阅读说明：本技术 一种集成天线结构的2.5d多芯片封装结构及制造方法 (2.5D multi-chip packaging structure of integrated antenna structure and manufacturing method ) 是由 戴风伟 曹立强 于 2019-09-29 设计创作，主要内容包括：本发明公开了一种集成天线结构的2.5D多芯片封装结构,包括：衬底；多芯片塑封层,所述多芯片塑封层设置在所述衬底的上面；反射互连层,所述反射互连层设置在所述多芯片塑封层的上面；天线隔离层,所述天线隔离层设置在所述反射互连层的上面；天线阵列,所述天线阵列设置在所述天线隔离层的上表面；衬底背面重新布局布线层,所述衬底背面重新布局布线层设置在所述衬底的下面；外接焊球,所述外接焊球设置成与所述衬底背面重新布局布线层的外接焊盘电连接；以及钝化层,所述钝化层覆盖所述衬底背面重新布局布线层。(The invention discloses a 2.5D multi-chip packaging structure of an integrated antenna structure, which comprises: a substrate; the multi-chip plastic package layer is arranged on the substrate; a reflective interconnect layer disposed over the multi-chip molding layer; an antenna isolation layer disposed over the reflective interconnect layer; the antenna array is arranged on the upper surface of the antenna isolation layer; a substrate back-side re-layout wiring layer disposed below the substrate; the external welding ball is arranged to be electrically connected with the external welding pad of the redistribution layer on the back surface of the substrate; and a passivation layer covering the substrate back surface redistribution wiring layer.)

1. A 2.5D multi-chip package structure of an integrated antenna structure, comprising:

a substrate;

the multi-chip plastic package layer is arranged on the substrate;

a reflective interconnect layer disposed over the multi-chip molding layer;

an antenna isolation layer disposed over the reflective interconnect layer;

the antenna array is arranged on the upper surface of the antenna isolation layer;

a substrate back-side re-layout wiring layer disposed below the substrate;

the external welding ball is arranged to be electrically connected with the external welding pad of the redistribution layer on the back surface of the substrate; and

and the passivation layer covers the back surface of the substrate and redistributes the wiring layer.

2. The 2.5D multi-chip package structure of an integrated antenna structure of claim 1, wherein the substrate further comprises:

a silicon substrate;

a TSV conductive through hole penetrating through the silicon substrate; and

a first re-routed routing layer on the upper surface of the silicon substrate, the first re-routed routing layer being electrically connected to the substrate back-side re-routed routing layer through the TSV conductive vias, thereby routing electrical signals to the substrate back-side.

3. The 2.5D multi-chip package structure of an integrated antenna structure of claim 2, wherein the multi-chip molding layer further comprises:

the first plastic packaging layer covers the upper surface of the substrate;

a first copper pillar extending through the first molding layer and electrically connected to the first redistribution routing layer to direct electrical signals to a reflective interconnect layer and/or an antenna array;

one or more first chips disposed to be encapsulated by the first molding compound layer and electrically connected to the first re-layout wiring layer;

one or more second chips disposed to be encapsulated by the first molding compound layer and electrically connected to the first re-layout wiring layer; and

a bonding wire disposed to be covered by the first mold layer and electrically connecting the first chip or the second chip to the first re-layout wiring layer.

4. The 2.5D multi-chip package structure of the integrated antenna structure of claim 3, wherein the one or more first chips are radio frequency chips and the one or more second chips are control chips.

5. The 2.5D multi-chip package structure of an integrated antenna structure of claim 3, wherein a distance between the top of the first chip, the second chip, the bonding wire, and the substrate is less than a height of the first copper pillar.

6. The 2.5D multi-chip package structure of an integrated antenna structure of claim 3, wherein the reflective interconnect layer further comprises:

the dielectric layer is arranged on the upper surface of the multi-chip plastic package layer in a covering mode;

a second re-routed wiring layer electrically connected to the first copper pillar; and

and a reflective layer.

