阅读说明：本技术 一种在低活化钢表面制备非晶态钨涂层的方法 (Method for preparing amorphous tungsten coating on surface of low-activation steel ) 是由 罗来马 吴左生 吴玉程 徐跃 刘东光 昝祥 于 2020-08-06 设计创作，主要内容包括：本发明公开了一种在低活化钢表面制备非晶态钨涂层的方法,通过磁控溅射法在低活化钢表面制备非晶态钨涂层,获得的非晶态钨涂层表面光滑致密,无裂纹,涂层与基体的结合良好,涂层厚度在1～2微米,结合力在12～16N范围。本发明制备工艺稳定可靠,涂层表面光滑,组织均匀且致密,结合强度好。本发明采用磁控溅射法制备的钨涂层能有效的提升低活化钢材料在反应堆环境下的使用寿命。(The invention discloses a method for preparing an amorphous tungsten coating on the surface of low-activation steel, which is characterized in that the amorphous tungsten coating is prepared on the surface of the low-activation steel by a magnetron sputtering method, the obtained amorphous tungsten coating has smooth and compact surface and no cracks, the coating is well combined with a substrate, the thickness of the coating is 1-2 microns, and the binding force is 12-16N. The preparation process is stable and reliable, the surface of the coating is smooth, the tissue is uniform and compact, and the bonding strength is good. The tungsten coating prepared by the magnetron sputtering method can effectively prolong the service life of the low-activation steel material in the reactor environment.)

1. A method for preparing an amorphous tungsten coating on the surface of low-activation steel is characterized by comprising the following steps:

step 1: pretreatment of substrates

Grinding and polishing the RAFM steel substrate to a mirror surface step by step through silicon carbide abrasive paper, and ultrasonically cleaning and drying to obtain an RAFM steel sample with a smooth and flat surface;

step 2: preparation of the coating

Installing the RAFM steel sample obtained in the step 1 and a tungsten target in a magnetron sputtering chamber, and vacuumizing to 2 x 10^-4Introducing argon and a small amount of oxygen, adjusting the flow ratio of the argon to the oxygen and the total working pressure through a flowmeter, then opening a direct current sputtering switch, setting sputtering power, starting a sputtering program after about ten minutes of pre-sputtering, and obtaining the amorphous tungsten coating on the surface of the RAFM steel after the sputtering is finished.

2. The method of claim 1, wherein:

in step 1, the RAFM steel matrix passes through 120 parts in sequence^#、320^#、600^#、800^#And grinding and polishing the silicon carbide abrasive paper step by step to a mirror surface.

3. The method of claim 1, wherein:

in step 2, the purity of the tungsten target is 99.95%.

4. The method of claim 1, wherein:

in the step 2, the direct current sputtering power is adjusted to 20W, the working pressure is 2-4 Pa, and the flow ratio of oxygen to argon is 1: 20.

5. The method of claim 1, wherein:

the thickness of the amorphous tungsten coating is 1-2 microns, and the binding force is 12-16N.

Technical Field

The invention relates to a method for preparing an amorphous tungsten coating on the surface of low-activation steel, which is to prepare the amorphous tungsten coating on the surface of the low-activation steel by a magnetron sputtering method.

Background

The thermal nuclear fusion energy control is an ideal energy source for the future of the human society due to abundant resources and environmental friendliness, and a Tokamak mode of restraining plasma by using a strong magnetic field and heating to an extremely high temperature is one of the most possible methods for realizing the thermal nuclear fusion control at present. However, the realization of nuclear fusion energy still faces double challenges in science and engineering, and one of the key problems is the first wall material facing high temperature Plasma, i.e. Plasma-facing materials (PFMs).

Low activation ferritic/martensitic (RAFM) steels are formed by replacing elements such as Mo, Ni, and Nb in conventional ferritic/martensitic steels with elements such as W, V, Ta. The RAFM steel has low radiation swelling and thermal expansion coefficient, high thermal conductivity and other excellent thermophysical and mechanical properties, so that the RAFM steel is recommended as a structural material and a first wall material of a fusion demonstration reactor. Because tungsten has the characteristics of high melting point (3410 ℃), low physical sputtering rate, low tritium retention, low swelling and the like, in order to reduce sputtering of the RAFM steel under high-energy particle bombardment and prolong the service life, a tungsten coating is coated on the surface of the RAFM steel.

