Combined target
阅读说明：本技术 组合式靶件 (Combined target ) 是由 钱铁威 于 2019-03-21 设计创作，主要内容包括：本发明提出了一种组合式靶件,包括靶柱和安装架,所述的安装架包括上下间隔设置的上安装架和下安装架,上安装架包括相互间隔设置的齿轮三和齿轮四,齿轮三和齿轮四上连接有环形的铰链一,下安装架包括相互间隔设置的齿轮五和齿轮六,齿轮五和齿轮六上连接有环形的铰链二,齿轮三与齿轮五联动连接,还包括驱动齿轮三转动的驱动装置三,靶柱设置在上安装架和下安装架之间,靶柱的上端与铰链一连接,靶柱的下端与铰链二连接,靶柱设有若干个,该若干个靶柱在铰链一周向方向上均匀排列；所述的靶柱包括管形的靶体、管形的承载体及安装柱,承载体套设在安装柱上,靶体套设在承载体上,所述的承载体的内部设有冷却腔体。(The invention provides a combined target piece, which comprises target posts and mounting frames, wherein the mounting frames comprise an upper mounting frame and a lower mounting frame which are arranged at intervals up and down, the upper mounting frame comprises a gear III and a gear IV which are arranged at intervals, the gear III and the gear IV are connected with an annular hinge I, the lower mounting frame comprises a gear V and a gear VI which are arranged at intervals, the gear V and the gear VI are connected with an annular hinge II, the gear III is in linkage connection with the gear V, the combined target piece also comprises a driving device III for driving the gear III to rotate, the target posts are arranged between the upper mounting frame and the lower mounting frame, the upper ends of the target posts are connected with the hinge I, the lower ends of the target posts are connected with the hinge II, and the target posts are provided with a plurality of target posts which are uniformly arranged in the circumferential; the target column comprises a tubular target body, a tubular supporting body and a mounting column, the supporting body is sleeved on the mounting column, the target body is sleeved on the supporting body, and a cooling cavity is arranged in the supporting body.)
1. A modular target, comprising: the target column comprises a plurality of target columns and mounting frames, wherein the mounting frames comprise an upper mounting frame and a lower mounting frame which are arranged at an upper interval and a lower interval, the upper mounting frame comprises a gear III and a gear IV which are arranged at intervals, the gear III and the gear IV are connected with an annular hinge I, the lower mounting frame comprises a gear V and a gear VI which are arranged at intervals, the gear V and the gear VI are connected with an annular hinge II, the gear III is in linkage connection with the gear V, the target column further comprises a driving device III for driving the gear III to rotate, the target columns are arranged between the upper mounting frame and the lower mounting frame, the upper ends of the target columns are connected with the hinge I, the lower ends of the target columns are connected with the hinge II, and the target columns are uniformly arranged in the circumferential;
the target column comprises a tubular target body, a tubular supporting body and an installation column, the supporting body is sleeved on the installation column, the target body is sleeved on the supporting body, a cooling cavity is arranged in the supporting body, the supporting body is provided with a cooling liquid inlet and a cooling liquid outlet, and the cooling liquid inlet and the cooling liquid outlet are respectively communicated with the cooling cavity.
2. A modular target according to claim 1, characterized in that: the target body can rotate around the central axis thereof.
3. A modular target according to claim 2, wherein: the bearing body is fixedly connected with the mounting column, and a first driving device for driving the mounting column to rotate is connected to the mounting column.
4. A modular target according to claim 2, wherein: the bearing body and the mounting column are rotatably connected, and the bearing device also comprises a driving mechanism for driving the bearing body to rotate.
5. The modular target of claim 4, wherein: the driving mechanism comprises a first gear, a second gear and a second driving device, the first gear is coaxial with the bearing body and is in linkage arrangement, the second gear is meshed with the first gear, and the second driving device is connected with the second gear and is used for driving the second gear to rotate.
6. A modular target according to any one of claims 1 to 5, characterized in that: the mounting bracket can carry out position control in the front, back, left and right, upper and lower directions, the mounting bracket can rotate around its central axis.
7. The modular target of claim 6, wherein: the mounting rack is characterized by further comprising a fixing plate, the fixing plate is arranged above the mounting rack, a third gear and a fourth gear are rotatably connected with the fixing plate, the third gear is in linkage connection with the fifth gear through a central column, the fourth gear is in linkage connection with the sixth gear through a central column, and the third driving device is arranged on the fixing plate.
