Mask plate, preparation method of mask plate and evaporation device
阅读说明:本技术 掩膜板、掩膜板的制备方法及蒸镀装置 (Mask plate, preparation method of mask plate and evaporation device ) 是由 宋平 肖志慧 单为健 孙增标 王亚玲 李骄阳 于 2020-07-30 设计创作,主要内容包括:本发明提供一种掩膜板、掩膜板的制备方法及蒸镀装置,涉及显示技术领域,旨在解决现有掩膜板无法制备高分辨率的显示面板的问题。该掩膜板包括层叠设置的第一掩膜层和第二掩膜层,第一掩膜层上设置有多个第一开口,第二掩膜层包括相互独立的多个掩膜部,掩膜部由有机材料制成,多个掩膜部与多个第一开口一一对应设置,每个所述掩膜部上均设置有呈阵列排布的多个第二开口。每个第一开口在对应的掩膜部上的投影覆盖该掩膜部的所有第二开口。本发明能够降低掩膜板的制备难度,并且满足高分辨率的显示面板的制备需求,优化显示面板的显示效果。(The invention provides a mask plate, a preparation method of the mask plate and an evaporation device, relates to the technical field of display, and aims to solve the problem that the existing mask plate cannot be used for preparing a high-resolution display panel. The mask plate comprises a first mask layer and a second mask layer which are stacked, wherein a plurality of first openings are formed in the first mask layer, the second mask layer comprises a plurality of mutually independent mask portions, the mask portions are made of organic materials, the plurality of mask portions and the plurality of first openings are arranged in a one-to-one correspondence mode, and each mask portion is provided with a plurality of second openings which are arranged in an array mode. The projection of each first opening on the corresponding mask portion covers all the second openings of the mask portion. The invention can reduce the preparation difficulty of the mask plate, meet the preparation requirement of the display panel with high resolution and optimize the display effect of the display panel.)
1. A mask plate is characterized by comprising a first mask layer and a second mask layer which are arranged in a stacked mode, wherein a plurality of first openings are formed in the first mask layer, the second mask layer comprises a plurality of mutually independent mask portions, the mask portions are made of organic materials, the mask portions and the first openings are arranged in a one-to-one correspondence mode, and a plurality of second openings which are arranged in an array mode are formed in each mask portion;
the projection of each first opening on the corresponding mask portion covers all the second openings of the mask portion.
2. A mask according to claim 1, wherein the first mask layer comprises a plurality of magnetic portions, the plurality of magnetic portions being arranged at intervals along an extending direction of the first mask layer; or, the first mask layer is made of a magnetic material.
3. A mask according to claim 1, wherein the thickness of the second mask layer is less than or equal to 20 microns.
4. A mask according to claim 1, wherein the mask portions of the second mask layer are made of a material comprising a composite of any one or more of polyimide, polystyrene, or polypropylene.
5. A preparation method of a mask plate is characterized by comprising the following steps:
forming a second mask layer having a plurality of mask portions independent of each other on a light-transmitting substrate;
aligning and attaching the second mask layer and the first mask layer;
and removing the substrate on the second mask layer.
6. A method of manufacturing a mask according to claim 5, wherein the step of forming a second mask layer having a plurality of mask portions independent of each other on a light-transmitting substrate includes:
forming a plurality of organic material layers independent of each other on the substrate which transmits light;
and patterning all the organic material layers to form a plurality of second openings which are arranged in an array manner on each organic material layer, wherein the mask part is formed on the organic material layer with the plurality of second openings, and the second mask layer is formed by the plurality of mask parts.
7. The method for preparing a mask according to claim 6, wherein the step of attaching the second mask layer to the first mask layer in an aligned manner comprises:
placing the first mask layer and the second mask layer in an alignment manner, wherein the plurality of first openings of the first mask layer are opposite to the plurality of mask parts of the second mask layer in a one-to-one correspondence manner;
and adjusting the viscosity of the organic material of each mask part of the second mask layer to enable all the mask parts of the second mask layer to be bonded with the first mask layer, so as to form the first mask layer and the second mask layer which are aligned and attached.
