阅读说明：本技术 一种可调张力的镀膜机 (Coating machine with adjustable tension ) 是由 李泽芬 李东霖 钱立明 于 2019-11-27 设计创作，主要内容包括：本发明公开了一种可调张力的镀膜机,包括装载支架、顶接板、托载台和泵体,所述装载支架顶部中间处水平设置有顶接板,且所述装载支架两端均竖向设置有侧封板,两个侧封板之间水平嵌设有托载台。本发明的有益效果是：通过溅射机构上的电机五带动电子枪调节移动至靶材正上方,保证电子枪能够快速移动至靶材上方进行轰击工作,并且电子枪对靶材照射轰击时,电机七通过旋摆板带动电子枪左右往复翻转工作,一方面,保证靶材被电子枪轰击处理更完全,再配合电机五在挂台上带动电子枪左右调节活动,保证电子枪对靶材轰击面积覆盖更完全,另一方面,极大的提高了靶材表面组分被轰击逸出的效率以及基板被镀膜的效率。(The invention discloses a tension-adjustable film coating machine which comprises a loading support, a jacking plate, a supporting platform and a pump body, wherein the jacking plate is horizontally arranged in the middle of the top of the loading support, side sealing plates are vertically arranged at two ends of the loading support, and the supporting platform is horizontally embedded between the two side sealing plates. The invention has the beneficial effects that: drive the electron gun through five motors on the sputtering mechanism and adjust and remove directly over the target, guarantee that the electron gun can remove fast and carry out bombardment work to the target top, and when the electron gun shines the bombardment to the target, motor seven drives reciprocal upset work about the electron gun through the swing board, on the one hand, guarantee that the target is handled more completely by the electron gun bombardment, the regulation activity about driving the electron gun on hanging the platform is moved to motor five deuterogamy, it is more complete to guarantee that the electron gun covers the target bombardment area, on the other hand, very big improvement target surface composition by bombardment effluvium efficiency and the efficiency that the base plate was coated the membrane.)

1. The utility model provides a coating machine of adjustable tension which characterized in that: the device comprises a loading support (1), a top connection plate (2), a supporting platform (4) and a pump body (5), wherein the top connection plate (2) is horizontally arranged in the middle of the top of the loading support (1), side sealing plates (3) are vertically arranged at two ends of the loading support (1), the supporting platform (4) is horizontally embedded between the two side sealing plates (3), the pump body (5) is arranged below one end of the loading support (1), one end of the pump body (5) is respectively connected with the two side sealing plates (3) in a penetrating manner through an exhaust pipe (6), and a coating bin (7) is arranged inside the loading support (1);

wherein the bottom of the jacking plate (2) is horizontally provided with a hanging table (30), and the hanging table (30) is vertically hung with a sputtering mechanism (31);

one end of each of the two side sealing plates (3) is vertically provided with a clamping frame (8) with a hollow U-shaped structure, the two clamping frames (8) are directly and vertically sleeved with an end cover plate (9), and the bottom of the end cover plate (9) is provided with a sealing rubber gasket (10);

the middle parts of the two clamping frames (8) are sleeved with a first motor (11), one end of the first motor (11) is rotatably connected with a first gear (13), and two ends of the end cover plate (9) are respectively provided with a toothed belt (12) matched with the first gear (13);

a bottom inserting plate (14) is arranged at the bottom of one end of the film coating bin (7), a slot (15) matched with the sealing rubber gasket (10) is formed in the bottom inserting plate (14), and a plurality of conveying mechanisms are arranged at the bottom of the film coating bin (7) in parallel;

the conveying mechanism is composed of two motors II (16) which are arranged in parallel, a plurality of cylindrical rotating rollers (17) are rotatably connected above the motors II (16), a hydraulic oil cylinder (18) is arranged above the motors II (16), a loading frame (19) is connected above the hydraulic oil cylinder (18) in an extending mode through a hydraulic shaft (26), a motor III (20) is arranged above two ends of the loading frame (19), a crawler belt (21) is rotatably connected on the motor III (20), a movable plate (22) is vertically arranged above the crawler belt (21), a motor IV (23) is vertically arranged on the inner wall of the movable plate (22), and two clamping jaws (23) are rotatably connected at one end of the motor IV (23);

two side buckling plates (24) are arranged at two ends of the bottom of the hydraulic oil cylinder (18), and rolling wheels (25) are arranged at the bottoms of the inner sides of the side buckling plates (24);

concave rolling grooves I (1601) matched with the rolling wheels (25) are formed above two ends of the motor II (16);

a plurality of transverse supporting rods (28) are arranged on the supporting platform (4) in parallel, and hollow falling grooves (29) are formed between every two transverse supporting rods (28);

