阅读说明：本技术 一种oled蒸镀基板传送装置及其使用方法 (OLED evaporation substrate conveying device and using method thereof ) 是由 伍丰伟 于 2021-10-13 设计创作，主要内容包括：本发明公开一种OLED蒸镀基板传送装置及其使用方法,装置包括磁力板和机械臂,磁力板上间隔设置若干磁铁形成磁铁矩阵,磁力板上间隔设有若干通孔,每个通孔活动穿设有磁力吸盘棒；基板铺设在磁力吸盘棒上,并由磁力吸盘棒带动升降以铺设在磁力板的一表面；掩膜板铺设在基板背离磁力板的一面并对齐,磁力板通过磁铁矩阵对基板和掩膜板进行吸附固定；机械臂带动基板铺设在磁力吸盘棒上并在掩膜板和基板对齐后带动磁力板翻转。本发明取消掩模片开孔,采用磁力板开孔及机构翻转方式,提高基板与掩膜板的对位精度,有利于OLED量产顺利进行。(The invention discloses an OLED evaporation substrate conveying device and a using method thereof, wherein the device comprises a magnetic plate and a mechanical arm, wherein a plurality of magnets are arranged on the magnetic plate at intervals to form a magnet matrix, a plurality of through holes are arranged on the magnetic plate at intervals, and a magnetic sucker rod is movably arranged through each through hole; the substrate is laid on the magnetic sucker rod and is driven by the magnetic sucker rod to lift so as to be laid on one surface of the magnetic plate; the mask plate is laid on one surface of the substrate, which is far away from the magnetic plate, and is aligned with the substrate, and the magnetic plate adsorbs and fixes the substrate and the mask plate through a magnet matrix; the mechanical arm drives the substrate to be laid on the magnetic sucker rod and drives the magnetic plate to turn over after the mask plate and the substrate are aligned. According to the invention, the mask sheet opening is cancelled, the magnetic plate opening and the mechanism overturning mode are adopted, the alignment precision of the substrate and the mask plate is improved, and the smooth mass production of the OLED is facilitated.)

1. The utility model provides an OLED evaporation plating base plate conveyer which characterized in that: the magnetic force plate is provided with a plurality of magnets at intervals to form a magnet matrix, and is provided with a plurality of through holes at intervals, and each through hole is movably penetrated with a magnetic force sucker rod; the substrate is laid on the magnetic sucker rod and is driven by the magnetic sucker rod to lift so as to be laid on one surface of the magnetic plate; the mask plate is laid on one surface of the substrate, which is far away from the magnetic plate, and is aligned with the substrate, and the magnetic plate adsorbs and fixes the substrate and the mask plate through a magnet matrix; the mechanical arm drives the substrate to be laid on the magnetic sucker rod and drives the magnetic plate to turn over after the mask plate and the substrate are aligned.

2. The OLED evaporation substrate conveying device according to claim 1, wherein: the magnetic pole directions of the magnets positioned on the same row or the same column on the magnetic force plate are the same.

3. The OLED evaporation substrate conveying device according to claim 1, wherein: the magnetic plate is provided with a plurality of fixing grooves corresponding to the magnets, and the magnets can be detachably fixed in the fixing grooves.

4. The OLED evaporation substrate conveying device according to claim 1, wherein: the mask plate comprises a mask sheet and a mask frame, wherein the side edge of the mask plate is fixed by the mask frame, and the mask frame is fixed on the mask plate supporting seat.

5. The OLED evaporation substrate conveying device according to claim 1, wherein: one end of the magnetic sucker rod is provided with a magnetic sucker which adsorbs and supports the substrate.

6. An OLED evaporation substrate conveying device using method, the OLED evaporation substrate conveying device according to one of claims 1 to 5, characterized in that: the method comprises the following steps:

step 1, placing one side of a magnetic plate upwards, and fixing a magnet on the magnetic plate to form a magnetic matrix;

step 2, arranging a magnetic sucker rod in the through hole of the magnetic plate, wherein the magnetic sucker rod ensures that one end with a magnetic sucker is higher than one surface of the magnetic plate;

step 3, operating the mechanical arm to feed the substrate into the chamber to be placed on the magnetic sucker rod, and operating the mechanical arm to withdraw from the chamber after the magnetic sucker rod supports the substrate;

step 4, controlling the magnetic sucker rod to descend, and enabling one end of the magnetic sucker rod to be lower than one surface of the magnetic plate;