8. The modular target of claim 7, wherein: a first sliding rod and a second sliding rod are arranged above the fixed plate and are perpendicular to each other, the first sliding rod and the second sliding rod form sliding fit, the second sliding rod can slide along the length direction of the first sliding rod, a fourth driving device for driving the second sliding rod to move is arranged on the first sliding rod, the fixed plate is connected with the second sliding rod in a sliding mode, the fixed plate can move along the length direction of the second sliding rod, and a fifth driving device for driving the fixed plate to slide is arranged on the second sliding rod; the sliding rod I is fixedly connected to the lower side of the fixing seat, a driving device II for driving the sliding rod I to rotate is connected to the fixing seat, and a driving device III for driving the sliding rod I to move up and down is connected to the fixing seat.
9. The modular target of claim 6, wherein: the tubular target body is composed of a plurality of target blocks, and the target bodies are formed by connecting the target blocks in series through high-strength metal wires.
10. The modular target of claim 8, wherein: the tubular target body is composed of a plurality of target blocks, and the target bodies are formed by connecting the target blocks in series through high-strength metal wires.
Technical Field
The present invention relates to a combination target.
Background
A target is understood to mean the material being sputtered in a cathode sputtering system. Most sputtering targets used in the past are so-called planar targets which are configured in a circular or rectangular manner. However, planar targets have the following disadvantages: only about 30% to 40% of the material constituting the planar target is effectively sputtered, and its effective utilization rate is low and its service life is short. The targets used at present are single target bodies, and the control beam is often designed optimally to obtain a large number of sputtering sources, but the optimization of the control beam often involves high cost and difficulty.
Disclosure of Invention
The invention provides a combined target piece aiming at the problems pointed out in the background technology, which is formed by combining a plurality of single targets, can move in multiple directions, and is internally provided with a cooling structure, thereby not only obtaining a large number of sputtering sources with low cost, but also improving the utilization rate of the targets and prolonging the service life of the targets.
The technical scheme of the invention is realized as follows:
a combined target piece comprises target posts and mounting frames, wherein the mounting frames comprise an upper mounting frame and a lower mounting frame which are arranged at an upper interval and a lower mounting frame at a lower interval, the upper mounting frame comprises a gear III and a gear IV which are arranged at intervals, the gear III and the gear IV are connected with an annular hinge I, the lower mounting frame comprises a gear V and a gear VI which are arranged at intervals, the gear V and the gear VI are connected with an annular hinge II, the gear III is in linkage connection with the gear V, the combined target piece also comprises a driving device III for driving the gear III to rotate, the target posts are arranged between the upper mounting frame and the lower mounting frame, the upper ends of the target posts are connected with the hinge I, the lower ends of the target posts are connected with the hinge II, the target posts are provided with a plurality of target posts;
the target column comprises a tubular target body, a tubular supporting body and an installation column, the supporting body is sleeved on the installation column, the target body is sleeved on the supporting body, a cooling cavity is arranged in the supporting body, the supporting body is provided with a cooling liquid inlet and a cooling liquid outlet, and the cooling liquid inlet and the cooling liquid outlet are respectively communicated with the cooling cavity.
The invention is further configured such that the target body is rotatable about its central axis.
The invention is further provided that the supporting body is fixedly connected with the mounting column, and the mounting column is connected with a first driving device for driving the mounting column to rotate.
The invention is further provided that the supporting body is rotatably connected with the mounting column, and the invention also comprises a driving mechanism for driving the supporting body to rotate.
The invention is further provided that the driving mechanism comprises a first gear, a second gear and a second driving device, wherein the first gear is coaxial with the bearing body and is in linkage arrangement, the second gear is meshed with the first gear, and the second driving device is connected with the second gear and is used for driving the second gear to rotate.
The invention is further provided with: the mounting bracket can carry out position control in the front, back, left and right, upper and lower directions, the mounting bracket can rotate around its central axis.
The invention is further provided with a fixing plate, the fixing plate is arranged above the mounting frame, the gear III and the gear IV are in rotary connection with the fixing plate, the gear III is in linkage connection with the gear V through the center post I, the gear IV is in linkage connection with the gear VI through the center post, and the driving device III is arranged on the fixing plate.
The invention is further set up in that a first sliding rod and a second sliding rod are arranged above the fixed plate, the first sliding rod and the second sliding rod are arranged vertically, the first sliding rod and the second sliding rod form sliding fit, the second sliding rod can slide along the length direction of the first sliding rod, a fourth driving device for driving the second sliding rod to move is arranged on the first sliding rod, the fixed plate is connected with the second sliding rod in a sliding manner, the fixed plate can move along the length direction of the second sliding rod, and a fifth driving device for driving the fixed plate to slide is arranged on the second sliding rod; the sliding rod I is fixedly connected to the lower side of the fixing seat, a driving device II for driving the sliding rod I to rotate is connected to the fixing seat, and a driving device III for driving the sliding rod I to move up and down is connected to the fixing seat.