a hollow rolling groove II (32) is formed in the hanging table (30), an inner carrier plate (34) is vertically arranged at the top of the sputtering mechanism (31), a motor V (33) is arranged on the inner wall of the inner carrier plate (34), a rail plate (35) is vertically arranged on the outer wall of the inner carrier plate (34), a motor VI (36) is sleeved on the rail plate (35), one end of the motor VI (36) is fixedly connected with an outer carrier plate (37) through a bolt, motor VII (38) are arranged at two ends of the bottom of the outer carrier plate (37), a swing plate (39) is rotatably connected between the two motor VII (38), and an electron gun (40) is sleeved in the swing plate (39);

wherein the motor five (33) is connected to the inside of the rolling groove two (32).

2. A tension-adjustable film coating machine as claimed in claim 1, characterized in that the toothed belt (12) is provided with a plurality of hobbing teeth at equal intervals, one end of the first gear (13) is connected to the toothed belt (12), and the first motor (11) is movably connected with the end cover plate (9) through the first gear (13) matching with the toothed belt (12).

3. A tension adjustable coater according to claim 1, characterized in that the bottom of the clamping frame (8) is connected to the inside of the slot (15) through a sealing rubber gasket (10).

4. A coating machine with adjustable tension as claimed in claim 1, characterized in that several rolls (17) are distributed at equal intervals and several rolls (17) are arranged in parallel.

5. The coating machine with adjustable tension as claimed in claim 1, characterized in that the motor three (20) is movably connected with the movable plate (22) through a crawler belt (21), and both ends of the bottom of the movable plate (22) are connected to screw holes arranged on the crawler belt (21) through bolts.

6. A coating machine with adjustable tension as claimed in claim 1, characterized in that two clamping jaws (27) at one end of the motor four (23) are symmetrically arranged, and the clamping jaws (27) are of a V-shaped structure.

7. The coating machine with adjustable tension as claimed in claim 1, characterized in that the side pinch plates 24 at the two ends of the bottom of the hydraulic oil cylinder (18) are respectively connected to the roller slot I (1601) at the two ends of the motor II (16) through rolling wheels (25).

8. The coating machine with adjustable tension as claimed in claim 1, characterized in that the motor five (33) is movably connected with the sputtering mechanism (31) in the roller groove two (32) through a gear two, and two ends of the motor six (36) are respectively connected to two side walls of the rail plate (35) through a gear three.

9. The coating machine with adjustable tension as claimed in claim 1, characterized in that the sputtering mechanism (31) and the loading frame (19) are provided with infrared sensors, and the infrared sensors are in communication connection with a PLC controller in the jacking plate (2).

10. The coating machine with adjustable tension of claim 1, wherein the use method of the coating machine comprises the following steps:

the method comprises the following steps: the target material is placed on a plurality of transverse supporting rods (28) of the supporting platform (4), the substrate is placed between four motors (23) at two ends of the loading frame (19), a third motor (20) at two ends of the loading frame (19) drives the crawler belt (21) to roll, so that the fourth motor (23) is driven to move in a left-right adjusting mode, the working distance between clamping jaws (27) at two sides of the loading frame (19) is adjusted, and the two fourth motors (23) are respectively connected with two ends of the substrate in a grabbing mode through the clamping jaws (27);

step two: then, a first motor (11) drives the hobbing on a toothed belt (12) at the side part of the end cover plate (9) to roll through a first gear (13) to drive the end cover plate (9) to move downwards, a sealing rubber gasket (10) is inserted into the inserting groove (15) to seal the coating chamber (7), and a pump body (5) performs vacuum pumping treatment on the interior of the coating chamber (7) through an exhaust pipe (6);

step three: a fifth motor (33) on the sputtering mechanism (31) rolls in a second rolling groove (32) through a second gear to drive an electron gun (40) to adjust and move to the position right above the target material, a second motor (16) drives a hydraulic oil cylinder (18) and a substrate to move to the position below the target material through a rolling roller (17), the electron gun (40) irradiates and bombards the target material to sputter surface components of the target material in a radical or ion form, the escaped surface components of the target material fall from a plurality of falling grooves (29) which are arranged at equal intervals, after the linear downward motion meets the substrate in vacuum, the surface components are condensed and gathered into a thin film on the surface of the substrate, a sixth motor (36) on the sputtering mechanism (31) rolls on a rail plate (35) through a third gear to drive the electron gun to adjust up and down to adjust the working distance between the electron gun (40) and the target material, and in the process that the surface components of the target body escape and condense on the substrate, the second motor (16) drives the hydraulic oil cylinder (18) and the substrate to reciprocate back and forth through the rotating roller (17), so that the substrate is subjected to film coating treatment.