The coating can be prepared by physical vapor deposition, chemical vapor deposition, vacuum plasma spraying, and the like. The preparation method is characterized in that the RAFM is hopefully protected better by preparing the amorphous tungsten coating, the amorphous tungsten coating is prepared by a magnetron sputtering method due to extremely easy crystallization of metal, argon ions are formed by ionizing argon to bombard a target material, tungsten atoms of the target material are separated from the surface of a sample, and the growth and nucleation of the tungsten atoms on the surface of the sample are stopped by a cooling system.

Disclosure of Invention

The invention aims to provide a method for preparing an amorphous tungsten coating on the surface of low-activation steel. The method is characterized in that the amorphous tungsten coating is prepared on the surface of the low-activation steel by a magnetron sputtering method, the obtained amorphous tungsten coating is smooth and compact in surface, free of cracks, good in combination with a base body, 1-2 microns in coating thickness and 12-16N in binding force.

The invention discloses a method for preparing an amorphous tungsten coating on the surface of low-activation steel, which comprises the following steps:

step 1: pretreatment of substrates

The RAFM steel matrix passes through 120 parts in sequence^#、320^#、600^#、800^#Grinding and polishing the silicon carbide abrasive paper step by step to a mirror surface, ultrasonically cleaning and drying to obtain an RAFM steel sample with a smooth and flat surface;

step 2: preparation of the coating

Installing the RAFM steel sample obtained in the step 1 and a tungsten target in a magnetron sputtering chamber, and vacuumizing to 2 x 10^-4Introducing argon and a small amount of oxygen, adjusting the flow ratio of the argon to the oxygen and the total working pressure through a flowmeter, then opening a direct current sputtering switch, setting sputtering power, starting a sputtering program after about ten minutes of pre-sputtering, and obtaining the amorphous tungsten coating on the surface of the RAFM steel after the sputtering is finished.

In step 2, the purity of the tungsten target is 99.95%, which is purchased from Beijing Tehm New Material science and technology Co.

In the step 2, the direct current sputtering power is adjusted to 20W, the working pressure is 2-4 Pa, and the flow ratio of oxygen to argon is 1: 20.

The amorphous tungsten coating obtained by the method has a smooth and compact surface, no cracks, good combination of the coating and a matrix, a coating thickness of 1-2 microns and a combination force of 12-16N.

The invention has the beneficial effects that:

1. the preparation process of the amorphous tungsten coating on the surface of the low-activation steel prepared by the invention is stable and reliable, the surface of the coating is smooth, the structure is uniform and compact, and the bonding strength is good.

2. The tungsten coating prepared by the magnetron sputtering method can effectively prolong the service life of the low-activation steel material in the reactor environment.

3. The tungsten coating prepared by the magnetron sputtering method has high purity, simple process and good repeatability.

Drawings

FIG. 1 is a surface topography of an amorphous tungsten coating on the surface of low activation steel. As can be seen from FIG. 1, the surface of the prepared amorphous tungsten coating is flat and compact, and has no phenomena such as cracks.

FIG. 2 is a cross-sectional profile of the amorphous tungsten coating on the surface of the low-activation steel. As can be seen from FIG. 2, the prepared amorphous tungsten coating is tightly combined with the substrate.

FIG. 3 is a line scan of the interface where the amorphous tungsten coating interfaces with the low activation steel. The line scanning direction is shown by arrows in fig. 2, and it can be seen from fig. 3 that interdiffusion between the tungsten element and the iron element occurs at the interface.

Figure 4 is an XRD pattern of the amorphous tungsten coating on the surface of the low activation steel. From the figure, the distinct amorphous steamed bread peaks and the three-strong peaks of the base low activation steel can be seen, but the absence of the tungsten peak can indicate that the amorphous tungsten coating is formed.

Fig. 5 shows the bonding force of the amorphous tungsten coating on the surface of the low activation steel, and it can be seen from fig. 5 that the bonding force of the amorphous tungsten coating is 16N.

Detailed Description