The invention is further provided that the tubular target body is composed of a plurality of target blocks, and the target bodies are formed by connecting and assembling the plurality of target blocks in series through high-strength metal wires.
The invention has the beneficial effects that:
the combined target piece provided by the invention is formed by combining a plurality of single targets, can move in multiple directions, is internally provided with a cooling structure, not only can obtain a large number of sputtering sources at low cost, but also improves the utilization rate of the targets and prolongs the service life of the targets. The single target column structure is tubular, when in use, the surface of the target can obtain more uniform etching effect by performing autorotation adjustment on the tubular target, and the etching area can basically cover the whole surface of the target by adjusting the position of the target body.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural view of the present invention;
FIG. 3 is a schematic structural view of the present invention;
FIG. 4 is a schematic structural view of the present invention;
FIG. 5 is a schematic structural view of a target according to the present invention;
FIG. 6 is a schematic structural view of a target according to the present invention;
FIG. 7 is a schematic structural view of a target according to the present invention;
FIG. 8 is a schematic structural view of the present invention;
FIG. 9 is a schematic view of the structure of a target body according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention is described below with reference to fig. 1-9:
as shown in fig. 1-4, a combined target, including target 100 and a mounting bracket, the mounting bracket includes
As shown in fig. 5, the target column 100 includes a tubular target body 1, a tubular supporting
Wherein, the target body 1 can rotate around the central axis thereof.
As shown in fig. 6, the supporting
As shown in fig. 7, the supporting
The driving mechanism comprises a first gear 5, a second gear 6 and a second driving device 7, wherein the first gear 5 is coaxial with the
As shown in fig. 8, the mounting bracket can be adjusted in position in the front, rear, left, right, up and down directions, and the mounting bracket can rotate around the central axis thereof. Enabling multi-directional movement of a modular target, one embodiment of which is disclosed below
The mounting frame further comprises a fixing plate 200, the fixing plate 200 is arranged above the mounting frame, a gear three 103 and a gear four 104 are in rotating connection with the fixing plate 200, the gear three 103 and a gear five 106 are in linkage connection through a center post one 201, the gear four 104 and a gear six 107 are in linkage connection through a center post two 202, and the driving device three is arranged on the fixing plate 200.
The first sliding rod 203 and the second sliding rod 204 are arranged above the fixing plate 200, the first sliding rod 203 and the second sliding rod 204 are arranged perpendicular to each other, the first sliding rod 203 and the second sliding rod 204 form sliding fit, the second sliding rod 204 can slide along the length direction of the first sliding rod 203, and the fourth driving device (air cylinder) for driving the second sliding rod 204 to move is arranged on the first sliding rod 203.
The fixed plate 200 is connected with the second sliding rod 204 in a sliding manner, the fixed plate 200 can move along the length direction of the second sliding rod 204, and the second sliding rod 204 is provided with a fifth driving device (air cylinder) for driving the fixed plate 200 to slide.
The device is characterized by further comprising a fixed seat 205, the first sliding rod 203 is fixedly connected to the lower side of the fixed seat 205, a driving device six 206 (motor) for driving the first sliding rod to rotate is connected to the fixed seat 205, and a driving device seven 207 (air cylinder) for driving the first sliding rod to move up and down is connected to the fixed seat 205.
As shown in fig. 9, the tubular target body 1 is composed of a plurality of target blocks 300, and the target blocks 300 are assembled in series by high strength wires 301 to form the target body 1.
Any angle of illumination directed at the composite target in the horizontal direction will be completely blocked by the target posts in the composite target. The arrangement positions of the target posts in the combined target piece are limited in the technical scheme, and the arrangement density of the target posts must ensure that the irradiated irradiation beams cannot penetrate through gaps among the target posts.
The invention has the beneficial effects that:
the combined target piece provided by the invention is formed by combining a plurality of single targets, can move in multiple directions, is internally provided with a cooling structure, not only can obtain a large number of sputtering sources at low cost, but also improves the utilization rate of the targets and prolongs the service life of the targets. The single target column 100 is in a tubular structure, so that the surface of the target can obtain more uniform etching effect by performing autorotation adjustment on the tubular target during use, and the etching area can cover the whole surface of the target basically by adjusting the position of the target body 1.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
- 上一篇：一种医用注射器针头装配设备
- 下一篇：一种组合靶件