Technical Field

The invention relates to a film coating machine, in particular to a film coating machine with adjustable tension, and belongs to the technical field of application of protective film coating machines.

Background

With the rapid development of the living standard of people, the film plating machine is used more and more frequently in the field of industrial production, the film plating machine places a substrate to be plated in a vacuum environment, the high-energy particles accelerated by the irradiation of an electron gun bombard the surface of a target, after energy exchange, atoms of surface components on the target are separated from original lattices and escape, and the atoms move downwards in a straight line in the vacuum environment and are transferred to the surface of the substrate to be condensed into a film, so that the film plating work of the substrate is completed.

The existing film plating machine still has a plurality of defects when in use, the electron gun on the existing film plating machine has inaccurate bombarding position to the target material, slow bombarding efficiency and incomplete bombarded coverage area, which causes the efficiency of the substrate to be plated in the film plating machine, the electron gun on the film plating machine bombards the target body, the surface components of the target body escape and fall to the surface of the substrate for plating film coverage is incomplete, the coverage area is uneven, the existing film plating machine can only perform film plating work on the substrate with the same width, the adaptation range of the work is small, the transmission part on the film plating machine drives the substrate to move, the stability of the film plating work is poor, the surface components of the target material escape and fall to the substrate with low accuracy, when the flexible substrate is clamped and plated by the film plating machine, the tension when the flexible substrate is clamped and fixed cannot be flexibly adjusted, which causes the surface components of the target material to escape and fall to the flexible substrate with less amount, the staff is inconvenient to unload or change the base plate in the coating machine.

Disclosure of Invention

The invention aims to solve the problems that the bombardment position of an electron gun on the existing film plating machine to a target is not accurate, the bombardment efficiency is slow, the bombarded coverage area is not comprehensive, and the film plating efficiency of a substrate in the film plating machine is slow; an electron gun on the film coating machine bombards the target body, and components on the surface of the target body escape and fall and condense to the surface of the substrate to carry out film coating coverage, so that the coverage area is not comprehensive and uniform; the existing film plating machine can only carry out film plating work on the substrates with the same width, and the adaptive range of the work is small; the transmission part on the film plating machine drives the substrate to move, so that the stability of the coated substrate is poor, and the accuracy of the target material that surface components escape and fall on the substrate is low; when the coating machine is used for coating a flexible substrate in a clamping way, the tension of the flexible substrate in the clamping and fixing way cannot be flexibly adjusted, so that the surface components of the target material escape and fall onto the flexible substrate in a smaller amount; the problem that workers are inconvenient to unload or replace the substrate in the coating machine is solved, and the coating machine with adjustable tension is provided.

The purpose of the invention can be realized by the following technical scheme: a film plating machine with adjustable tension comprises a loading support, a top connection plate, a supporting platform and a pump body, wherein the top connection plate is horizontally arranged in the middle of the top of the loading support, side sealing plates are vertically arranged at two ends of the loading support, the supporting platform is horizontally embedded between the two side sealing plates, the pump body is arranged below one end of the loading support, one end of the pump body is respectively connected with the two side sealing plates in a penetrating mode through an exhaust pipe, and a film plating bin is arranged inside the loading support;

the bottom of the jacking plate is horizontally provided with a hanging table, and a sputtering mechanism is vertically hung on the hanging table;

one end of each side sealing plate is vertically provided with a clamping frame of a hollow U-shaped structure, the two clamping frames are directly and vertically sleeved with an end cover plate, and the bottom of the end cover plate is provided with a sealing rubber gasket;

the middle parts of the two clamping frames are sleeved with a first motor, one end of the first motor is rotatably connected with a first gear, and two ends of the end cover plate are provided with toothed belts matched with the first gear;

a bottom inserting plate is arranged at the bottom of one end of the coating bin, an inserting groove matched with the sealing rubber pad is formed in the bottom inserting plate, and a plurality of conveying mechanisms are arranged at the bottom of the coating bin in parallel;

the conveying mechanism is composed of two motors II which are arranged in parallel, a plurality of cylindrical rotating rollers are rotatably connected above the motors II, a hydraulic oil cylinder is arranged above the motors II, a loading frame is connected above the hydraulic oil cylinder in an extending mode through a hydraulic shaft, a motor III is arranged above two ends of the loading frame, a track is rotatably connected on the motor III, a movable plate is vertically arranged above the track, a motor IV is vertically arranged on the inner wall of the movable plate, and one end of the motor IV is rotatably connected with two clamping jaws;

two ends of the bottom of the hydraulic oil cylinder are provided with two side buckling plates, and the bottom of the inner side of each side buckling plate is provided with a rolling wheel;