7. The 2.5D multi-chip package structure of integrated antenna structure of claim 6, wherein the antenna isolation layer further comprises a second molding layer and a second copper pillar. Wherein the second molding compound layer is arranged on the upper surface of the reflecting interconnection layer in a covering mode; the second copper pillar penetrates through the second plastic packaging layer and is electrically connected to the second re-layout wiring layer.

8. The 2.5D multi-chip package structure of integrated antenna structure of claim 7, in which the antenna array is electrically connected to the second copper pillar.

9. A method for manufacturing a 2.5D multi-chip packaging structure of an integrated antenna structure comprises the following steps:

forming a TSV conductive through hole and a first re-layout wiring layer on a first surface of a substrate;

forming a first copper pillar electrically connected to the first re-layout wiring layer;

assembling multiple chips;

forming a multi-chip plastic packaging layer and thinning the leaked first copper pillar;

forming a second re-layout wiring layer, a dielectric layer and an antenna reflection structure which are electrically connected with the first copper column;

forming a second copper pillar electrically connected to the second re-layout wiring layer;

forming an antenna isolation layer and thinning the leaked second copper pillar;

forming an antenna array electrically connected with the second copper pillar on the antenna isolation layer; and

and thinning the second surface of the substrate, realizing back exposure of the TSV conduction, and sequentially forming a passivation layer, a substrate back re-layout wiring layer electrically connected with the TSV conduction through hole, and an external solder ball arranged on an external bonding pad of the substrate back re-layout wiring layer on the passivation layer.

10. The method of claim 9, wherein the multi-chip assembly further comprises:

flip-chip bonding one or more first chips to the first re-layout routing layer;

positively mounting one or more second chips to the substrate; and

wire bonding electrically connects the second chip pad to the first re-layout wiring layer.

And the distance from the top of the lead to the substrate after the first chip, the second chip and the lead are bonded is less than the height of the first copper column.

Technical Field

The invention relates to the technical field of semiconductor packaging, in particular to a 2.5D multi-chip packaging structure of an integrated antenna structure, a manufacturing method and the like.

Background

At present, components in portable/mobile consumer electronic devices represented by mobile phones continuously require designers to provide miniaturized and low-cost product solutions. In fact, miniaturization and cost reduction are not contradictory, but complement each other.

With the continuous progress of communication technology, especially the continuous development of 5G wireless communication technology, antenna system in package (AiP) appeared, and this AiP technology inherits and develops the integration concept of microstrip antenna, multi-chip circuit module and tile type phased array structure. The improvement of the integration level of the silicon-based semiconductor process drives researchers to continuously and deeply explore the integration of a single antenna or a plurality of antennas on a chip package from the end of the 90 s, the applicable antennas comprise a printed antenna, a metal sheet antenna, an ultra-wideband antenna, a composite antenna and the like, and the antennas can be embedded in the same system packaging structure, so that the whole system package is suitable for being directly applied to wireless communication products without additionally designing an additional antenna. Its further rapid development mainly benefits from the enormous demand of the market.

Since the introduction of antennas into multi-chip system-in-Package requires heterogeneous integrated radio frequency front end modules, more complicated redesign, and also must meet the trend of light, thin, short and small consumer electronics products, the Antenna Package (Antenna in Package; AiP) based on system-in-Package has become the direction of research. In the existing packaging structure, the following problems need to be overcome, and a first packaging system needs to integrate a radio frequency chip, a digital control chip and other heterogeneous chips; secondly, the signal interference of the antenna to the chip is considered, and the signal receiving performance of the antenna is considered; the third need to consider the physical performance requirements of the packaging system such as heat dissipation; the fourth also takes into account the subsequent assembly requirements of the packaging system.