8. A mask making method according to claim 5, wherein the step of removing the substrate on the second mask layer comprises:
irradiating the joints of all the mask parts of the second mask layer and the substrate by adopting laser;
laser carbonizing at least part of the organic material of the second mask layer at the joint of all the mask parts of the second mask layer and the substrate;
and stripping the substrate on the second mask layer.
9. A method of making a mask according to claim 5, wherein after the step of removing the substrate on the second mask layer, further comprising:
and adjusting the position of the second mask layer to enable at least part of the organic material of the mask part of the second mask layer to be filled into the notch of the first mask layer.
10. An evaporation device, which is characterized by comprising an evaporation chamber, an evaporation source and the mask plate of any one of claims 1 to 4;
the evaporation source, the mask plate and treat that the deposit plate all is located in the coating by vaporization cavity, the mask plate is located the evaporation source with treat between the deposit plate, just the first mask layer of mask plate is located the second mask layer and is close to one side of evaporation source.
Technical Field
The invention relates to the technical field of display, in particular to a mask plate, a preparation method of the mask plate and an evaporation device.
Background
With the rapid development of electronic display technology, Organic Light-emitting diodes (OLEDs) are widely used in display devices such as terminal devices and wearable devices, because they have excellent properties such as low power consumption, high color saturation, wide viewing angle, thin thickness, flexibility, and no need of backlight.
At present, an OLED display device uses independent RGB light emitting layers to realize color display, the RGB light emitting layers are prepared by an evaporation method, and FMM (Fine metal mask) is used in the evaporation process, and the FMM mask has a plurality of opening structures corresponding to positions where the RGB light emitting layers need to be deposited. The FMM mask is generally made of Invar alloy (Invar alloy, nickel-iron alloy), has a complete plate surface structure, covers the whole area to be evaporated, and is prepared by a double-sided chemical etching mode in an opening structure. In order to adapt to the increasing PPI (pixel density) of the OLED display device, the distribution density of the opening structures in the FMM mask needs to be increased correspondingly. Therefore, the thickness of the FMM mask plate is reduced, the residence time of the chemical etching liquid in the preparation process of the opening structure is increased, and the distribution density of the opening structure in the FMM mask plate can meet the requirement of high PPI of an OLED display device.
However, the reduction of the thickness of the FMM mask and the increase of the retention time of the chemical etching solution both reduce the structural strength thereof, increase the manufacturing difficulty, and simultaneously reduce the position and dimensional accuracy of the opening structure, which cannot meet the manufacturing requirement of the OLED display device with high PPI.
Disclosure of Invention
In order to solve at least one problem mentioned in the background art, the invention provides a mask plate, a preparation method of the mask plate and an evaporation device, which can reduce the preparation difficulty of the mask plate, meet the preparation requirement of a display panel with high resolution and optimize the display effect of the display panel.
In order to achieve the above object, in a first aspect, the present invention provides a mask plate, including a first mask layer and a second mask layer, which are stacked, wherein the first mask layer is provided with a plurality of first openings, the second mask layer includes a plurality of mutually independent mask portions, the mask portions are made of an organic material, the plurality of mask portions and the plurality of first openings are arranged in a one-to-one correspondence, and each mask portion is provided with a plurality of second openings arranged in an array.
The projection of each first opening on the corresponding mask portion covers all the second openings of the mask portion.
According to the mask plate provided by the invention, the first mask layer and the second mask layer are stacked, the first opening of the first mask layer is arranged opposite to the mask part of the second mask layer, and the first mask layer is used for supporting the second mask layer, so that the second mask layer is prevented from sagging or deforming in the using process. By arranging the plurality of mask portions in the second mask layer, the positions of the mask portions and the number of the mask portions can be adjusted as required, so that the flexibility of the structure of the mask plate is improved, and the alignment accuracy of the first mask layer and the second mask layer is improved by adjusting the positions of the mask portions. Through setting up the second opening in the mask portion into a plurality ofly to be the array and arrange, thereby pixel open-ended density on the increase mask plate covers all second openings of this mask portion through the projection with first opening on the mask portion that corresponds, avoids first opening to shelter from treating that the deposition material passes through the second opening, guarantees that this mask plate can prepare high-resolution display panel, reduces the preparation degree of difficulty of mask plate simultaneously.
