plate.

The guide self-lubricating sleeve is fixed on the inner side wall of the through hole, the lifting screw sleeve is inserted into the guide self-lubricating sleeve, and the outer side wall of the lifting screw sleeve is tightly attached to the inner side wall of the guide self-lubricating sleeve.

And a plurality of magnetron sputtering targets are fixed on the bottom surface of the top plate of the main box body.

A plurality of guide rods are fixed on the bottom surface of the lifting plate, and the guide rods are inserted in vertical guide through holes formed in the bottom plate of the main box body.

An inner guide sleeve is fixed on the inner side wall of the vertical guide through hole, and the guide rod is inserted in the inner guide sleeve.

And a lower limiting plate is fixed at the bottom end of the guide rod.

The lateral wall of the front wall surface of the main box body is hinged with a box door through a hinged shaft.

And the sealing layer is inserted into the annular groove and pressed against the bottom surface of the annular groove.

The invention has the following outstanding effects: compared with the prior art, but it adopts repetitious usage's upper cover body and protective sleeve to carry out local covering, conveniently treats the local coating film of machined part, and it can reuse, and the high-usage simultaneously, its lifting plate can carry out the height and go up and down, can satisfy the not surperficial coating film of treating the machined part of co-altitude, and application range is wide.

Drawings

FIG. 1 is a schematic view of a partial structure of the present invention;

fig. 2 is a partially enlarged view of fig. 1.

Detailed Description

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