The antenna is led into a multi-chip system-in-package structure, and the problems of difficulty in integration of heterogeneous chips, high requirement on antenna signals, poor heat dissipation performance and the like in the conventional structure are solved. The invention provides a 2.5D multi-chip packaging structure of an integrated antenna structure and a manufacturing method, which at least partially overcome the problems.

Disclosure of Invention

Aiming at the problems of difficult integration of heterogeneous chips, high requirement on antenna signals, poor heat dissipation performance and the like existing in the conventional multi-chip system-in-package structure, the invention provides a 2.5D multi-chip package structure of an integrated antenna structure according to one embodiment of the invention, which comprises the following steps:

a substrate;

the multi-chip plastic package layer is arranged on the substrate;

a reflective interconnect layer disposed over the multi-chip molding layer;

an antenna isolation layer disposed over the reflective interconnect layer;

the antenna array is arranged on the upper surface of the antenna isolation layer;

a substrate back-side re-layout wiring layer disposed below the substrate;

the external welding ball is arranged to be electrically connected with the external welding pad of the redistribution layer on the back surface of the substrate; and

and the passivation layer covers the back surface of the substrate and redistributes the wiring layer.

In one embodiment of the present invention, the substrate further comprises:

a silicon substrate;

a TSV conductive through hole penetrating through the silicon substrate; and

a first re-layout wiring layer on the upper surface of the silicon substrate, the first re-layout wiring layer being electrically connected to the substrate back-side re-layout wiring layer through the TSV conductive vias.

In one embodiment of the present invention, the multi-chip molding layer further comprises:

the first plastic packaging layer covers the upper surface of the substrate;

a first copper pillar penetrating the first molding compound layer and electrically connected to the first redistribution routing layer;

a first chip disposed to be encapsulated by the first molding compound layer and electrically connected to the first re-layout wiring layer;

a second chip disposed to be encapsulated by the first molding compound layer and electrically connected to the first re-layout wiring layer; and

a bonding wire disposed to be covered by the first mold layer and electrically connecting the first chip or the second chip to the first re-layout wiring layer.

In an embodiment of the present invention, the first chip is a radio frequency chip, and the second chip is a control chip.

In one embodiment of the present invention, a distance between the first chip, the second chip, a top of the bonding wire, and the substrate is less than a height of the first copper pillar.

In one embodiment of the present invention, the reflective interconnect layer further comprises:

the dielectric layer is arranged on the upper surface of the multi-chip plastic package layer in a covering mode;

a second re-routed wiring layer electrically connected to the first copper pillar; and

and a reflective layer.

In one embodiment of the present invention, the antenna isolation layer further comprises a second molding layer and a second copper pillar. Wherein the second molding compound layer is arranged on the upper surface of the reflecting interconnection layer in a covering mode; the second copper pillar penetrates through the second plastic packaging layer and is electrically connected to the second re-layout wiring layer.

In one embodiment of the invention, the antenna array is electrically connected to the second copper pillar.

According to another embodiment of the present invention, there is provided a method of manufacturing a 2.5D multi-chip package structure of an integrated antenna structure, including:

forming a TSV conductive through hole and a first re-layout wiring layer on a first surface of a substrate;

forming a first copper pillar electrically connected to the first re-layout wiring layer;

assembling multiple chips;

forming a multi-chip plastic packaging layer and thinning the leaked first copper pillar;

forming a second re-layout wiring layer, a dielectric layer and an antenna reflection structure which are electrically connected with the first copper column;

forming a second copper pillar electrically connected to the second re-layout wiring layer;

forming an antenna isolation layer and thinning the leaked second copper pillar;

forming an antenna array electrically connected with the second copper pillar on the antenna isolation layer; and

and thinning the second surface of the substrate, realizing back exposure of the TSV conduction, and sequentially forming a passivation layer, a substrate back re-layout wiring layer electrically connected with the TSV conduction through hole, and an external solder ball arranged on an external bonding pad of the substrate back re-layout wiring layer on the passivation layer.