In the mask plate, optionally, the first mask layer includes a plurality of magnetic portions, and the plurality of magnetic portions are arranged at intervals along an extending direction of the first mask layer; alternatively, the first mask layer is made of a magnetic material.
The second mask layer can be tightly attached to the plate to be deposited by the first mask layer, and evaporation shadow is avoided.
In the mask plate, the thickness of the second mask layer is optionally less than or equal to 20 micrometers.
In the mask plate, the mask portions of the second mask layer may be made of a material including a composite of any one or more of polyimide, polystyrene, and polypropylene.
In a second aspect, the present invention provides a method for manufacturing a mask, including:
forming a second mask layer having a plurality of mask portions independent of each other on a light-transmitting substrate;
aligning and attaching the second mask layer and the first mask layer;
and removing the substrate on the second mask layer.
According to the preparation method of the mask plate, the second mask layer is formed on the light-transmitting substrate and supported by the substrate, the second mask layer comprises a plurality of mutually independent mask portions, the positions of the mask portions and the number of the mask portions can be adjusted according to needs, so that the flexibility of the structure of the mask plate is improved, and the alignment accuracy of the first mask layer and the second mask layer is improved by adjusting the positions of the mask portions. Each mask portion is provided with a plurality of second openings arranged in an array, and the arrangement is favorable for preparing a high-resolution display panel by using the mask plate. Through counterpoint laminating second mask layer and first mask layer, utilize first mask layer to support the second mask layer, avoid the second mask layer flagging or deformation in the use, guarantee simultaneously that the second opening on every mask portion of second mask layer all is located the inboard of the first opening of the first mask layer that corresponds with this mask portion, avoid first opening to influence waiting to deposit the material to pass through in the second opening. By removing the substrate on the second mask layer, the influence of the substrate on the use of the mask plate in the deposition process is avoided. The preparation method of the mask plate can effectively reduce the preparation difficulty of the mask plate and improve the preparation efficiency of the mask plate.
In the above method for manufacturing a mask plate, optionally, the step of forming a second mask layer having a plurality of mask portions independent of each other on a light-transmitting substrate includes:
forming a plurality of organic material layers independent of each other on a light-transmitting substrate;
and patterning all the organic material layers to form a plurality of second openings which are arranged in an array on each organic material layer, wherein the organic material layers with the plurality of second openings form mask parts, and the plurality of mask parts jointly form a second mask layer.
By forming the organic material layer on the light-transmitting substrate and forming the second mask layer by using the organic material layer, the difficulty of patterning is reduced, the opening positions of the second openings on the second mask layer and the accuracy of the number of the openings are improved, and the manufacturing of the high-resolution display panel is facilitated.
In the above method for preparing a mask plate, optionally, the step of attaching the second mask layer to the first mask layer in an aligned manner includes:
the first mask layer and the second mask layer are placed in an opposite position, and the first openings of the first mask layer are opposite to the mask parts of the second mask layer in a one-to-one correspondence mode;
and adjusting the viscosity of the organic material of each mask part of the second mask layer, and bonding all the mask parts of the second mask layer and the first mask layer to form the first mask layer and the second mask layer which are aligned and attached.
The first mask layer and the second mask layer are placed in an aligned mode, and the difficulty of aligning and attaching the first mask layer and the second mask layer is reduced by adjusting the viscosity of the organic material of the second mask layer.
In the above method for preparing a mask plate, optionally, the step of removing the substrate on the second mask layer includes:
irradiating the joints of all the mask parts of the second mask layer and the substrate by adopting laser;
laser carbonizing organic materials of at least part of the second mask layer at the joint of all the mask parts of the second mask layer and the substrate, and separating the second mask layer from the substrate;
and stripping the substrate on the second mask layer.
The substrate on the second mask layer is stripped through laser, the stripping difficulty of the substrate and the second mask layer can be reduced, and meanwhile the substrate can be prevented from influencing the use of the mask plate.
In the above method for preparing a mask plate, optionally, after the step of removing the substrate on the second mask layer, the method further includes:
and adjusting the position of the second mask layer to enable at least part of the organic material of the mask part of the second mask layer to be filled into the gap of the first mask layer.
