阅读说明：本技术 一种母版芯模、掩膜板及其制作方法 (Mother plate core mold, mask plate and manufacturing method thereof ) 是由 刘盛娟 于 2018-07-03 设计创作，主要内容包括：本发明实施例公开了一种母版芯模、掩膜板及其制作方法。其中,母版芯模包括：导电芯模主板和绝缘底板；所述导电芯模主板贴附于所述绝缘底板上；所述导电芯模主板上设置有掩膜图形；所述掩膜图形与通过所述母版芯模制备的掩膜板的遮光图形相同。本发明实施例提供的技术方案,可解决现有掩膜板开口密度较低或者精度较差的问题。(The embodiment of the invention discloses a master plate core mold, a mask plate and a manufacturing method thereof. Wherein the master mandrel comprises: the conductive core mould comprises a conductive core mould main board and an insulating bottom board; the conductive core mould main board is attached to the insulating bottom board; a mask pattern is arranged on the conductive core mould mainboard; the mask pattern is the same as the shading pattern of the mask plate prepared by the master plate core mold. The technical scheme provided by the embodiment of the invention can solve the problems of low opening density or poor precision of the existing mask plate.)

1. A master mandrel, comprising: the conductive core mould comprises a conductive core mould main board and an insulating bottom board;

the conductive core mould main board is attached to the insulating bottom board;

a mask pattern is arranged on the conductive core mould mainboard; the mask pattern is the same as the shading pattern of the mask plate prepared by the master plate core mold.

2. The master mandrel of claim 1, wherein the material of the electrically conductive mandrel master plate is molybdenum.

3. The master mandrel of claim 1, wherein the mask pattern is in the form of a grid.

4. The master mandrel of claim 3,

and the side surface of the grid line of the grid-shaped mask pattern and the plane of the insulating bottom plate have a preset inclination angle.

5. The master mandrel of claim 1 wherein the insulating floor is a glass floor.

6. A method for manufacturing a mask, characterized in that the master matrix core mold of any one of claims 1 to 5 is used for preparation; the manufacturing method of the mask plate comprises the following steps:

placing the master plate core mold in electroplating solution;

electrifying the mother board core mold, and forming an electroforming layer on the surface of the conductive core mold main board far away from the insulating bottom plate;

stripping the electroforming layer from the master plate core mold to form a mask plate;

and the surface of the electroforming layer, which is deviated from the master plate core mold, is the evaporation surface of the mask plate.

7. A method for making a mask according to claim 6, wherein the mother core is energized to form an electroformed layer on the surface of the conductive core motherboard away from the insulating substrate, comprising:

electrifying the mother board core mold, and forming the electroforming layer on the surface of the conductive core mold main board far away from the insulating bottom board according to the growth rate ratio along the first direction and the second direction;

the first direction is a direction parallel to the plane of the master mandrel, and the second direction is a direction perpendicular to the plane of the master mandrel.

8. A method for manufacturing a mask according to claim 7, wherein:

the growth rate ratio was 3: 5.

9. A method for making a mask according to claim 6, further comprising, after peeling off said electroformed layer from said master mandrel to form said mask:

and carrying out heat treatment on the mask plate.

10. A manufacturing method of a mask according to claim 9, wherein the light-shielding pattern of the mask is in a grid shape; the grid line width of the grid-shaped shading graph is the sum of a preset line width and a compensation width; and the compensation width is equal to the retraction width of the mask plate during heat treatment.

11. A manufacturing method of a mask according to claim 6, characterized in that:

the material of the electroforming layer is nickel-iron alloy.

12. A method for manufacturing a mask according to claim 11, wherein:

the mass percentage of nickel in the nickel-iron alloy is 40%.

13. A method for making a mask according to claim 6, further comprising, after peeling off said electroformed layer from said master mandrel to form said mask:

and cutting the mask plate into a single mask plate with a set shape.

14. A mask, characterized in that, it is made by the method of any one of the above claims 6-13.