In another embodiment of the present invention, the multi-chip assembly further comprises:

flip chip bonding a first chip to the first re-layout wiring layer;

positively mounting a second chip to the substrate; and

wire bonding electrically connects the second chip pad to the first re-layout wiring layer.

And the distance from the top of the lead to the substrate after the first chip, the second chip and the lead are bonded is less than the height of the first copper column.

The invention provides a 2.5D multi-chip packaging structure of an integrated antenna structure and a manufacturing method thereof.A switching plate with TSV is adopted to realize high-density integration of heterogeneous chips, then a plastic package wafer is reconstructed and combined with a large-size conductive copper column technology, a reflecting layer is arranged on the upper layer of the chip to overcome signal interference of an antenna to the chip, an antenna array structure is formed on the top layer, and finally an interconnection circuit and an external welding ball are formed on the back surface of the switching plate with TSV. The antenna array structure is electrically connected with the multiple chips and the external solder balls through the re-layout wiring layer in the packaging structure. The 2.5D multi-chip packaging structure based on the integrated antenna structure and the manufacturing method thereof have the advantages that 1) the whole packaging structure has the characteristics of thinness, miniaturization and high-density integration; 2) the integration of various heterogeneous chips can be realized, including heterogeneous radio frequency chips and digital control chips; 3) the assembly mode of the chip in the packaging structure is flexible, and FC, WB or both FC and WB can be adopted; 4) the TSVs of the package substrate (interposer) can be used for both interconnection to the substrate and heat dissipation.

Drawings

To further clarify the above and other advantages and features of embodiments of the present invention, a more particular description of embodiments of the invention will be rendered by reference to the appended drawings. It is appreciated that these drawings depict only typical embodiments of the invention and are therefore not to be considered limiting of its scope. In the drawings, the same or corresponding parts will be denoted by the same or similar reference numerals for clarity.

Fig. 1 illustrates a cross-sectional view of a 2.5D multi-chip package structure 100 of an integrated antenna structure according to an embodiment of the invention.

Fig. 2A-2I illustrate cross-sectional projection views of a process for forming such a 2.5D multi-chip package structure 100 of an integrated antenna structure according to one embodiment of the present invention.

Fig. 3 illustrates a flow diagram of a 2.5D multi-chip package structure 100 for forming such an integrated antenna structure according to one embodiment of the present invention.

Detailed Description

In the following description, the invention is described with reference to various embodiments. One skilled in the relevant art will recognize, however, that the embodiments may be practiced without one or more of the specific details, or with other alternative and/or additional methods, materials, or components. In other instances, well-known structures, materials, or operations are not shown or described in detail to avoid obscuring aspects of embodiments of the invention. Similarly, for purposes of explanation, specific numbers, materials and configurations are set forth in order to provide a thorough understanding of the embodiments of the invention. However, the invention may be practiced without specific details. Further, it should be understood that the embodiments shown in the figures are illustrative representations and are not necessarily drawn to scale.

Reference in the specification to "one embodiment" or "the embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the invention. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment.

It should be noted that, in the embodiments of the present invention, the process steps are described in a specific order, however, this is only for convenience of distinguishing the steps, and the order of the steps is not limited, and in different embodiments of the present invention, the order of the steps may be adjusted according to the adjustment of the process.

The invention provides a 2.5D multi-chip packaging structure of an integrated antenna structure and a manufacturing method thereof.A switching plate with TSV is adopted to realize high-density integration of heterogeneous chips, then a plastic package wafer is reconstructed and combined with a large-size conductive copper column technology, a reflecting layer is arranged on the upper layer of the chip to overcome signal interference of an antenna to the chip, an antenna array structure is formed on the top layer, and finally an interconnection circuit and an external welding ball are formed on the back surface of the switching plate with TSV. The antenna array structure is electrically connected with the multiple chips and the external solder balls through the re-layout wiring layer in the packaging structure. The 2.5D multi-chip packaging structure based on the integrated antenna structure and the manufacturing method thereof have the advantages that 1) the whole packaging structure has the characteristics of thinness, miniaturization and high-density integration; 2) the integration of various heterogeneous chips can be realized, including heterogeneous radio frequency chips and digital control chips; 3) the assembly mode of the chip in the packaging structure is flexible, and FC, WB or both FC and WB can be adopted; 4) the TSVs of the package substrate (interposer) can be used for both interconnection to the substrate and heat dissipation.

