Semiconductor device and method for manufacturing the same
阅读说明:本技术 半导体器件及其制造方法 (Semiconductor device and method for manufacturing the same ) 是由 陈赫 华子群 伍术 王永庆 肖亮 于 2019-08-28 设计创作,主要内容包括:提供了一种半导体器件及其制造方法。半导体器件包括半导体结构和输入/输出焊盘。半导体结构包括第一衬底和导电层,其中,第一衬底具有彼此相对的第一表面和第二表面,导电层设置在第一衬底的第一表面上,并且导电层包括一个或多个第一迹线。第一半导体结构具有穿过第一衬底并且暴露出一个或多个第一迹线的凹陷,并且输入/输出焊盘设置在一个或多个第一迹线上并且在凹陷中。(A semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a semiconductor structure and an input/output pad. The semiconductor structure includes a first substrate having a first surface and a second surface opposite to each other, and a conductive layer disposed on the first surface of the first substrate and including one or more first traces. The first semiconductor structure has a recess through the first substrate and exposing the one or more first traces, and the input/output pad is disposed on the one or more first traces and in the recess.)
1. A semiconductor device, comprising:
a first semiconductor structure comprising a first substrate and a conductive layer, wherein the first substrate has a first surface and a second surface opposite to each other, the conductive layer is disposed on the first surface of the first substrate, and the conductive layer comprises one or more first traces; and
an input/output pad disposed on the one or more first traces;
wherein the first semiconductor structure has a recess through the first substrate and exposing the one or more first traces, and the input/output pad is disposed in the recess.
2. The semiconductor device according to claim 1, further comprising a first insulating layer provided over the second surface of the first substrate, wherein the first insulating layer has an opening corresponding to the recess.
3. The semiconductor device of claim 1, wherein the first semiconductor structure further comprises a second insulating layer between the first surface of the first substrate and the first conductive layer, wherein the recess passes through the second insulating layer.
4. The semiconductor device of claim 3, wherein a thickness of the input/output pad is less than a thickness of the second insulating layer.
5. The semiconductor device of claim 1, wherein the first semiconductor structure further comprises peripheral devices on the first substrate.
6. The semiconductor device of claim 5, wherein the conductive layer further comprises at least two second traces electrically connected to the peripheral device.
7. The semiconductor device of claim 1, wherein the input/output pad directly contacts the one or more first traces.
8. The semiconductor device of claim 1, wherein a width of the one or more traces is greater than a width of a bottom of the recess.
9. The semiconductor device of claim 1, further comprising a second semiconductor structure bonded to the first semiconductor structure.
10. The semiconductor device of claim 9, wherein the second semiconductor structure comprises a second substrate and a plurality of NAND strings, and the NAND strings are disposed between the conductive layer and the second substrate.
11. The semiconductor device of claim 10, wherein the first semiconductor structure further comprises a peripheral device on the first substrate, and one of the NAND strings is electrically connected to the peripheral device.
12. A method of manufacturing a semiconductor device, comprising:
providing a temporary semiconductor structure, wherein the temporary semiconductor structure comprises a temporary substrate having a first surface and a conductive layer disposed on the first surface of the temporary substrate, and the conductive layer comprises one or more first traces;
forming a recess in the temporary semiconductor structure to form a first semiconductor structure and a first substrate, wherein the recess passes through the first substrate and exposes the one or more first traces; and
an input/output pad is formed in the recess and on the one or more first traces.
13. The method of manufacturing a semiconductor device according to claim 12, further comprising thinning a surface of the temporary substrate opposite the first surface to form a second surface between providing the temporary semiconductor structure and forming the recess.
14. The method for manufacturing the semiconductor device according to claim 12, further comprising forming a first insulating layer over the temporary substrate between the providing of the temporary semiconductor structure and the forming of the recess, wherein the first insulating layer has an opening that exposes the temporary substrate.
15. The method of manufacturing a semiconductor device according to claim 14, wherein the temporary semiconductor structure further comprises a temporary insulating layer between the first surface of the temporary substrate and the conductive layer, and wherein forming the recess comprises patterning the temporary insulating layer to form a second insulating layer.