The organic material of the second mask layer fills the gap of the first mask layer, so that the rejection rate of the mask plate can be reduced, and the cost of the mask plate preparation process is reduced.
In a third aspect, the present invention provides an evaporation apparatus, including an evaporation chamber, an evaporation source, and the mask plate.
The evaporation source, the mask plate and the plate to be deposited are all located in the evaporation chamber, the mask plate is located between the evaporation source and the plate to be deposited, and the first mask layer of the mask plate is located on one side, close to the evaporation source, of the second mask layer.
According to the evaporation device provided by the invention, the evaporation source, the plate to be deposited and the mask plate are arranged in the evaporation chamber, and the evaporation chamber is used for providing a vacuum environment for evaporation, so that the stability of the evaporation process is ensured. By arranging the mask plate between the evaporation source and the plate to be deposited and limiting the first mask layer to be positioned on one side of the second mask layer close to the evaporation source, the material to be deposited generated by the evaporation source can be conveniently deposited on the plate to be deposited by sequentially passing through the first opening and the second opening of the mask plate. The structure flexibility of the mask plate can be improved by utilizing the plurality of mask parts, and the alignment precision of the first mask layer and the second mask layer is improved by adjusting the positions of the mask parts. The first mask layer is used for supporting the second mask layer, and the second mask layer is prevented from sagging or deforming in the using process. The second openings arranged in a plurality of arrays can increase the distribution density of the deposition material on the plate to be deposited after deposition, thereby increasing the resolution of the display panel manufactured by the evaporation device and optimizing the display effect of the display panel.
The construction of the present invention and other objects and advantages thereof will be more apparent from the following description of the preferred embodiments taken in conjunction with the accompanying drawings.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a mask provided in an embodiment of the present invention;
fig. 2 is a bottom view of a mask provided in an embodiment of the present invention;
fig. 3 is a schematic structural view of a second mask layer of the mask plate provided in the embodiment of the present invention, the second mask layer being located on a substrate;
fig. 4 is a schematic structural diagram of a mask plate according to an embodiment of the present invention after a second mask layer is patterned;
fig. 5 is a schematic structural diagram of the first mask layer and the second mask layer after the alignment bonding according to the embodiment of the present invention;
fig. 6 is a schematic flow chart of a mask manufacturing method according to an embodiment of the present invention;
fig. 7 is a schematic flow chart illustrating a process of forming a second mask layer on a transparent substrate in the mask manufacturing method according to the embodiment of the present invention;
fig. 8 is a schematic flow chart illustrating alignment and attachment of a second mask layer and a first mask layer in the mask plate manufacturing method according to the embodiment of the present invention;
fig. 9 is a schematic flow chart illustrating a process of removing the substrate on the second mask layer in the mask plate manufacturing method according to the embodiment of the present invention;
fig. 10 is a schematic structural diagram of an evaporation apparatus according to an embodiment of the present invention.
Description of reference numerals:
100-a mask plate;
10-a first mask layer;
11-a first opening;
20-a second mask layer;
21-a second opening;
22-a mask portion;
30-evaporation chamber;
40-an evaporation source;
50-a plate to be deposited;
60-substrate.
Detailed Description
The current OLED display device prepares independent RGB light emitting layers by an evaporation method, and an FMM (Fine metal mask) is used in the evaporation process, and the FMM mask has a plurality of opening structures corresponding to positions where the RGB light emitting layers need to be deposited. The FMM mask is generally made of Invar alloy (Invar alloy, nickel-iron alloy), and the opening structure of the FMM mask is prepared by a double-sided chemical etching method. And the mask plate is of a complete plate surface structure and covers the whole area to be evaporated. In order to adapt to the increasing PPI (pixel density) of the OLED display device, the distribution density of the opening structures in the FMM mask needs to be increased correspondingly. In order to improve the distribution density of the opening structure, the current common way is to reduce the thickness of the FMM mask plate and increase the residence time of the chemical etching liquid in the process of preparing the opening structure. The chemical etching mode belongs to an isotropic etching mode, etching can be carried out in all directions of distribution of etching liquid, and the etching rate is equal in all directions of etching. When the thickness of the FMM mask plate is reduced and the residence time of the chemical etching liquid is increased, the forming difficulty of the opening structure can be reduced, and therefore a plurality of opening structures can be formed conveniently. However, the reduction of the thickness of the FMM mask and the increase of the residence time of the chemical etching solution both reduce the structural strength and increase the manufacturing difficulty. And the isotropic chemical etching mode cannot ensure the edge position of the opening structure, thereby reducing the position and size precision of the opening structure and failing to completely meet the preparation requirement of the OLED display device with high PPI.