A 2.5D multi-chip package structure of an integrated antenna structure according to an embodiment of the present invention is described in detail below with reference to fig. 1. Fig. 1 illustrates a cross-sectional view of a 2.5D multi-chip package structure 100 of an integrated antenna structure according to an embodiment of the invention. As shown in fig. 1, the 2.5D multi-chip package structure 100 of the integrated antenna structure further includes a substrate 110, a multi-chip molding layer 120, a reflective interconnection layer 130, an antenna isolation layer 140, an antenna array 150, a substrate backside RDL160, external solder balls 170, and a passivation layer 180.

The substrate 110 further includes a silicon substrate 111, a conductive Through Silicon Via (TSV)112, and a first re-layout wiring layer 113. In one embodiment of the present invention, the silicon substrate 111 is a passive silicon substrate, a conductive Through Silicon Via (TSV)112 is disposed at an inner determined position of the silicon substrate 111 and penetrates the silicon substrate 111 from an upper surface to a lower surface, and a first re-layout wiring layer 113 is disposed at the upper surface of the silicon substrate 111 and electrically connected to the conductive TSV (TSV) 112. In one embodiment of the present invention, the first re-layout wiring layer 113 may be a single layer or a plurality of layers.

The multi-chip molding compound layer 120 is disposed above the substrate 110, and further includes a first molding compound layer 121, a first large-sized copper pillar 122, a first chip 123, a second chip 124, and a bonding wire 125, wherein the first large-sized copper pillar 122 penetrates through the first molding compound layer 121, and has a height greater than a distance from tops of the first chip 123, the second chip 124, and the bonding wire 125 to an upper surface of the substrate 110. In an embodiment of the invention, the first molding compound layer 121 covers the upper surface of the substrate 110, the first large-sized copper pillar 122 is electrically connected to the first redistribution wiring layer 113 disposed on the upper surface of the substrate 110, and the first chip 123 and the second chip 124 are covered by the first molding compound layer 121 and are electrically connected to the first redistribution wiring layer 113. In another embodiment of the present invention, the first chip 123 and the second chip 124 are heterogeneous chips, for example, the first chip 123 is an rf chip, and the second chip 124 is a digital control chip. In one embodiment of the present invention, the first chip 123 is flip-chip mounted on the corresponding pad of the first re-laid wiring layer 113, and the second chip 124 is mounted over the upper surface of the substrate 110 by a front-mount pad, and is electrically connected to the first re-laid wiring layer 113 at bonding wires 125 formed by wire bonding. The first chip 123 and the second chip 124 are electrically and/or signal interconnected with the first large-sized copper pillar 122 and the conductive Through Silicon Via (TSV)112 through the first layout wiring layer 113, respectively.

The reflective interconnection layer 130 is disposed above the multi-chip molding compound layer 120, and further includes a dielectric layer 131, a second re-layout wiring layer 132, and a reflective layer 133. In an embodiment of the present invention, the dielectric layer 131 is a material layer with electrical insulation performance, such as PI, PCB, prepreg/prepreg, etc., the second re-layout wiring layer 132 may be a single-layer or multi-layer conductive layer similar to the first re-layout wiring layer 113, and the reflective layer 133 is used to shield and protect signals of the antenna array 150 to prevent interference of the antenna signals to the chip. Wherein the second re-layout wiring layer 132 enables electrical and/or signal interconnection with the first layout wiring layer 113 through the first large-sized copper pillar 122.