an inwards concave rolling groove I matched with the rolling wheel is arranged above each of the two ends of the motor II;

a plurality of transverse supporting rods are arranged on the supporting platform in parallel, and hollow falling grooves are formed between every two transverse supporting rods;

the sputtering device is characterized in that a hollow rolling groove II is formed in the hanging table, an inner carrier plate is vertically arranged at the top of the sputtering mechanism, a motor V is arranged on the inner wall of the inner carrier plate, a rail plate is vertically arranged on the outer wall of the inner carrier plate, a motor VI is sleeved on the rail plate, one end of the motor VI is fixedly connected with an outer carrier plate through a bolt, motor VII is arranged at two ends of the bottom of the outer carrier plate, a rotary swing plate is rotatably connected between the two motor VII, and an electron gun is sleeved in the rotary swing plate;

and the motor five is connected to the inside of the rolling groove two.

The invention has further technical improvements that: the gear belt is provided with a plurality of hobbing teeth at equal intervals, one end of a gear is connected to the gear belt, and a motor is movably connected with the end cover plate through the gear matched with the gear belt.

The invention has further technical improvements that: the bottom of the clamping frame is connected to the inside of the slot through a sealing rubber mat, and the sealing rubber mat is connected to the inside of the slot and seals the coating bin.

The invention has further technical improvements that: the plurality of rotating rollers are distributed at equal intervals, are arranged in parallel and rotate to drive the hydraulic oil cylinder and the base plate.

The invention has further technical improvements that: the motor tee joint passes through track and fly leaf swing joint, and fly leaf bottom both ends all through bolted connection in the screw that sets up on the track.

The invention has further technical improvements that: two clamping jaws at four ends of the motor are symmetrically arranged and are of a V-shaped structure, the clamping jaws are driven to turn by the motor, the end part of the substrate is clamped, and the substrate is conveniently coated.

The invention has further technical improvements that: the side pinch plates at the two ends of the bottom of the hydraulic oil cylinder are respectively connected to the first rolling grooves at the two ends of the motor through rolling wheels, the two side pinch plates symmetrically arranged at the two ends of the bottom of the hydraulic oil cylinder are respectively connected to the first rolling grooves at the two sides of the motor through the rolling wheels to roll, and the hydraulic oil cylinder and the substrate are matched to move.

The invention has further technical improvements that: the motor five is movably connected with the sputtering mechanism in the rolling groove II through a gear II, two ends of the motor six are respectively connected to the side walls of two ends of the rail plate through a gear III, the motor six on the sputtering mechanism rolls on the rail plate through a gear III to drive the electron gun to move up and down, so that the working distance between the electron gun and the target material is adjusted, and the working height of the electron gun on the film plating machine for irradiating and bombarding the target materials with different thicknesses is ensured to be more suitable.

The invention has further technical improvements that: the sputtering mechanism and the loading frame are both provided with infrared sensors, the infrared sensors are in communication connection with the PLC in the jacking plate, the placement positions of the targets are detected through the infrared sensors, the sputtering mechanism and the substrate are controlled to move to be aligned with the targets through the PLC, and the working accuracy of the film coating machine is improved.

The invention has further technical improvements that: the using method of the film coating machine comprises the following steps:

the method comprises the following steps: the target material is placed on a plurality of transverse support rods of the supporting platform, the substrate is placed between the motors IV at the two ends of the loading frame, the motors III at the two ends of the loading frame drive the crawler belt to roll to drive the motors IV to move in a left-right adjusting mode, so that the working distance between the clamping jaws at the two sides of the loading frame is adjusted, and the two motors IV respectively grab and connect the two ends of the substrate through the clamping jaws;

step two: then, a first motor drives the hobbing on the toothed belt on the side part of the end cover plate to roll through a gear to drive the end cover plate to move downwards, a sealing rubber gasket is inserted into the slot to seal the coating chamber, and a pump body vacuumizes the interior of the coating chamber through an exhaust tube;

step three: a motor V on the sputtering mechanism rolls in the rolling groove II through a gear II to drive the electron gun to adjust and move to the position right above the target material, the motor II drives the hydraulic oil cylinder and the substrate to move below the target material through the rotating roller, the electron gun irradiates and bombards the target material to sputter the surface components of the target material to escape in the form of atomic groups or ions, the escaped surface components of the target material fall from a plurality of falling grooves arranged at equal intervals, after the straight line moves downwards in vacuum and meets a substrate, the film is condensed and gathered on the surface of the substrate, a motor six on a sputtering mechanism rolls on a rail plate through a gear three to drive an electron gun to adjust up and down to adjust the working distance between the electron gun and a target material, and in the process that the surface components of the target body escape and are condensed on the substrate, the second motor drives the hydraulic oil cylinder and the substrate to reciprocate back and forth through the rotating roller, so that the substrate is subjected to film coating treatment.

