阅读说明：本技术 一种卷绕式纤维镀膜磁控溅射装置 (Winding type fiber coating magnetron sputtering device ) 是由 马毅 谢续友 黄先伟 俞越翎 张泰华 于 2019-12-05 设计创作，主要内容包括：本发明公开了一种卷绕式纤维镀膜磁控溅射装置,包括纤维丝线、真空腔体、升降台及靶材支座,所述真空腔体内部在位于靶材支座一侧的位置设有卷绕式纤维镀膜装置,所述卷绕式纤维镀膜装置包括卷绕装置及丝架装置,所述卷绕装置对纤维丝线进行放卷,并通过丝架装置进行张开后再通过卷绕装置对纤维丝线进行收卷。本发明的有益效果是：该装置设计结构简单合理,使用方便,应用本装置为纤维进行磁控溅射镀膜,纤维丝线在滑轮之间绕动,使纤维丝线上圆柱表面与下圆柱表面都能镀到膜,保证了纤维镀膜的全面性与均匀性,对纤维镀膜的制造领域具有重要的意义。(The invention discloses a winding type fiber coating magnetron sputtering device which comprises a fiber silk thread, a vacuum cavity, a lifting platform and a target support, wherein a winding type fiber coating device is arranged in the vacuum cavity and positioned on one side of the target support, the winding type fiber coating device comprises a winding device and a wire frame device, the winding device unwinds the fiber silk thread, and the fiber silk thread is wound by the winding device after being unfolded by the wire frame device. The invention has the beneficial effects that: the device design simple structure is reasonable, and convenient to use uses this device to carry out magnetron sputtering coating film for the fibre, and the fibre silk thread moves around between the pulley, makes the cylindrical surface on the fibre silk thread and can both plate the membrane with lower cylindrical surface, has guaranteed the comprehensiveness and the homogeneity of fibre coating film, has important meaning to the manufacturing field of fibre coating film.)

1. The utility model provides a coiling formula fibre coating magnetron sputtering device, includes fibre silk thread (11), vacuum chamber (14), elevating platform (2) and target support (12), its characterized in that, vacuum chamber (14) inside is equipped with coiling formula fibre coating device in the position that is located target support (12) one side, coiling formula fibre coating device includes take-up device and silk frame device, take-up device unreels fibre silk thread (11) to open back rethread take-up device and carry out the rolling through the silk frame device to fibre silk thread (11).

2. A coiled fiber coating magnetron sputtering device according to claim 1, wherein the coiled device comprises a motor (10), a support base (6), a pinion (9), a gearwheel (8), a transmission shaft (7), a winding drum (4) and the support base (6), the pinion (9) is arranged on the motor, the pinion (9) is meshed with the gearwheel (8), the transmission shaft (7) is arranged on the support base (6) in a penetrating manner, and one end of the transmission shaft is connected with the gearwheel (8) while the other end is connected with the winding drum (4).

3. A coiled fiber coating magnetron sputtering device according to claim 1, wherein the wire rack device comprises a support frame (17), a slide rod (19) and a pulley block, the pulley block comprises a first pulley (16), a second pulley (18) and a third pulley (20), the first pulley (16) and the second pulley (18) are respectively arranged on the support frame (17), and the third pulley (20) is arranged on the slide rod (19).

4. A magnetron sputtering apparatus for coating coiled fiber according to claim 2, characterized in that the winding drum (4) is composed of an upper and a lower wire slots, wherein the bottom of the lower wire slot is provided with an extended end with a rectangular cross section and is directly inserted into the transmission shaft (7) through the extended end, thereby realizing connection and transmission.

5. A coiled fiber coating magnetron sputtering device according to claim 3, wherein the sliding rod (19) can slide horizontally on the supporting frame (17), the supporting frame (17) is provided with a pre-tightening screw (15), and the pre-tightening screw (15) can adjust the horizontal position of the sliding rod (19) to achieve pre-tightening.

