阅读说明：本技术 一种真空镀膜自动生产线的真空镀膜装置 (Vacuum coating device of vacuum coating automatic production line ) 是由 王孟良 陈春奇 于 2020-07-10 设计创作，主要内容包括：本发明提供一种真空镀膜自动生产线的真空镀膜装置,包括真空仓、固定杆和固定面板,固定杆位于真空仓左右两侧,且固定杆与真空仓固定连接,并且固定面板位于固定杆左右两侧,同时固定杆与固定面板固定连接,真空仓内部设有摄像头,且摄像头与真空仓固定安装。该种真空镀膜自动生产线的真空镀膜装置结构稳定,使本装置在实际使用时,受热均匀,粘附性较强,不会出现脱落的现象,使物体能全面积的镀膜,另外真空镀膜自动生产线的真空镀膜装置内部的电子枪结构增加,且可调控性强,同时真空镀膜装置体积缩小,优化了真空镀膜装置内部设备,方便真空镀膜装置内部的清理和维修,使得真空镀膜装置的寿命增强,维修方便,可实用性高。(The invention provides a vacuum coating device of an automatic vacuum coating production line, which comprises a vacuum bin, fixing rods and fixing panels, wherein the fixing rods are positioned on the left side and the right side of the vacuum bin and are fixedly connected with the vacuum bin, the fixing panels are positioned on the left side and the right side of the fixing rods, the fixing rods are fixedly connected with the fixing panels, a camera is arranged in the vacuum bin, and the camera is fixedly installed with the vacuum bin. This kind of vacuum coating device of vacuum coating automatic production line stable in structure makes this device when in-service use, and it is even to be heated, and the adhesion is stronger, the phenomenon that can not appear droing, make the coating film of object ability full area, the inside electron gun structure of vacuum coating device of vacuum coating automatic production line increases in addition, and can regulate and control the nature strong, vacuum coating device volume reduces simultaneously, has optimized vacuum coating device internal plant, makes things convenient for inside clearance and the maintenance of vacuum coating device, makes the life-span reinforcing of vacuum coating device, and easy maintenance, but the practicality is high.)

1. A vacuum coating device of a vacuum coating automatic production line comprises a vacuum chamber (1), a fixed rod (2) and a fixed panel (3), and is characterized in that the fixed rod (2) is positioned at the left side and the right side of the vacuum chamber (1), the fixed rod (2) is fixedly connected with the vacuum chamber (1), the fixed panel (3) is positioned at the left side and the right side of the fixed rod (2), the fixed rod (2) is fixedly connected with the fixed panel (3), a camera (101) is arranged inside the vacuum chamber (1), the camera (101) is fixedly installed with the vacuum chamber (1), a heating plate (102) is arranged inside the vacuum chamber (1), the heating plate (102) is fixedly connected with the vacuum chamber (1), a workbench (103) is arranged on the inner side of the heating plate (102), the heating plate (102) is fixedly installed with the workbench (103), an electronic gun (104) is arranged inside the vacuum chamber (1), the electronic gun (104) is fixedly connected with the vacuum bin (1), a spring (1041) is arranged inside the electronic gun (104), the spring (1041) and the electronic gun (104) are movably mounted, a regulating and controlling plate (1042) is arranged on the surface of the electronic gun (104), the regulating and controlling plate (1042) and the electronic gun (104) are movably mounted, a gun head (1043) is arranged at the top of the electronic gun (104), the gun head (1043) and the electronic gun (104) are fixedly mounted, a shock-absorbing panel (4) is arranged at the bottom of the vacuum bin (1), the shock-absorbing panel (4) is fixedly connected with the vacuum bin (1), a handle (5) is arranged on the surface of the vacuum bin (1), the handle (5) is fixedly connected with the vacuum bin (1), a transparent window (6) is arranged on the surface of the vacuum bin (1), the transparent window (6) is fixedly mounted with the vacuum bin (1), a control box (7) is arranged on the left side of the vacuum bin (1), and control box (7) and vacuum storehouse (1) fixed connection, vacuum storehouse (1) back is equipped with vacuum machine (8), and vacuum machine (8) and vacuum storehouse (1) fixed connection, vacuum machine (8) inside is equipped with back force spring (801), and back force spring (801) and vacuum machine (8) fixed connection, vacuum machine (8) left side is equipped with vacuum pump (802), and vacuum pump (802) and vacuum machine (8) fixed connection, vacuum machine (8) bottom is equipped with base (803), and base (803) and vacuum machine (8) fixed mounting.