In view of this, in the mask plate, the preparation method of the mask plate and the evaporation device provided by the embodiments of the present invention, the first mask layer and the second mask layer are stacked, the first opening of the first mask layer and the mask portion of the second mask layer are arranged opposite to each other, and the first mask layer is used to support the second mask layer, so that the second mask layer is prevented from sagging or deforming during use. By arranging the plurality of mask portions in the second mask layer, the positions of the mask portions and the number of the mask portions can be adjusted as required, so that the flexibility of the structure of the mask plate is improved, and the alignment accuracy of the first mask layer and the second mask layer is improved by adjusting the positions of the mask portions. Through setting up the second opening in the mask portion into a plurality ofly to be the array and arrange, thereby pixel open-ended density on the increase mask plate covers all second openings of this mask portion through the projection with first opening on the mask portion that corresponds, avoids first opening to shelter from treating that the deposition material passes through the second opening, guarantees that this mask plate can prepare high-resolution display panel, reduces the preparation degree of difficulty of mask plate simultaneously.
In the preparation method of the mask plate, the second mask layer is formed on the light-transmitting substrate and supported by the substrate, the second mask layer comprises a plurality of mutually independent mask portions, and the positions of the mask portions and the number of the mask portions can be adjusted as required, so that the flexibility of the structure of the mask plate is improved, and the alignment precision of the first mask layer and the second mask layer is improved by adjusting the positions of the mask portions. Each mask portion is provided with a plurality of second openings arranged in an array, and the arrangement is favorable for preparing a high-resolution display panel by using the mask plate. Through counterpoint laminating second mask layer and first mask layer, utilize first mask layer to support the second mask layer, avoid the second mask layer flagging or deformation in the use, guarantee simultaneously that the second opening on every mask portion of second mask layer all is located the inboard of the first opening of the first mask layer that corresponds with this mask portion, avoid first opening to influence waiting to deposit the material to pass through in the second opening. By removing the substrate on the second mask layer, the influence of the substrate on the use of the mask plate in the deposition process is avoided. The preparation method of the mask plate can effectively reduce the preparation difficulty of the mask plate, improve the preparation efficiency of the mask plate and facilitate the formation of the mask plate for preparing a high-resolution display panel.
In this coating by vaporization device, through with the evaporation source, treat that deposition plate and mask plate set up in the coating by vaporization cavity, utilize the coating by vaporization cavity to provide the vacuum environment of coating by vaporization, guarantee the stability of coating by vaporization process. By arranging the mask plate between the evaporation source and the plate to be deposited and limiting the first mask layer to be positioned on one side of the second mask layer close to the evaporation source, the material to be deposited generated by the evaporation source can be conveniently deposited on the plate to be deposited by sequentially passing through the first opening and the second opening of the mask plate. The structure flexibility of the mask plate can be improved by utilizing the plurality of mask parts, and the alignment precision of the first mask layer and the second mask layer is improved by adjusting the positions of the mask parts. The first mask layer is used for supporting the second mask layer, and the second mask layer is prevented from sagging or deforming in the using process. The second openings arranged in a plurality of arrays can increase the distribution density of the deposition material on the plate to be deposited after deposition, thereby increasing the resolution of the display panel manufactured by the evaporation device and optimizing the display effect of the display panel.