Compared with the prior art, the invention has the beneficial effects that:

1. the target material is placed on a plurality of transverse supporting rods of a supporting platform, the substrate is placed between four motors at two ends of a loading frame, the two motors four respectively grab two ends of the substrate through clamping jaws, then, the motor I drives hobbing teeth on a toothed belt at the side part of the end cover plate to roll through a gear to drive the end cover plate to move downwards, a sealing rubber gasket is inserted into a slot to seal a coating bin, a pump body vacuumizes the interior of the coating bin through an exhaust pipe, then, a motor V on a sputtering mechanism rolls in a rolling slot II through a gear to drive an electronic gun to adjust and move to the position right above the target material, the motor II drives a hydraulic oil cylinder and the substrate to move to the position below the target material through a rotating roller, the electronic gun irradiates the target material to bombard the surface component of the target material, the sputtered surface component of the target material escapes in a atomic group or ion form, and the escaped surface component of the target material falls from a plurality of falling slots, after rectilinear downward motion meets the base plate in the vacuum, condense into the film on the base plate surface, thereby carry out coating film treatment to the base plate, five motor drive electron guns through sputtering mechanism adjust and remove to the target directly over, guarantee that the electron gun can the high-speed migration and carry out bombardment work to the target top, and when the electron gun shines the bombardment to the target, motor seven drives electron gun through the swing board and reciprocates upset work about, on the one hand, guarantee that the target is handled more completely by the electron gun bombardment, the motor five regulation activity about driving the electron gun on hanging the platform is adjusted to the deuterogamy, guarantee that the electron gun covers more completely to target bombardment area, on the other hand, very big improvement target surface composition is by the efficiency of bombardment effusion and the efficiency that the base plate is coated with the membrane.

2. A motor VI on the sputtering mechanism rolls on the rail plate through a gear III to drive the electron gun to move up and down, so as to adjust the working distance between the electron gun and the target material, ensure that the working height of the electron gun on the film plating machine for irradiating and bombarding the target materials with different thicknesses is more suitable, and ensure the use flexibility; in the process that the surface components of the target body escape and condense on the substrate, the second motor drives the hydraulic oil cylinder and the substrate to reciprocate back and forth through the rotating roller, so that the components on the surface of the target body escape and fall to condense on the surface of the substrate, and the coating coverage is more uniform and comprehensive, and the coating quality is improved.

3. When the rotating roller drives the hydraulic oil cylinder to adjust and move forwards and backwards, the two side buckling plates symmetrically arranged at the two ends of the bottom of the hydraulic oil cylinder are connected to the first rolling grooves on the two sides of the motor through the rolling wheels to roll, so that the hydraulic oil cylinder and the base plate are matched to move.

4. The third motor at the two ends of the loading frame drives the caterpillar tracks to roll to drive the fourth motor to adjust the left and right adjusting movement, so that the working distance between the clamping jaws at the two sides of the loading frame is adjusted, the coating operation of substrates with different widths can be carried by the coating machine, after the clamping jaws clamp the two ends of the substrates respectively, the clamping jaws are driven by the caterpillar tracks to move left and right, the tension when the substrates are clamped and fixed is adjusted, the flexible substrates can be widened and the tension can be improved when the coating machine coats the flexible substrates, the surface components of the target are improved, the amount of the falling and condensation coverage of the substrates is increased, and the coating quality of the coating machine to the substrates is improved.

5. The hydraulic cylinder stretches out through driving the hydraulic shaft, can adjust the interval between base plate and the target of being bombarded in a flexible way to guarantee that the interval of co-operation of not co-altitude base plate and target is more suitable, and the motor two is through changeing the regulation activity about roller drive hydraulic cylinder and base plate, is convenient for change the base plate and unload work.

Drawings

In order to facilitate understanding for those skilled in the art, the present invention will be further described with reference to the accompanying drawings.

Fig. 1 is a schematic overall perspective structure of the present invention.

FIG. 2 is an enlarged view of the area A in FIG. 1 according to the present invention.

Fig. 3 is a top view of the motor of the present invention.

FIG. 4 is an enlarged view of the detail of the area B in FIG. 1 according to the present invention.

FIG. 5 is a front view of the connection between the hydraulic cylinder and the carrying frame.

Fig. 6 is a schematic diagram of a fourth structure of the motor of the present invention.

Fig. 7 is a schematic diagram of a supporting platform structure according to the present invention.

FIG. 8 is a schematic view of the top plate and the hanging platform of the present invention separated.