6. A coiled fiber coating magnetron sputtering device as claimed in claim 1, wherein the first pulley (16) and the third pulley (19) are disposed on the same plane, and the second pulley (18) is not disposed on the same plane as the first pulley (16) and the third pulley (19).

Technical Field

The invention relates to the technical field of vacuum magnetron sputtering coating, in particular to a winding type fiber coating magnetron sputtering device.

Background

The fiber coating has great value in practical application, the metal-plated fiber is a composite fiber taking metal as a sheath and non-metal fiber as a core, and the metal-plated fiber can be divided into the following parts according to the metal of the coating: the composite fiber has the advantages of keeping the flexibility and mechanical property of the original core fiber, along with the reflection performance and conductivity to electromagnetic waves and infrared rays, prolonging the service life and the like according to different coatings. For example, the metal-plated glass fiber has good electromagnetic wave reflection performance, so the metal-plated glass fiber is used as an interference wire for resisting radar in military, and the silver-plated glass fiber can be welded and can be used as a lead; the aluminized glass fiber can reflect a large amount of heat energy and can be used as high-temperature protective clothing and the like.

In the prior art, the fiber is coated with a film by an electrochemical method, but when the fiber is coated with aluminum by the method, pollution is easily caused, and the aluminum film is not very dense. The magnetron sputtering related to the device is one of physical vapor deposition, has the advantage of strong film adhesion and has no pollution to the environment. However, because the fiber is fine, it is difficult to ensure that the surface of the fiber can be completely and uniformly coated in the magnetron sputtering coating process, and therefore, how to ensure the completeness and uniformity of the coating becomes a technical problem to be solved in the present invention.

Disclosure of Invention

In view of the above problems in the prior art, an object of the present invention is to provide a magnetron sputtering apparatus for winding fiber coating, which can improve the overall and uniformity of the coating.

The technical scheme of the invention is as follows:

the utility model provides a coiling formula fibre coating film magnetron sputtering device, includes fibre silk thread, vacuum chamber, elevating platform and target support, its characterized in that, the inside position that is located target support one side of vacuum chamber is equipped with coiling formula fibre coating film device, coiling formula fibre coating film device includes coiling mechanism and wire frame device, coiling mechanism unreels the fibre silk thread to open the back through the wire frame device and carry out the rolling to the fibre silk thread through the coiling mechanism.

The utility model provides a coiling formula fibre coating film magnetron sputtering device, a serial communication port, coiling mechanism includes motor, supporting seat, pinion, gear wheel, transmission shaft, reel and supporting seat, the pinion sets up on the motor, and pinion and gear wheel meshing setting, the transmission shaft is worn to establish on the supporting seat, and its one end links to each other with the gear wheel, and the other end links to each other with the reel.

The winding type fiber coating magnetron sputtering device is characterized in that the wire frame device comprises a support frame, a sliding rod and a pulley block, the pulley block comprises a first pulley, a second pulley and a third pulley, the first pulley and the second pulley are respectively arranged on the support frame, and the third pulley is arranged on the sliding rod.

The winding type fiber coating magnetron sputtering device is characterized in that the winding drum is composed of an upper wire groove and a lower wire groove, wherein the bottom of the lower wire groove is provided with an extension end with a rectangular section, and the extension end is directly inserted into the transmission shaft, so that connection and transmission are realized.

The winding type fiber coating magnetron sputtering device is characterized in that the sliding rod can horizontally slide on the support frame, the support frame is provided with a pre-tightening screw, and the horizontal position of the sliding rod can be adjusted through the pre-tightening screw, so that the pre-tightening effect is achieved.

The winding type fiber coating magnetron sputtering device is characterized in that the first pulley and the third pulley are arranged on the same plane, and the second pulley, the first pulley and the third pulley are not on the same plane.

The invention has the beneficial effects that: the device design simple structure is reasonable, and convenient to use uses this device to carry out magnetron sputtering coating film for the fibre, and the fibre silk thread moves around between the pulley, makes the cylindrical surface on the fibre silk thread and can both plate the membrane with lower cylindrical surface, has guaranteed the comprehensiveness and the homogeneity of fibre coating film, has important meaning to the manufacturing field of fibre coating film.

