Device for assisting in replacing magnetron sputtering rotating target
阅读说明:本技术 一种辅助更换磁控溅射旋转靶材的装置 (Device for assisting in replacing magnetron sputtering rotating target ) 是由 易立 张朝晖 张军杰 魏玉飞 于 2019-12-04 设计创作,主要内容包括:本发明公开一种辅助更换磁控溅射旋转靶材的装置,包括龙门架、靶材放置小车和卷扬机,在换靶小车两边铺设有预埋轨道,龙门架的底部滑动放置在两侧的预埋轨道上,卷扬机安装在龙门架的顶梁上并可沿顶梁滑动,卷扬机传动端通过吊带连接有吊钩;靶材放置小车通过连接杆固定在龙门架的一侧并随龙门架一起移动,靶材放置小车用于放置旧靶材。本发明中辅助更换磁控溅射旋转靶材的装置,在更换旋转靶材的操作过程中,无行车因更换旋转靶材需在换靶小车工位长时间停滞现象,换靶效率大大提高,停机维护总时长缩短约50%,延长了生产线的有效生产时长,可为企业创造更多产值。(The invention discloses a device for assisting in replacing a magnetron sputtering rotating target, which comprises a portal frame, a target placing trolley and a winch, wherein pre-buried tracks are laid on two sides of the target replacing trolley, the bottom of the portal frame is placed on the pre-buried tracks on two sides in a sliding manner, the winch is arranged on a top beam of the portal frame and can slide along the top beam, and a transmission end of the winch is connected with a lifting hook through a hanging strip; the target material placing trolley is fixed on one side of the portal frame through the connecting rod and moves along with the portal frame, and the target material placing trolley is used for placing old target materials. According to the device for assisting in replacing the magnetron sputtering rotary target, in the operation process of replacing the rotary target, the phenomenon that a travelling crane needs to be stopped for a long time at a station of a target replacing trolley because the rotary target is replaced is avoided, the target replacing efficiency is greatly improved, the total shutdown maintenance time is shortened by about 50%, the effective production time of a production line is prolonged, and more production values can be created for enterprises.)
1. A device for assisting in replacing a magnetron sputtering rotating target is characterized in that: the target changing trolley comprises a portal frame, a target placing trolley and a winch, wherein pre-buried tracks are laid on two sides of the target changing trolley, the bottom of the portal frame is placed on the pre-buried tracks on the two sides in a sliding mode, the winch is installed on a top beam of the portal frame and can slide along the top beam, and a transmission end of the winch is connected with a lifting hook through a hanging strip; the target placing trolley is fixed on one side of the portal frame through a connecting rod and moves along with the portal frame, and the target placing trolley is used for placing old targets.
2. The apparatus for assisting in replacing a magnetron sputtering rotary target according to claim 1, wherein: the length of the pre-buried track exceeds the sum of the length of the target replacing trolley and the length of the support base of the portal frame.
3. The apparatus for assisting in replacing a magnetron sputtering rotary target according to claim 1, wherein: the portal frame is driven by a motor through a speed reducer, and the portal frame moves back and forth along the embedded track.
4. The apparatus for assisting in replacing a magnetron sputtering rotary target according to claim 1, wherein: the portal frame is a steel structure which is made of I-shaped steel and is connected with four rail wheels at the bottom.
5. The apparatus for assisting in replacing a magnetron sputtering rotary target according to claim 4, wherein: the output shaft of the speed reducer is in transmission connection with the wheel shaft of the track wheel, and the other end of the wheel shaft of the track wheel is fixed with the bottom foot of the portal frame through a bearing seat.
6. The apparatus for assisting in replacing a magnetron sputtering rotary target according to claim 1, wherein: the top surface of the target placing trolley is provided with a foam pad with a circular groove.
7. The apparatus for assisting in replacing a magnetron sputtering rotary target according to claim 1, wherein: four universal wheels are installed at the bottom of the target placing trolley.
Technical Field
The invention relates to the technical field of target replacement, in particular to a device for assisting in replacing a magnetron sputtering rotary target.