FIG. 9 is a schematic view of the connection between the hanging table and the sputtering mechanism of the present invention.

FIG. 10 is an enlarged view of the detail of the area C in FIG. 9 according to the present invention.

In the figure: 1. loading a bracket; 2. a jacking plate; 3. a side sealing plate; 4. supporting the platform; 5. a pump body; 6. an air exhaust pipe; 7. a film coating bin; 8. a clamping frame; 9. an end cover plate; 10. sealing the rubber gasket; 11. a first motor; 12. a toothed belt; 13. a first gear; 14. a bottom plug board; 15. a slot; 16. a second motor; 1601. rolling a first groove; 17. rotating the roller; 18. a hydraulic cylinder; 19. loading the frame; 20. a third motor; 21. a crawler belt; 22. a movable plate; 23. a fourth motor; 24. a side gusset plate; 25. a rolling wheel; 26. a hydraulic shaft; 27. a clamping jaw; 28. a transverse stay bar; 29. dropping the groove; 30. hanging a table; 31. a sputtering mechanism; 32. rolling a second groove; 33. a fifth motor; 34. an inner carrier plate; 35. a rail plate; 36. a sixth motor; 37. an outer carrier plate; 38. a seventh motor; 39. a rotary swing plate; 40. an electron gun.

Detailed Description

The technical solutions of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-10, a coating machine with adjustable tension comprises a loading support 1, a top connection plate 2, a supporting platform 4 and a pump body 5, wherein the top connection plate 2 is horizontally arranged in the middle of the top of the loading support 1, two ends of the loading support 1 are both vertically provided with side sealing plates 3, the supporting platform 4 is horizontally embedded between the two side sealing plates 3, the pump body 5 is arranged below one end of the loading support 1, one end of the pump body 5 is respectively connected with the two side sealing plates 3 in a penetrating manner through an exhaust pipe 6, and a coating bin 7 is arranged inside the loading support 1;

wherein, the bottom of the top connection plate 2 is horizontally provided with a hanging table 30, and a sputtering mechanism 31 is vertically hung on the hanging table 30;

one end of each of the two side sealing plates 3 is vertically provided with a clamping frame 8 with a hollow U-shaped structure, the two clamping frames 8 are directly vertically sleeved with an end cover plate 9, and the bottom of the end cover plate 9 is provided with a sealing rubber gasket 10;

the middle parts of the two clamping frames 8 are sleeved with a first motor 11, one end of the first motor 11 is rotatably connected with a first gear 13, and two ends of the end cover plate 9 are respectively provided with a toothed belt 12 matched with the first gear 13;

a bottom inserting plate 14 is arranged at the bottom of one end of the coating bin 7, the bottom inserting plate 14 is provided with a slot 15 matched with the sealing rubber pad 10, and a plurality of conveying mechanisms are arranged at the bottom of the coating bin 7 in parallel;

the conveying mechanism is two motors II 16 which are arranged in parallel, a plurality of cylindrical rotating rollers 17 are rotatably connected above the motors II 16, a hydraulic oil cylinder 18 is arranged above the motors II 16, a loading frame 19 is connected above the hydraulic oil cylinder 18 in an extending mode through a hydraulic shaft 26, motors III 20 are arranged above two ends of the loading frame 19, a crawler 21 is rotatably connected on the motors III 20, a movable plate 22 is vertically arranged above the crawler 21, a motor IV 23 is vertically arranged on the inner wall of the movable plate 22, and one end of the motor IV 23 is rotatably connected with two clamping jaws 23;

wherein, two side buckle plates 24 are arranged at two ends of the bottom of the hydraulic oil cylinder 18, and rolling wheels 25 are arranged at the bottom of the inner sides of the side buckle plates 24;

an inwards concave rolling groove 1601 matched with the rolling wheel 25 is arranged above the two ends of the motor II 16;

a plurality of transverse supporting rods 28 are arranged on the supporting platform 4 in parallel, and hollow falling grooves 29 are formed between every two transverse supporting rods 28;

the hanging table 30 is provided with a hollow rolling groove II 32, the top of the sputtering mechanism 31 is vertically provided with an inner carrier plate 34, the inner wall of the inner carrier plate 34 is provided with a motor V33, the outer wall of the inner carrier plate 34 is vertically provided with a rail plate 35, the rail plate 35 is sleeved with a motor VI 36, one end of the motor VI 36 is fixedly connected with an outer carrier plate 37 through bolts, two ends of the bottom of the outer carrier plate 37 are respectively provided with a motor VII 38, a rotary swing plate 39 is rotatably connected between the two motor VII 38, and an electron gun 40 is sleeved in the rotary swing plate 39;

wherein, the motor five 33 is connected to the inside of the rolling groove two 32.