16. The manufacturing method of a semiconductor device according to claim 15, wherein a thickness of the input/output pad is smaller than a thickness of the second insulating layer.
17. The manufacturing method of the semiconductor device according to claim 14, wherein forming the input/output pad comprises:
depositing a layer of conductive material on the first insulating layer, sidewalls of the recess, and the one or more first traces; and
removing portions of the layer of conductive material on the first insulating layer and sidewalls of the recess.
18. The method of manufacturing the semiconductor device of claim 17, wherein the input/output pad is formed directly on the one or more first traces.
19. The method of manufacturing a semiconductor device according to claim 12, wherein providing the temporary semiconductor structure comprises providing a second semiconductor structure bonded to the temporary semiconductor structure.
20. The method of manufacturing the semiconductor device of claim 19, wherein the second semiconductor structure comprises a second substrate and a plurality of NAND strings, and the NAND strings are disposed between the conductive layer and the second substrate.
Technical Field
The present invention relates to a semiconductor device and a method of manufacturing the same.
Background
Planar memory cells are scaled to smaller dimensions by improving process technology, circuit design, programming algorithms, and manufacturing processes. However, as the feature size of the memory cell approaches the lower limit, the planar processes and fabrication techniques become more difficult and more costly. Therefore, the storage density for planar memory cells approaches the upper limit.
Three-dimensional (3D) memory architectures can address density limitations in planar memory cells. The 3D memory architecture includes a memory array and peripheral devices for controlling signals to and from the memory array devices. Referring to fig. 1, an input/output (I/O) pad (pad) structure of a conventional 3D memory device is shown. In the I/O pad structure 10 of the conventional 3D memory device, the substrate 12 for forming the memory array device 14 may be etched through to form a via (through hole)12h for electrically connecting the memory array device 14 under the substrate 12 to the I/O pad 16 on the substrate 12. To form the I/O pad structure 10, an insulating layer 18 is further formed on the surface 12a of the substrate 12 opposite the memory array device 14, such that the I/O pads 16 formed on the insulating layer 18 can be insulated from the substrate 12 having some elements (e.g., doped regions) formed therein. Further, vias 12h are formed through the insulating layer 18 and the substrate 12, and a Through Silicon Contact (TSC)20 and a liner layer 22 are formed in each via 12h, with the liner layer 22 being located between the
However, some of the drawbacks in the following description remain in the conventional I/O pad structure 10. First, parasitic capacitance generated between the I/O pad 16 and the substrate 12 will strongly affect the operating speed of the 3D memory device or the speed for storing or reading data in the 3D memory device, and therefore, in order to reduce the effect, the thickness of the insulating layer 18 may be increased to reduce the parasitic capacitance, but the parasitic capacitance also exists between the
Disclosure of Invention
Embodiments of a semiconductor device and a method of manufacturing the same are described herein.
According to an embodiment of the present invention, a semiconductor device is disclosed. The semiconductor device includes a first semiconductor structure and an input/output pad. The first semiconductor structure includes a first substrate having a first surface and a second surface opposite to each other, and a conductive layer disposed on the first surface of the first substrate and including one or more first traces. Input/output pads are disposed on the one or more first traces. The first semiconductor structure has a recess through the first substrate and exposing the one or more first traces, and the input/output pad is disposed in the recess.
In some embodiments, the semiconductor device further includes a first insulating layer disposed on the second surface of the first substrate, and the first insulating layer has an opening corresponding to the recess.
In some embodiments, the first semiconductor structure further comprises a second insulating layer between the first surface of the first substrate and the first conductive layer, wherein the recess passes through the second insulating layer.
In some embodiments, the thickness of the input/output pad is less than the thickness of the second insulating layer.
In some embodiments, the first semiconductor structure further comprises a peripheral device on the first substrate.
In some embodiments, the conductive layer further includes at least two second traces electrically connected to one or more peripheral devices.
In some embodiments, the input/output pads directly contact the one or more first traces.
In some embodiments, the width of the one or more traces is greater than the width of the bottom of the recess.
In some embodiments, the semiconductor device further includes a second semiconductor structure bonded to the first semiconductor structure.
In some embodiments, the second semiconductor structure includes a second substrate and a plurality of NAND strings, and the NAND strings are disposed between the conductive layer and the second substrate.