2. The vacuum coating device of the automatic vacuum coating production line according to claim 1, wherein the vacuum chamber (1) is cylindrical, and a transparent window (6) with a diameter of 1 meter is formed on the surface of the vacuum chamber (1).

3. The vacuum coating apparatus of claim 1, wherein the fixing rod (2) and the fixing ring are disposed on both sides of the vacuum chamber (1), and the fixing rod (2) is fixed to the outer side of the fixing panel (3) by penetrating through the fixing ring.

4. The vacuum coating apparatus of claim 1, wherein 5 shock absorbing springs are disposed inside the shock absorbing panel (4), and the shock absorbing springs are arranged in an equidistant and transverse arrangement.

5. The vacuum coating apparatus of claim 1, wherein 2 cameras (101) are disposed inside the vacuum chamber (1), and the cameras (101) can rotate 360 °.

6. The vacuum coating apparatus of claim 1, wherein the vacuum machine (8) is internally provided with a ring-shaped return spring (801) and a connecting rod, and the ring-shaped return spring (801) surrounds the surface of the connecting rod and is movably mounted with the connecting rod.

7. The vacuum coating apparatus of claim 1, wherein 3 electron guns (104) are disposed in the vacuum chamber (1), and the surface of the electron guns (104) is provided with the concave-convex adjusting and controlling plate (1042).

Technical Field

The invention relates to the technical field of vacuum coating, in particular to a vacuum coating device of an automatic vacuum coating production line.

Background

The vacuum coating machine mainly refers to a coating machine which needs to be carried out under a higher vacuum degree, and specifically comprises various types including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like, and the main idea is divided into two types of evaporation and sputtering.

However, the vacuum coating device of the existing automatic vacuum coating production line has uneven heating in the coating process, poor adhesion and incomplete coating of objects, and in addition, an electron gun in the vacuum coating device of the automatic vacuum coating production line has a single structure and poor controllability.

Therefore, there is a need for upgrading and retrofitting a vacuum coating apparatus of an existing vacuum coating automatic production line to overcome existing problems and deficiencies.

Disclosure of Invention

The invention aims to provide a vacuum coating device of an automatic vacuum coating production line, which aims to overcome the defects in the prior art.

The above object is solved by the following technical solutions:

a vacuum coating device of an automatic vacuum coating production line comprises a vacuum chamber, a fixed rod and a fixed panel, wherein the fixed rod is positioned on the left side and the right side of the vacuum chamber, the fixed rod is fixedly connected with the vacuum chamber, the fixed panel is positioned on the left side and the right side of the fixed rod, the fixed rod is fixedly connected with the fixed panel, a camera is arranged inside the vacuum chamber, the camera is fixedly installed with the vacuum chamber, a heating plate is arranged inside the vacuum chamber, the heating plate is fixedly connected with the vacuum chamber, a workbench is arranged on the inner side of the heating plate, the heating plate is fixedly installed with the workbench, an electron gun is arranged inside the vacuum chamber, the electron gun is fixedly connected with the vacuum chamber, a spring is arranged inside the electron gun, the spring is movably installed with the electron gun, a regulating and controlling disc is arranged on the surface of the electron gun, the regulating disc is movably installed with the electron gun, the gun head is fixedly installed with the electronic gun, the shock-absorbing panel is arranged at the bottom of the vacuum bin and fixedly connected with the vacuum bin, the handle is arranged on the surface of the vacuum bin and fixedly connected with the vacuum bin, the transparent window is arranged on the surface of the vacuum bin and fixedly installed with the vacuum bin, the control box is arranged on the left side of the vacuum bin and fixedly connected with the vacuum bin, the vacuum machine is arranged on the back of the vacuum bin and fixedly connected with the vacuum bin, the return spring is arranged inside the vacuum machine and fixedly connected with the vacuum machine, the vacuum pump is arranged on the left side of the vacuum machine and fixedly connected with the vacuum machine, the base is arranged at the bottom of the vacuum machine and fixedly installed with the vacuum machine.