The antenna isolation layer 140 is disposed over the reflective interconnect layer 130, and further includes a second molding layer 141 and a second large-sized copper pillar 142. The second molding layer 141 covers the upper surface of the reflective interconnection layer 130, and the second large-sized copper pillar 142 is electrically connected to the second re-layout wiring layer 132.

The antenna array 150 is disposed above the antenna isolation layer 140, and is electrically connected to the second large-sized copper pillar 142, which is electrically or signal interconnected to the multiple chips through the second large-sized conductive copper pillar 142, the second re-layout wiring layer 132, the first large-sized copper pillar 122, and the first re-layout wiring layer 113.

A substrate backside RDL160 is disposed on a lower surface of the substrate 110 and electrically interconnects conductive through-silicon vias (TSVs). The substrate backside RDL160 may be a single-layer or multi-layer wiring layer, similar to the first re-layout wiring layer 113 and the second re-layout wiring layer 132.

The external solder balls 170 are disposed on the external pads of the substrate backside RDL160 and may be formed by ball-mounting, electroplating, or the like. The external solder balls 170 are used for interconnection of the package structure with an external system.

The passivation layer 180 covers the lower surface of the substrate 110 and the substrate backside RDL160 for insulation protection.

The process of forming the 2.5D multi-chip package structure 100 of the integrated antenna structure is described in detail below with reference to fig. 2A-2I and 3. Fig. 2A-2I illustrate cross-sectional projection views of a process for forming such a 2.5D multi-chip package structure 100 of an integrated antenna structure according to one embodiment of the present invention; fig. 3 illustrates a flow diagram of a 2.5D multi-chip package structure 100 for forming such an integrated antenna structure according to one embodiment of the present invention.

First, at step 301, as shown in fig. 2A, a TSV conductive via 202 and a first RDL203 are formed on a substrate 201. In an embodiment of the invention, the substrate 201 is a silicon substrate, the TSV conductive via 202 is formed through processes of high aspect ratio etching, conductive filling and the like, and the first RDL203 electrically connected to the TSV conductive via 202 is formed through patterned electroplating. In one embodiment of the present invention, the first RDL203 may be a single layer or multiple layers, and the material of the first RDL203 may be a metal material such as copper, tungsten, aluminum, etc. depending on the design. In yet another embodiment of the present invention, the outermost layer of the first RDL203 further includes chip pads and copper pillar pads (not shown in the figures). In another embodiment of the present invention, a specific forming method of the TSV conductive via 202 adopts processes including high aspect ratio TSV etching based on a doctor's process, plating seed layer deposition, conductive via sidewall barrier layer deposition, conductive copper pillar plating, removing the plating seed layer, and corresponding photolithography; the first RDL203 is formed by plating seed layer deposition, photolithography to form a plating mask, plating, photoresist removal, and removal of excess plating seed layer.

Next, at step 302, as shown in fig. 2B, a first large-sized copper pillar 204 electrically connected to the first RDL is formed. In an embodiment of the present invention, the first large-sized copper pillar 204 is formed by one or more patterned electroplating processes, which are similar to the above-mentioned methods and will not be described herein again.

Then, in step 303, as shown in fig. 2C, a chip assembly is performed on the substrate 201 with the first RDL203 and the first large-sized copper pillar 204 already formed, wherein the distance from the highest point of the chip and the bonding wire to the substrate after the assembly is smaller than the first large-sized copper pillar 204. In one embodiment of the present invention, the first chip 205 is directly flip-chip bonded to the corresponding chip pad of the first RDL203, and the second chip 206 is first fixed to the upper surface of the substrate 201 by a normal mount, and then the bonding wire 207 is formed by a wire bonding process, so as to electrically connect the second chip 206 and the first RDL 203.

Next, at step 304, as shown in fig. 2D, the multi-chip molding compound layer 208 is formed and thinned out of the first large-sized copper pillar 204.