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be described in more detail below with reference to the accompanying drawings in the preferred embodiments of the present invention. In the drawings, the same or similar reference numerals denote the same or similar components or components having the same or similar functions throughout. The described embodiments are only some, but not all embodiments of the invention. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
Fig. 1 is a schematic structural diagram of a mask provided in an embodiment of the present invention. Fig. 2 is a bottom view of a mask provided in an embodiment of the present invention. Fig. 3 is a schematic structural view of a second mask layer of the mask plate on a substrate according to the embodiment of the present invention. Fig. 4 is a schematic structural diagram of the mask plate according to the embodiment of the present invention after patterning the second mask layer. Fig. 5 is a schematic structural diagram of the first mask layer and the second mask layer after the alignment bonding according to the embodiment of the present invention. Fig. 6 is a schematic flow chart of a mask plate manufacturing method according to an embodiment of the present invention. Fig. 7 is a schematic flow chart illustrating a process of forming a second mask layer on a transparent substrate in the mask plate manufacturing method according to the embodiment of the present invention. Fig. 8 is a schematic flow chart illustrating alignment and attachment of the second mask layer and the first mask layer in the mask plate manufacturing method according to the embodiment of the present invention. Fig. 9 is a schematic flow chart illustrating a process of removing the substrate on the second mask layer in the mask plate manufacturing method according to the embodiment of the present invention. Fig. 10 is a schematic structural diagram of an evaporation apparatus according to an embodiment of the present invention.
Referring to fig. 1 and 2, a
The projection of each first opening 11 onto the corresponding mask portion 22 covers all
In this embodiment, the first mask layer 10 and the
Further, each mask portion 22 is provided with a plurality of
It should be noted that the plurality of first openings 11 on the first mask layer 10 respectively correspond to display areas of different display panels, that is, each first opening 11 respectively corresponds to a display area of a display panel to be prepared, and the purpose of dividing the display areas of different display panels can be achieved by using the plurality of first openings 11.
Wherein the mask portion 22 of the
As an implementable embodiment, the first mask layer 10 includes a plurality of magnetic portions that are disposed at intervals along the extending direction of the first mask layer 10. As another implementable embodiment, the first mask layer 10 is made of a magnetic material. It should be noted that, the
Referring to fig. 3 to 9, an embodiment of the present invention further provides a method for manufacturing a
s1: forming a second mask layer having a plurality of mask portions independent of each other on a light-transmitting substrate;
s2: aligning and attaching the second mask layer and the first mask layer;
s3: and removing the substrate on the second mask layer.
With reference to fig. 3 and 4, in step S1, that is, in forming the
s11: forming a plurality of organic material layers independent of each other on a light-transmitting substrate;
s12: and patterning all the organic material layers to form a plurality of second openings which are arranged in an array on each organic material layer, wherein the organic material layers with the plurality of second openings form mask parts, and the plurality of mask parts jointly form a second mask layer.
It should be noted that the organic material layer may be distributed on the
The patterning of the organic material layer may be performed by laser etching, and the operation difficulty during the patterning process may be greatly reduced based on the small thickness of the
The
As shown in fig. 5, in step S2, that is, in the alignment-bonding of the
s21: and placing the first mask layer and the second mask layer in a contraposition mode, wherein the first openings of the first mask layer are opposite to the mask parts of the second mask layer in a one-to-one correspondence mode.
S22: and adjusting the viscosity of the organic material of each mask part of the second mask layer, and bonding all the mask parts of the second mask layer and the first mask layer to form the first mask layer and the second mask layer which are aligned and attached.
It should be noted that the
In order to improve the connection strength between the first mask layer 10 and the
In step S3, namely, removing the
s21: irradiating the joints of all the mask parts of the second mask layer and the substrate by adopting laser;
s32: laser carbonizing organic materials of at least part of the second mask layer at the joint of all the mask parts of the second mask layer and the substrate, and separating the second mask layer from the substrate;
s33: and stripping the substrate on the second mask layer.
It should be noted that, both the
Further, after removing the
Moreover, based on the first mask layer 10 being the
Referring to fig. 10, an evaporation apparatus according to an embodiment of the present invention further includes an
It should be noted that the
In the description of the embodiments of the present invention, it should be understood that the terms "mounted," "connected," and "connected" are to be construed broadly and may include, for example, a fixed connection, an indirect connection through intervening media, a connection between two elements, or an interaction between two elements, unless expressly stated or limited otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations. The terms "upper", "lower", "front", "rear", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless specifically stated otherwise.
The terms "first," "second," "third," "fourth," and the like in the description and in the claims of the present application and in the drawings described above, if any, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
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