Preferably, the vacuum chamber is cylindrical, and the surface of the vacuum chamber is provided with a transparent window with the diameter of 1 meter.

Preferably, the left side and the right side of the vacuum bin are both provided with fixing rods and fixing rings, and the fixing rods are fixed on the outer sides of the fixing panels through penetrating through the fixing rings.

Preferably, 5 shock absorbing springs are arranged inside the shock absorbing panel and are transversely arranged at equal intervals.

Preferably, the vacuum chamber is internally provided with 2 cameras which can rotate by 360 degrees.

Preferably, the vacuum machine is internally provided with a ring-shaped return spring and a connecting rod, and the ring-shaped return spring surrounds the surface of the connecting rod and is movably mounted with the connecting rod.

Preferably, the vacuum chamber is internally provided with 3 electron guns, and the surface of each electron gun is provided with a concave-convex adjusting and controlling disc.

Has the advantages that:

(1) this kind of vacuum coating device of vacuum coating automatic production line passes through the improvement of structure, make this device when in-service use, it is even to be heated, the adhesion is stronger, the phenomenon that drops can not appear, make the coating film of object ability full area, the inside electron gun structure of vacuum coating device of vacuum coating automatic production line increases in addition, and can regulate and control the nature strong, vacuum coating device volume reduces simultaneously, the internal plant of vacuum coating device has been optimized, make things convenient for inside clearance and the maintenance of vacuum coating device, make the life-span reinforcing of vacuum coating device, and convenient maintenance, but the practicality is high.

(2) The vacuum coating device of the vacuum coating automatic production line has the advantages that: because the surface of the vacuum chamber is provided with a transparent window with the diameter of 1 meter, the inside condition of the vacuum chamber can be observed in the whole process, in addition, 3 electron guns are arranged inside the vacuum chamber, the coated area of an object is more comprehensive, meanwhile, 2 high-temperature cameras capable of rotating 360 degrees are arranged at the top end inside the vacuum chamber, and a vacuum machine is arranged on the back surface of the vacuum chamber, so that the vacuum coating device is more convenient and fast.

(3) Secondly, the method comprises the following steps: inside the setting of vacuum storehouse encircles the hot plate at vacuum storehouse inner wall, and the even heating area that is heated of coating in-process object is comprehensive, the inside workstation upper end in vacuum storehouse has set up 2 and has been rectangular buckles in addition, the object is difficult for taking place the skew at the reinforcing of coating in-process fixity, and the bottom in vacuum storehouse has set up the panel of moving away to avoid possible earthquakes, when vacuum coating device during operation, the panel of moving away to avoid possible earthquakes has played a buffer power to vacuum coating device, thereby make the difficult damage that leads to vacuum coating device because of the impact force of during operation production is too big of vacuum coating device.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention.

Fig. 2 is a partial structural schematic diagram of the vacuum chamber of the present invention.

Fig. 3 is a schematic structural diagram of an electronic panel according to the present invention.

FIG. 4 is a schematic view of the structure of the vacuum machine of the present invention.

In FIGS. 1-4: 1-vacuum chamber; 101-a camera; 102-a heating plate; 103-a workbench; 104-an electron gun; 1041-a spring; 1042-a control panel; 1043-gun head; 2-fixing the rod; 3-fixing the panel; 4-a shock absorbing panel; 5-a handle; 6-a transparent window; 7-a control box; 8-a vacuum machine; 801-return spring; 802-vacuum pump; 803-base.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention.