阅读说明：本技术 一种旋转靶材冷绑定工艺 (Cold binding process for rotary target material ) 是由 张俊杰 于 2019-11-14 设计创作，主要内容包括：本发明实施例公开了一种旋转靶材冷绑定工艺,属于靶材技术领域。所述旋转靶材冷绑定工艺,包括以下步骤：将外管靶材套在背管上；将粘接剂压注到外管靶材和内管的间隙中；待粘接剂凝固后即完成绑定。本发明的冷绑定工艺能够有效地将间隙中的空气挤压出来,使得外管靶材与背管的粘接面积可以达到100％,从而两管之间不会产生空穴,溅射过程中有效避免了裂靶及掉靶现象。绑定时无需加热,因而背管不会产生膨胀现象,所以背管可以采用304不锈钢管,具有成本低的优点。本发明的绑定工艺可以绑定任何材料的靶材、任何规格以及任何单节长度(200mm-2000mm)的旋转靶材。具有操作简单,成本低,节能环保,成品合格率高的优点。(The embodiment of the invention discloses a cold binding process for a rotary target, and belongs to the technical field of targets. The cold binding process of the rotary target comprises the following steps: sleeving the outer tube target on the back tube; injecting the adhesive into the gap between the outer tube target and the inner tube; and finishing binding after the adhesive is solidified. The cold binding process can effectively extrude the air in the gap, so that the bonding area between the target material of the outer tube and the back tube can reach 100 percent, a cavity can not be generated between the two tubes, and the phenomena of target cracking and target falling are effectively avoided in the sputtering process. The binding process does not need heating, so the expansion phenomenon of the back pipe can not be generated, and the back pipe can adopt a 304 stainless steel pipe, thereby having the advantage of low cost. The binding process of the invention can bind target materials of any material, rotating target materials of any specification and any single section length (200mm-2000 mm). The method has the advantages of simple operation, low cost, energy conservation, environmental protection and high qualification rate of finished products.)

1. A cold binding process for a rotary target is characterized by comprising the following steps:

1) sleeving the outer tube target on the back tube;

2) injecting the adhesive into the gap between the outer tube target and the inner tube;

3) and finishing binding after the adhesive is solidified.

2. The rotary target cold-binding process of claim 1, wherein the adhesive comprises an adhesive and a metallic material.

3. The cold-binding process for a rotating target according to claim 2, wherein the adhesive comprises silver conductive adhesive or copper conductive adhesive.

4. The rotary target cold binding process according to claim 2, wherein the metal material comprises copper wire or aluminum wire.

5. The cold binding process of the rotary target according to claim 1, wherein the outer tube target is made of silicon, ceramic, graphite, molybdenum sulfide, teflon, molybdenum, copper, aluminum neodymium, copper aluminum, copper zinc, silicon aluminum or silicon chromium.

6. The rotary target cold binding process according to claim 1, wherein the backing tube is a 304 stainless steel tube.

7. The cold binding process for the rotary target according to claim 1, wherein the unilateral gap between the inner surface of the outer tube target and the outer surface of the backing tube is 1-1.5 mm.

Technical Field

The embodiment of the invention relates to the technical field of targets, in particular to a cold binding process for a rotary target.

Background

The target material is a solid material which is bombarded by high-speed charged particles and can deposit or react on the surface of a coating substrate to form a film. The target material can be divided into a planar target material, a rotary target material and an anisotropic target material according to the shape of the sputtering surface. The rotary target is in a hollow round tube shape, can rotate around the fixed strip-shaped magnet assembly, can uniformly etch the target surface by 360 degrees, and has the advantages of high utilization rate, good coating continuity, uniform coating components and the like.

The preparation method of the rotary target material comprises a spraying method and a binding method. The spraying method is a process of spraying powder such as silicon powder on a back tube by adopting plasma spraying equipment, and the spraying is particle accumulation, so that a high-density target material is difficult to produce, the oxygen content is high, and the resistivity of the target material is not uniformly distributed.

The binding method is that the outer tube target material with larger diameter is sleeved on the back tube with relatively smaller diameter, and the outer tube target material and the back tube are bonded together by using metal indium or conductive adhesive.

The method is characterized in that indium is bound into a thermal binding method, the melting point of the indium is 156.76 ℃, the heating temperature during binding must be higher than the melting point temperature of the indium, when a back tube is made of 304 stainless steel, the back tube is heated to expand so as to cause the outer tube target to crack, in order to prevent the back tube from thermally expanding to prop the outer tube target to crack, the current back tube is made of titanium materials, the expansion rate of the titanium after heating is small, so that the outer tube target cannot be propped to crack, but the manufacturing cost is very high.

The conductive adhesive is an adhesive with certain conductivity after being cured or dried, and can connect a plurality of conductive materials together to form an electric path between the connected materials. However, in the prior art, no matter the outer tube target material and the back tube are bonded by the conductive adhesive or indium, the bonding area is difficult to reach 100%, so that a cavity exists between the outer tube target material and the back tube, and target cracking and target falling are easy to occur in the sputtering process.

The invention is especially provided for improving the quality of the rotary target and reducing the production cost.

Disclosure of Invention

Therefore, the embodiment of the invention provides a cold binding process for a rotary target material, which aims to overcome the defects of poor quality and high production cost of the rotary target material produced by the existing method.

In order to achieve the above object, the embodiments of the present invention provide the following technical solutions:

a cold binding process for a rotary target comprises the following steps:

1) sleeving the outer tube target on the back tube;

2) injecting the adhesive into the gap between the outer tube target and the inner tube;

3) and finishing binding after the adhesive is solidified.

Preferably, the adhesive comprises an adhesive and a metal material.

Preferably, the adhesive comprises a silver conductive paste or a copper conductive paste.

Preferably, the metal material comprises copper wire or aluminum wire.

Preferably, the material of the outer tube target is silicon, ceramic, graphite, molybdenum sulfide, teflon, molybdenum, copper, aluminum neodymium, copper aluminum, copper zinc, silicon aluminum or silicon chromium.

Preferably, the back pipe is a 304 stainless steel pipe.

Preferably, the unilateral gap between the inner surface of the outer tube target and the outer surface of the back tube is 1-1.5 mm.

The embodiment of the invention has the following advantages:

1. according to the cold binding process of the rotary target, the target of the outer tube is sleeved on the back tube; injecting the adhesive into the gap between the outer tube target and the inner tube; and finishing binding after the adhesive is solidified. The bonding agent is formed by combining a high-performance conductive adhesive and a metal material, plays roles of bonding, electric conduction and heat conduction, is injected into a gap between the outer tube target and the back tube by pressing with a tool, and can effectively extrude out air in the gap in the pressing injection process, so that the bonding area between the outer tube target and the back tube can reach 100 percent, a cavity cannot be generated between the two tubes, and the phenomena of target cracking and target falling are effectively avoided in the sputtering process.

2. The binding process of the invention does not need heating during binding, so the back pipe does not generate expansion phenomenon, and the back pipe can adopt 304 stainless steel pipe, thus having the advantage of low cost.

3. The binding process of the invention can bind target materials of any material and rotary target materials of any single section length (200mm-2000 mm). The method has the advantages of simple operation, low cost, energy conservation, environmental protection and high qualification rate of finished products.

Detailed Description

The present invention is described in terms of particular embodiments, other advantages and features of the invention will become apparent to those skilled in the art from the following disclosure, and it is to be understood that the described embodiments are merely exemplary of the invention and that it is not intended to limit the invention to the particular embodiments disclosed. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.