step 5, after the substrate is placed on one surface of the magnetic plate, the reverse surface of the mask plate is conveyed into the cavity and placed above the substrate;

step 6, gradually reducing the height of the mask plate to a position to be in contact with the substrate, starting the CCD to perform alignment, and simultaneously controlling and adjusting the position of the mask plate to align the mask plate with the substrate;

step 7, after the mask plate is aligned with the substrate, lowering the mask plate to enable the mask plate to be in contact with the substrate, and enabling the substrate and the mask plate to be tightly attached through magnetic force by the magnetic force plate;

and 8, operating the mechanical arm to drive the magnetic plate to turn over for 180 degrees, and synchronously turning over the substrate and the mask plate for 180 degrees so that the bottom bar of the mask plate and a roller in the cavity interact to convey the substrate into the coating cavity.

7. The use method of the OLED evaporation substrate conveying device according to claim 6, wherein the OLED evaporation substrate conveying device comprises: when the mechanical arm sends the substrate into the chamber in the step 3, the ground height of the substrate is higher than one end of the magnetic sucker rod; when the substrate is in place, the mechanical arm is operated to descend so that the substrate is placed on the magnetic sucker rod and supported by the magnetic sucker rod.

8. The use method of the OLED evaporation substrate conveying device according to claim 6, wherein the OLED evaporation substrate conveying device comprises: step 6, coarse adjustment alignment is carried out, and fine adjustment alignment is carried out; the coarse adjustment precision is 500-150 μm, and the fine adjustment alignment precision is less than or equal to 50 μm.

Technical Field

The invention relates to manufacturing equipment in the technical field of display, in particular to an OLED evaporation substrate conveying device and a using method thereof.

Background

Organic Light Emitting Diodes (OLEDs) have the advantages of being all solid-state, ultra-thin, free of viewing angle limitation, fast in response, low in temperature operation, easy to implement flexible display and 3D display, and the like, and are consistently recognized as a new generation of mainstream display technology following LCDs. At present, the main method for manufacturing an OLED device is heating evaporation coating, which mainly uses a heating container to heat an evaporation material in a vacuum environment, so that the sublimation type or melting type evaporation material is gasified at a high temperature and deposited on a glass substrate having a TFT (Thin Film Transistor) structure or an anode structure.

Referring to fig. 1, a conventional apparatus — is sequentially configured from top to bottom as a magnetic plate 1 (Magnet)/a substrate 2 (GLASS)/a MASK 3 (MASK). In order to reduce the Bending (Bending) of the Glass substrate, the substrate is in a non-film forming area with the front face facing downwards, a plurality of ribs, namely Mask sheets (Mask sheets), are arranged on the Mask 3 and used for supporting the Glass substrate, so that the Bending is reduced, a plurality of small holes are formed in the ribs and used for enabling substrate supporting legs (Glass Support pins) to move up and down, and the alignment of the substrate and the Mask is completed.

The prior device has the following defects: 1) Due to the reason of pixel design, the Hole (Mask Sheet Hole) area of the Mask Sheet is small (approximately equal to 2 mm), so that the substrate supporting foot needs to be less than 2mm, and the actual manufacturing of the substrate supporting foot is difficult at the moment; 2) the actual < 2mm of base plate supporting legs, when base plate and mask plate counterpoint, the base plate counterpoint very easily goes wrong (base plate supporting legs active area undersize, is difficult to satisfy high accuracy counterpoint requirement), restricts OLED coating by vaporization volume production.

Disclosure of Invention

The invention aims to provide an OLED evaporation substrate conveying device and a using method thereof.

The technical scheme adopted by the invention is as follows:

an OLED evaporation substrate conveying device comprises a magnetic plate and a mechanical arm, wherein a plurality of magnets are arranged on the magnetic plate at intervals to form a magnet matrix, a plurality of through holes are arranged on the magnetic plate at intervals, and a magnetic sucker rod is movably arranged through each through hole; the substrate is laid on the magnetic sucker rod and is driven by the magnetic sucker rod to lift so as to be laid on one surface of the magnetic plate; the mask plate is laid on one surface of the substrate, which is far away from the magnetic plate, and is aligned with the substrate, and the magnetic plate adsorbs and fixes the substrate and the mask plate through a magnet matrix; the mechanical arm drives the substrate to be laid on the magnetic sucker rod and drives the magnetic plate to turn over after the mask plate and the substrate are aligned.

Further, the magnetic pole directions of the magnets on the magnetic plates in the same row or the same column are the same.

Furthermore, the magnetic plate is provided with a plurality of fixing grooves corresponding to the magnets, and the magnets can be detachably fixed in the fixing grooves.

Furthermore, the mask plate comprises a mask sheet and a mask frame, the side edge of the mask plate is fixed by the mask frame, and the mask frame is fixed on the mask plate supporting seat.

Furthermore, one end of the magnetic sucker rod is provided with a magnetic sucker which adsorbs and supports the substrate.

The use method of the OLED evaporation substrate conveying device comprises the following steps:

step 1, placing one side of a magnetic plate upwards, and fixing a magnet on the magnetic plate to form a magnetic matrix;

step 2, arranging a magnetic sucker rod in the through hole of the magnetic plate, wherein the magnetic sucker rod ensures that one end with a magnetic sucker is higher than one surface of the magnetic plate;

step 3, operating the mechanical arm to feed the substrate into the chamber to be placed on the magnetic sucker rod, and operating the mechanical arm to withdraw from the chamber after the magnetic sucker rod supports the substrate;

step 4, controlling the magnetic sucker rod to descend, and enabling one end of the magnetic sucker rod to be lower than one surface of the magnetic plate;

step 5, after the substrate is placed on one surface of the magnetic plate, the reverse surface of the mask plate is conveyed into the cavity and placed above the substrate;

step 6, gradually reducing the height of the mask plate to a position to be in contact with the substrate, starting the CCD to perform alignment, and simultaneously controlling and adjusting the position of the mask plate to align the mask plate with the substrate;

step 7, after the mask plate is aligned with the substrate, lowering the mask plate to enable the mask plate to be in contact with the substrate, and enabling the substrate and the mask plate to be tightly attached through magnetic force by the magnetic force plate;

and 8, operating the mechanical arm to drive the magnetic plate to turn over for 180 degrees, and synchronously turning over the substrate and the mask plate for 180 degrees so that the bottom bar of the mask plate and a roller in the cavity interact to convey the substrate into the coating cavity. The roller is similar to a gear with a groove, and the bottom bar and the roller are in mutual contact and friction to push the bottom bar to move forwards;

further, when the mechanical arm feeds the substrate into the chamber in the step 3, the ground height of the substrate is higher than one end of the magnetic sucker rod; when the substrate is in place, the mechanical arm is operated to descend so that the substrate is placed on the magnetic sucker rod and supported by the magnetic sucker rod.

Furthermore, in step 6, after coarse alignment, fine alignment is performed, wherein the coarse alignment precision is 500-150 μm, and the fine alignment precision is less than or equal to 50 μm.

According to the technical scheme, Mask Sheet openings are omitted, evaporation materials are prevented from penetrating through the Mask Sheet openings to a certain extent, and the evaporation materials are deposited in a Panel area of the substrate to influence the display effect;

2) according to the novel technical scheme, Mask Sheet opening is omitted, and a Magnet Plate opening and mechanism overturning mode is adopted, so that the alignment precision of the substrate and the Mask can be improved, and the smooth mass production of the OLED is facilitated.

Drawings

The invention is described in further detail below with reference to the accompanying drawings and the detailed description;

FIG. 1 is a schematic structural diagram of a conventional vapor deposition substrate fixing device;

FIG. 2 is a diagram illustrating a state of an OLED evaporation substrate transport device according to one embodiment of the present invention;

FIG. 3 is a second view illustrating a usage status of the OLED evaporation substrate transportation device according to the present invention;

FIG. 4 is a third view of the usage status of the OLED evaporation substrate transportation device of the present invention;

FIG. 5 is a fourth view illustrating a state of the OLED evaporation substrate transport device according to the present invention;

FIG. 6 is a fifth view illustrating the usage status of the OLED evaporation substrate transportation device according to the present invention;

FIG. 7 is a sixth view illustrating a state of the OLED evaporation substrate transport device according to the present invention;

FIG. 8 is a seventh view illustrating a state of the OLED evaporation substrate transportation device according to the present invention;

FIG. 9 is an eighth view illustrating a state of the OLED evaporation substrate transportation device according to the present invention;

FIG. 10 is a ninth view illustrating a state of the OLED evaporation substrate transportation device according to the present invention;

FIG. 11 is a cross-sectional view of a state of an OLED evaporation substrate transport apparatus according to the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application.