Then, in step 305, as shown in fig. 2E, a second RDL 209 electrically connected to the first large-sized copper pillar 204, a dielectric layer 210, and an antenna reflection structure 211 are formed. The second RDL 209 may be a single layer or multiple layers, and is formed by a process such as patterned electroplating, CVD deposition, and the like, and may be made of a metal material such as copper, aluminum, and the like; dielectric layer 210 is used to insulate single layer RDL conductive lines or multilayer RDLs; the antenna reflection structure 211 plays a role in protecting signals of a lower chip, and when the antenna/antenna array works, interference of antenna signals to the chip can be effectively prevented, so that the antenna reflection structure 211 basically realizes a reflection shielding effect on the lower structure under the matching of the antenna reflection structure 211 and the second RDL 209.

Next, at step 306, as shown in fig. 2F, a second large-sized copper pillar 212 electrically connected to the second RDL 209 is formed. The second large-sized copper pillar 212 may be formed by single or multiple plating, similar to the first large-sized copper pillar 204.

Then, in step 307, as shown in fig. 2G, an antenna isolation layer 213 is formed, and the antenna isolation layer 213 is thinned to leak the top surface of the second large-sized copper pillar 212.

Next, in step 308, as shown in fig. 2H, an antenna array 214 electrically connected to the second large-sized copper pillar 212 is formed on the upper surface of the antenna isolation layer 213. The antenna array 214 may be disposed on the upper surface of the antenna isolation layer 213 through a patch, or may be directly formed on the upper surface of the antenna isolation layer 213 through a plating process or the like. The antenna array 214 may be a printed antenna, a sheet metal antenna, an ultra wideband antenna, a composite antenna, or the like.

Finally, in step 309, as shown in fig. 2I, the back surface of the substrate 201 is thinned to expose the back surface of the TSV conductive via 202, and a passivation layer 215, a third RDL 216 electrically connected to the TSV conductive via 202, and an external solder ball 217 disposed on an external pad of the third RDL 216 are sequentially formed on the back surface of the substrate 201. In one embodiment of the present invention, the passivation layer 215 may be an insulating material such as PI or a cured sheet; the third RDL 216 is formed in a similar manner as the first and second RDLs, typically as a single or multilayer copper interconnect layer; the external solder ball 217 is formed by ball-planting, electroplating, and the like, and may be a lead-free solder ball or a conductive copper pillar.

The 2.5D multi-chip packaging structure and the manufacturing method based on the integrated antenna structure provided by the invention have the advantages that high-density integration of heterogeneous chips is realized by adopting the adapter plate with the TSV, then the plastic package wafer reconstruction is combined with a large-size conductive copper column technology, the upper layer of the chip is provided with the reflecting layer to overcome the signal interference of the antenna to the chip, the top layer is provided with the antenna array structure, and finally the back surface of the adapter plate with the TSV is provided with the interconnection circuit and the external solder balls. The antenna array structure is electrically connected with the multiple chips and the external solder balls through the re-layout wiring layer in the packaging structure. The 2.5D multi-chip packaging structure based on the integrated antenna structure and the manufacturing method thereof have the advantages that 1) the whole packaging structure has the characteristics of thinness, miniaturization and high-density integration; 2) the integration of various heterogeneous chips can be realized, including heterogeneous radio frequency chips and digital control chips; 3) the assembly mode of the chip in the packaging structure is flexible, and FC, WB or both FC and WB can be adopted; 4) the TSVs of the package substrate (interposer) can be used for both interconnection to the substrate and heat dissipation.

While various embodiments of the present invention have been described above, it should be understood that they have been presented by way of example only, and not limitation. It will be apparent to persons skilled in the relevant art that various combinations, modifications, and changes can be made thereto without departing from the spirit and scope of the invention. Thus, the breadth and scope of the present invention disclosed herein should not be limited by any of the above-described exemplary embodiments, but should be defined only in accordance with the following claims and their equivalents.