Background
At present, 125 off-line coated glass production lines in China exist, and coating machines of the coating production lines are required to stop the equipment to maintain and replace targets after each production period. According to different production states, the target material replacing frequency of the coating machine is about 20-40 days/time, and the target material replacing operation is high-frequency repeated work in a life cycle that the coating line is dozens of years. Under the conditions of the existing factory building structure and the layout of the coating line, the operation of replacing the target material is as follows: after the film plating machine has the condition of shutdown maintenance, a cathode cover plate of the film plating machine is hung on the target changing trolley by a travelling crane and fixed, and the target changing trolley is turned over to enable the target to face upwards. The rotary target is heavy, and the target must be pulled by a travelling crane, and after an operator separates the target from the cathode end, the travelling crane lifts the separated old target to a designated area. And the working personnel extracts the magnetic bar in the old target material and replaces the new target material, then the new target material is hung on the cathode by the travelling crane, and then the working personnel fix the target material and the end head of the cathode to complete the target replacement work. In the whole process that the old target material is separated from the cathode end and the new target material is fixed with the cathode end, the whole course of the travelling crane is required to be assisted, the cart of the travelling crane is always fixed right above the target changing trolley, other travelling cranes can not pass through the area when carrying out other transfer work, and other work can only be carried out after the target changing work is finished, so that the working efficiency is extremely low, the shutdown maintenance time of equipment is prolonged, and the production cost is increased indirectly.
Disclosure of Invention
The invention aims to provide a device for assisting in replacing a magnetron sputtering rotary target, which is used for solving the problems in the prior art, improving the target replacement efficiency, shortening the total time of shutdown maintenance and prolonging the effective production time of a production line.
In order to achieve the purpose, the invention provides the following scheme: the invention provides a device for assisting in replacing a magnetron sputtering rotating target, which comprises a portal frame, a target placing trolley and a winch, wherein pre-buried tracks are laid on two sides of the target replacing trolley, the bottom of the portal frame is placed on the pre-buried tracks on two sides in a sliding manner, the winch is installed on a top beam of the portal frame and can slide along the top beam, and a transmission end of the winch is connected with a lifting hook through a hanging strip; the target placing trolley is fixed on one side of the portal frame through a connecting rod and moves along with the portal frame, and the target placing trolley is used for placing old targets.
Preferably, the length of the embedded track exceeds the sum of the length of the target changing trolley and the length of a bracket base of the portal frame.
Preferably, the portal frame is driven by a motor through a speed reducer, and the portal frame moves back and forth along the embedded track.
Preferably, the portal frame is a steel structure with four rail wheels connected at the bottom made of I-steel.
Preferably, an output shaft of the speed reducer is in transmission connection with a wheel shaft of the rail wheel, and the other end of the wheel shaft of the rail wheel is fixed with a bottom foot of the portal frame through a bearing seat.
Preferably, the top surface of the target placing trolley is provided with a foam pad with a circular groove.
Preferably, four universal wheels are mounted at the bottom of the target placing trolley.
Compared with the prior art, the invention has the following technical effects:
according to the device for assisting in replacing the magnetron sputtering rotary target, in the operation process of replacing the rotary target, the phenomenon that a travelling crane needs to be stopped for a long time at a station of a target replacing trolley because the rotary target is replaced is avoided, the target replacing efficiency is greatly improved, the total shutdown maintenance time is shortened by about 50%, the effective production time of a production line is prolonged, and more production values can be created for enterprises.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a front view of the working state of the device for assisting in replacing the magnetron sputtering rotary target;
FIG. 2 is a side view of the working state of the apparatus for assisting in the replacement of a magnetron sputtering rotating target;
FIG. 3 is a front view of an apparatus for assisting in replacing a magnetron sputtering rotating target;
FIG. 4 is a side view of an apparatus for assisting in the replacement of a magnetron sputtering rotating target;
wherein, 1 top beam; 2, a winch; 3, lifting a hook; 4, a portal frame; 5, old target material; 6, a foam cushion; 7, placing a trolley for the target material; 8 connecting rods; 9 universal wheels; 10, a motor; 11, a bearing seat; 12 a rail wheel; 13, a speed reducer; 14, pre-burying a track; 15 a cathode terminal; 16 a cathode cover plate; and 17, changing the target trolley.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a device for assisting in replacing a magnetron sputtering rotary target, which is used for solving the problems in the prior art, improving the target replacement efficiency, shortening the total time of shutdown maintenance and prolonging the effective production time of a production line.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
As shown in fig. 1-4, the invention provides a device for assisting in replacing a magnetron sputtering rotating target, which comprises a portal frame 4, a target placing trolley 7 and a
The pre-buried tracks 14 are laid on two sides of the
The operation of replacing the target material by the device comprises the following steps: after the cathode cover plate 16 is reversed on the
The device has the advantages that in the operation process of replacing the rotary target, after the travelling crane lifts the cathode cover plate 16 onto the
The principle and the implementation mode of the invention are explained by applying a specific example, and the description of the embodiment is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
- 上一篇:一种医用注射器针头装配设备
- 下一篇:一种卷绕式纤维镀膜磁控溅射装置