As shown in one of fig. 2 to 11, the invention discloses an OLED evaporation substrate conveying device, which comprises a magnetic plate and a mechanical arm, wherein a plurality of magnets are arranged on the magnetic plate at intervals to form a magnet matrix, a plurality of through holes are arranged on the magnetic plate at intervals, and a magnetic sucker rod is movably arranged through each through hole; the substrate is laid on the magnetic sucker rod and is driven by the magnetic sucker rod to lift so as to be laid on one surface of the magnetic plate; the mask plate is laid on one surface of the substrate, which is far away from the magnetic plate, and is aligned with the substrate, and the magnetic plate adsorbs and fixes the substrate and the mask plate through a magnet matrix; the mechanical arm drives the substrate to be laid on the magnetic sucker rod and drives the magnetic plate to turn over after the mask plate and the substrate are aligned.

Further, the magnetic pole directions of the magnets on the magnetic plates in the same row or the same column are the same.

Furthermore, the magnetic plate is provided with a plurality of fixing grooves corresponding to the magnets, and the magnets can be detachably fixed in the fixing grooves.

Furthermore, the mask plate comprises a mask sheet and a mask frame, the side edge of the mask plate is fixed by the mask frame, and the mask frame is fixed on the mask plate supporting seat.

Furthermore, one end of the magnetic sucker rod is provided with a magnetic sucker which adsorbs and supports the substrate.

The use method of the OLED evaporation substrate conveying device comprises the following steps:

step 1, as shown in fig. 2, placing one side of a magnetic plate upwards, and fixing a magnet on the magnetic plate to form a magnetic matrix;

step 2, as shown in fig. 3 or 4, the magnetic sucker rod is arranged in the through hole of the magnetic plate, and the magnetic sucker rod ensures that one end with the magnetic sucker is higher than one surface of the magnetic plate;

step 3, as shown in fig. 5, the mechanical arm is operated to feed the substrate into the chamber to be placed on the magnetic chuck bar, and the mechanical arm is operated to withdraw from the chamber after the magnetic chuck bar supports the substrate;

step 4, as shown in fig. 6 or 7, controlling the magnetic sucker rod to descend, and enabling one end of the magnetic sucker rod to be lower than one surface of the magnetic plate;

step 5, after the substrate is placed on one surface of the magnetic plate, as shown in fig. 8, the reverse surface of the mask plate is sent into the cavity and placed above the substrate;

step 6, as shown in fig. 9 or 10, gradually reducing the height of the mask plate to a position to be in contact with the substrate, starting the CCD to perform alignment, and simultaneously controlling and adjusting the position of the mask plate to align the mask plate with the substrate;

step 7, after the mask plate is aligned with the substrate, lowering the mask plate to enable the mask plate to be in contact with the substrate, and enabling the substrate and the mask plate to be tightly attached through magnetic force by the magnetic force plate;

and 8, as shown in fig. 11, operating the mechanical arm to drive the magnetic plate to turn over for 180 degrees, and synchronously turning over the substrate and the mask plate for 180 degrees, so that the bottom bar of the mask plate interacts with the rollers in the cavity to convey the substrate into the coating cavity. The Roller is similar to a gear with a groove, and the bottom bar and the Roller are in contact and friction with each other to push the bottom bar to move forwards.

Further, when the mechanical arm feeds the substrate into the chamber in the step 3, the ground height of the substrate is higher than one end of the magnetic sucker rod; when the substrate is in place, the mechanical arm is operated to descend so that the substrate is placed on the magnetic sucker rod and supported by the magnetic sucker rod.

Furthermore, in step 6, after coarse alignment, fine alignment is performed. The difference between the coarse adjustment and the fine adjustment in the alignment is that the range of the alignment precision is different, for example, the coarse adjustment precision is 500-150 μm, and the fine adjustment alignment precision is high, and the precision range is less than or equal to 50 μm;

according to the technical scheme, Mask Sheet openings are omitted, evaporation materials are prevented from penetrating through the Mask Sheet openings to a certain extent, and the evaporation materials are deposited in a Panel area of the substrate to influence the display effect;

2) according to the novel technical scheme, Mask Sheet opening is omitted, and a Magnet Plate opening and mechanism overturning mode is adopted, so that the alignment precision of the substrate and the Mask can be improved, and the smooth mass production of the OLED is facilitated.

It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. The embodiments and features of the embodiments in the present application may be combined with each other without conflict. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations. Thus, the detailed description of the embodiments of the present application is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.