A plurality of hobbing teeth are arranged on the toothed belt 12 at equal intervals, one end of a first gear 13 is connected to the toothed belt 12, and a first motor 11 is movably connected with the end cover plate 9 through the first gear 13 in a matching mode with the toothed belt 12.

The bottom of the clamping frame 8 is connected to the inside of the slot 15 through a sealing rubber gasket 10, and the sealing rubber gasket 10 is connected to the inside of the slot 15 and seals the coating bin 7.

The plurality of rotating rollers 17 are distributed at equal intervals, the plurality of rotating rollers 17 are arranged in parallel, and the plurality of rotating rollers 7 rotate to drive the hydraulic oil cylinder 18 and the base plate.

The third motor 20 is movably connected with the movable plate 22 through the caterpillar band 21, and two ends of the bottom of the movable plate 22 are connected to screw holes formed in the caterpillar band through bolts.

Two clamping jaws 27 at one end of the motor IV 23 are symmetrically arranged, the clamping jaws 27 are in a V-shaped structure, the clamping jaws 27 are driven to turn through the motor IV 23, the end part of the substrate is clamped, and the substrate is conveniently coated.

The side buckle plates at the two ends of the bottom of the hydraulic oil cylinder 18 are respectively connected to the rolling grooves 1601 at the two ends of the motor II 16 through the rolling wheels 25, the two side buckle plates 24 symmetrically arranged at the two ends of the bottom of the hydraulic oil cylinder 18 are respectively connected to the rolling grooves 1601 at the two sides of the motor II 16 through the rolling wheels 25 to roll, so that the hydraulic oil cylinder 18 and the substrate move in a matching manner, on one hand, the substrate is guaranteed to be adjusted and moved more stably and firmly, the phenomenon that the substrate shakes or slides off from the clamping jaw 27 when moving is avoided, on the other hand, the accuracy of the surface component of the target material escaping and condensing on the substrate is greatly.

The fifth motor 33 is movably connected with the sputtering mechanism 31 in the second rolling groove 32 through a second gear, two ends of the sixth motor 36 are respectively connected to the side walls of two ends of the rail plate 35 through a third gear, and the sixth motor 36 on the sputtering mechanism 31 rolls on the rail plate 35 through a third gear to drive the electron gun to adjust up and down, so that the working distance between the electron gun 40 and the target material is adjusted, and the working height of the electron gun 40 on the film coating machine for irradiating and bombarding the target materials with different thicknesses is ensured to be more suitable.

The sputtering mechanism 31 and the loading frame 19 are both provided with infrared sensors, the infrared sensors are in communication connection with the PLC in the jacking plate 2, the placement positions of the targets are detected through the infrared sensors with the models of OS137-3, the PLC with the model of CPM1A controls the sputtering mechanism 31 and the substrate to move and align the targets, and the working accuracy of the film plating machine is improved.

The using method of the film coating machine comprises the following steps:

the method comprises the following steps: the target material is placed on a plurality of transverse supporting rods 28 of the supporting platform 4, the substrate is placed between the motors four 23 at the two ends of the loading frame 19, the motors three 20 at the two ends of the loading frame 19 drive the caterpillar tracks 21 to roll, so that the motors four 23 are driven to adjust left and right, the working distance between the clamping jaws 27 at the two sides of the loading frame 19 is adjusted, and the two motors four 23 are respectively clamped at the two ends of the substrate through the clamping jaws 27;

step two: then, a first motor 11 drives the hobbing on a toothed belt 12 on the side part of the end cover plate 9 to roll through a first gear 13 so as to drive the end cover plate 9 to move downwards, a sealing rubber gasket 10 is inserted into a slot 15 to seal the coating chamber 7, and the pump body 5 vacuumizes the inside of the coating chamber 7 through an exhaust tube 6;

step three: a fifth motor 33 on the sputtering mechanism 31 rolls in a second rolling groove 32 through a second gear to drive the electron gun 40 to adjust and move to the position right above the target material, a second motor 16 drives the hydraulic oil cylinder 18 and the substrate to move to the position below the target material through a second rolling roller 17, the electron gun irradiates and bombards the target material to sputter and escape surface components of the target material in the form of atomic groups or ions, the escaped surface components of the target material fall from a plurality of falling grooves 29 which are arranged at equal intervals, after the linear downward motion meets the substrate in vacuum, the surface of the substrate is condensed and gathered into a thin film, a sixth motor 36 on the sputtering mechanism 31 rolls on a rail plate 35 through a third gear to drive the electron gun to adjust up and down to adjust the working distance between the electron gun 40 and the target material, and in the process that the surface components of the target body escape and condense on the substrate, the second motor 16 drives the hydraulic oil cylinder 18 and the substrate to reciprocate back and forth, thereby carrying out film coating treatment on the substrate.