Drawings

FIG. 1 is a schematic view of the installation of the present invention;

FIG. 2 is a partial block diagram of the present invention;

FIG. 3 is a view of the construction of the wire frame of the present invention;

in the figure: the method comprises the following steps of 1-sealing cover, 2-lifting table, 3-wire frame, 4-winding drum, 5-supporting bearing, 6-supporting seat, 7-transmission shaft, 8-big gear, 9-small gear, 10-motor, 11-fiber silk yarn, 12-target support, 13-target, 14-cavity, 15-pre-tightening screw, 16-pulley I, 17-supporting frame, 18-pulley II, 19-sliding rod and 20-pulley III.

Detailed Description

The technical scheme of the invention is further described by combining the drawings in the specification:

as shown in fig. 1-3, a winding type fiber coating magnetron sputtering device includes a vacuum chamber 14, a lifting table 2 disposed on a sealing cover 1, and a target support 12 disposed at the bottom of the chamber 14, wherein a target 13 is placed on the target support 12, the target 13 is connected to a cathode, the lifting table 2 is connected to an anode, and after power is turned on, a part of target atoms sputtered from the target 13 impinge on a fiber yarn 11, and finally deposit on the surface of the fiber yarn 11.

The winding type fiber coating device comprises a winding device and a wire frame device, wherein a transmission system is formed by a motor 10, a pinion 9, a gearwheel 8, a transmission shaft 7 and a winding drum 4 in the winding device, the motor 10 drives the pinion 9 to rotate, the pinion 9 drives the gearwheel 8 to rotate, and the gearwheel 8 drives the transmission shaft 7 to rotate through key connection; the section of the extending end of the winding drum 4 is rectangular, and the transmission shaft 7 is directly inserted into the rectangular groove of the transmission shaft 7 to drive the winding drum 4 to rotate. The support bearing 5 is placed in a counter bore of the support seat 6, and the whole winding device is supported by force, and the support seat 6 is fixed on the surface of the cavity 14 by screws. The thread frame device comprises a supporting frame 17, a sliding rod 19, a pre-tightening screw 15 and a pulley block, wherein the pulley block comprises a pulley I16, a pulley II 18 and a pulley III 20, the thread frame is connected with the supporting seat 6 through direct insertion, the pulleys are welded on the supporting frame 17 and the sliding rod 19, the surface roughness of the pulleys is high, and the abrasion between the fiber silk thread 11 and the pulleys is as small as possible; meanwhile, the second pulley 18, the first pulley 16 and the third pulley 20 are not on the same plane, when the fiber yarn 11 slides on the pulley block, the upper section fiber yarn 11 and the lower section fiber yarn 11 are staggered, and the upper cylindrical surface and the lower cylindrical surface of the fiber yarn 11 can be coated with films.

The working process is as follows:

firstly, the fiber silk thread 11 is wound in an upper thread groove of the winding drum 4, the winding drum 4 is inserted into the transmission shaft 7, then, the fiber silk thread 11 is wound around the first pulley 16, the third pulley 20 and the second pulley 18 in sequence, and finally, the end of the fiber silk thread 11 is fixed on a lower thread groove of the winding drum 4. The pretension screw 15 is adjusted to slide the slide rod 19 to the right, so that the fibre thread 11 is in a slightly tensioned state. After the sealing cover 1 is closed, the equipment is started, when the equipment normally works, the vacuum pump starts to pump out gas, and after a certain vacuum degree is reached, the lifting platform 2 is controlled to descend to reach the specified height. Applying an electric field, enabling a part of target atoms sputtered from the target material 13 to impact on the fiber yarn 11 and deposit, starting the motor 10, enabling the motor 10 to rotate anticlockwise to drive the winding drum 4 to rotate, sending the fiber yarn 11 out from the upper wire groove, winding the fiber yarn 11 in the lower wire groove, and starting coating on the surface of the fiber yarn 11.