When in use, a target material is placed on a plurality of transverse supporting rods 28 of the supporting platform 4, a substrate is placed between four motors 23 at two ends of a loading frame 19, the two motors 23 respectively grab two ends of the substrate through clamping jaws 27, then, a motor 11 drives hobbing on a toothed belt 12 at the side part of an end cover plate 9 to roll through a gear 13 to drive the end cover plate 9 to move downwards, a sealing rubber gasket 10 is inserted into a slot 15 to seal a coating cabin 7, a pump body 5 carries out vacuum pumping treatment on the interior of the coating cabin 7 through an exhaust tube 6, then, a motor five 33 on a sputtering mechanism 31 rolls in a hobbing slot two 32 through a gear two to drive an electron gun 40 to adjust and move to the position right above the target material, and a motor two 16 drives a hydraulic oil cylinder 18 and the substrate to move to the position below the target material through a rotating roller 17, the electron gun irradiates and bombards the target material, and the surface components of the target material are sputtered and escaped in a radical or ion form, the escaped target surface components fall from a plurality of falling grooves 29 which are arranged at equal intervals, and after the target surface components move downwards in a straight line in vacuum and meet a substrate, a film is condensed and gathered on the surface of the substrate, so as to carry out film coating treatment on the substrate, the five motors 33 on the sputtering mechanism 31 drive the electron gun 40 to adjust and move to the position right above the target material, the electron gun 40 can be ensured to move to the position above the target material rapidly to carry out bombardment operation, when the electron gun 40 irradiates and bombards the target material, the motor seven 38 drives the electron gun 40 to turn over left and right in a reciprocating manner through the swinging plate 39, on one hand, the target material is guaranteed to be bombarded and treated more completely by the electron gun 40, and then the motor five 33 is matched to drive the electron gun 40 to adjust left and right on the hanging table 30, so that the electron gun 40 is guaranteed to cover the bombarding area of the target material more completely, and on the other hand, the efficiency of bombarding and escaping components on the surface of the target material and the efficiency of coating the substrate are greatly improved;

a sixth motor 36 on the sputtering mechanism 31 rolls on the rail plate 35 through a third gear to drive the electron gun to adjust up and down, so as to adjust the working distance between the electron gun 40 and the target material, ensure that the working height of the electron gun 40 on the film plating machine for irradiating and bombarding the target materials with different thicknesses is more appropriate, and ensure the use flexibility; in the process that the surface components of the target body escape and condense on the substrate, the second motor 16 drives the hydraulic oil cylinder 18 and the substrate to reciprocate back and forth through the rotating roller 17, so that the components on the surface of the target body escape and fall to condense on the surface of the substrate, and the coating coverage is more uniform and comprehensive, and the coating quality is improved;

when the rotating roller 17 drives the hydraulic oil cylinder 18 to adjust and move forwards and backwards, two side buckling plates 24 symmetrically arranged at two ends of the bottom of the hydraulic oil cylinder 18 are respectively connected to the rolling grooves 1601 at two sides of the motor II 16 through rolling wheels 25 to roll to match with the hydraulic oil cylinder 18 and the substrate to move, so that on one hand, the substrate is ensured to be adjusted and moved more stably and firmly, the substrate is prevented from shaking or sliding off from the clamping jaws 27 during moving, and on the other hand, the accuracy of the surface components of the target material escaping and falling onto the substrate is greatly improved;

the third motor 20 at the two ends of the loading frame 19 drives the caterpillar track 21 to roll to drive the fourth motor 23 to perform left-right adjustment movement, so that the working distance between the clamping jaws 27 at the two sides of the loading frame 19 is adjusted, the film coating machine can load substrates with different widths to perform film coating work, and after the clamping jaws 27 clamp the two ends of the substrates respectively, the caterpillar track 21 drives the clamping jaws 27 to move left and right, the tension when the substrates are clamped and fixed is adjusted, the film coating machine can be ensured to widen the flexible substrates and improve the tension when the film coating machine coats the flexible substrates, the amount of falling, condensing and covering of surface components of a target on the substrates is increased, and the film coating quality of the film coating machine on the substrates is improved;

the hydraulic oil cylinder 18 can flexibly adjust the distance between the substrate and the bombarded target material by driving the hydraulic shaft 26 to extend out, so that the matching working distance between the substrate and the target material with different heights is more suitable, and the second motor 16 drives the hydraulic oil cylinder 18 and the substrate to move left and right through the rotating roller 17, so that the substrate can be conveniently replaced and unloaded.

The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise forms disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.