In some embodiments, the first semiconductor structure further includes a peripheral device on the first substrate, and one of the NAND strings is electrically connected to one or more peripheral devices.
According to an embodiment of the present invention, a method of manufacturing a semiconductor device is disclosed, and the method of manufacturing a semiconductor device includes: providing a temporary semiconductor structure, wherein the temporary semiconductor structure comprises a temporary substrate and a conductive layer, the temporary substrate has a first surface, the conductive layer is disposed on the first surface of the temporary substrate, and the conductive layer comprises one or more first traces; forming a recess in the temporary semiconductor structure to form a first semiconductor structure and a first substrate, wherein the recess passes through the first substrate and exposes one or more first traces; and forming an input/output pad in the recess and on the one or more first traces.
In some embodiments, the method of manufacturing further comprises thinning a surface of the temporary substrate opposite the first surface to form a second surface between providing the temporary semiconductor structure and forming the recess.
In some embodiments, the method further comprises forming a first insulating layer on the temporary substrate between providing the temporary semiconductor structure and forming the recess, wherein the first insulating layer has an opening exposing the temporary substrate.
In some embodiments, the temporary semiconductor structure further comprises a temporary insulating layer between the first surface of the temporary substrate and the conductive layer, and forming the recess comprises patterning the temporary insulating layer to form the second insulating layer.
In some embodiments, forming the input/output pad includes: depositing a layer of conductive material on the first insulating layer, the sidewalls of the recess, and the one or more first traces; and removing portions of the conductive material layer on the first insulating layer and the sidewalls of the recess.
In some embodiments, the input/output pads are formed directly on the one or more first traces.
In some embodiments, providing the first semiconductor structure includes providing a temporary semiconductor structure, which includes providing a second semiconductor structure bonded to the temporary semiconductor structure.
Other aspects of the disclosure will be apparent to those skilled in the art from the description, claims, and drawings of the disclosure.
These and other objects of the present invention will no doubt become obvious to those of ordinary skill in the art after having read the following detailed description of the preferred embodiments, which are illustrated in the various drawing figures and drawings.
Drawings
The accompanying drawings, which are incorporated herein and form part of the specification, illustrate embodiments of the present invention and, together with the description, further serve to explain the principles of the invention and to enable a person skilled in the pertinent art to make and use the invention.
Fig. 1 illustrates an input/output pad structure of a conventional 3D memory device.
Fig. 2 schematically shows a cross-sectional view of an exemplary semiconductor device according to a first embodiment of the present invention.
Fig. 3 schematically shows a cross-sectional view of an exemplary semiconductor device according to a first embodiment of the present invention.
Fig. 4 is a flowchart of an exemplary method of manufacturing a semiconductor device according to the first embodiment of the present invention.
Fig. 5 to 8 schematically show exemplary manufacturing steps of the semiconductor device.
Fig. 9 schematically shows an exemplary semiconductor device according to a second embodiment of the present invention.
Detailed Description
While specific configurations and arrangements are discussed, it should be understood that this may be done for illustrative purposes only. One skilled in the relevant art will recognize that: other configurations and arrangements may be used without departing from the spirit and scope of the present invention. It will be apparent to those skilled in the relevant art that the present invention may also be used in a variety of other applications.
Note that references in the specification to "one embodiment," "an example embodiment," "some embodiments," etc., indicate that the embodiment described may include a particular feature, structure, or characteristic, but every embodiment may not necessarily include the particular feature, structure, or characteristic. Moreover, such phrases are not necessarily referring to the same embodiment. Further, when a particular feature, structure, or characteristic is described in connection with an embodiment, it is submitted that it is within the knowledge of one skilled in the relevant art to affect such feature, structure, or characteristic in connection with other embodiments whether or not explicitly described.
In general, terms may be understood, at least in part, from their usage in context. For example, the term "one or more" as used herein may be used in a singular sense to describe any feature, structure, or characteristic or may be used in a plural sense to describe a combination of features, structures, or characteristics, depending, at least in part, on the context. Similarly, terms such as "a," "an," and "the" again may be understood to convey a singular use or to convey a plural use, depending at least in part on the context.
It should be readily understood that the meaning of "on … …", "above … …" and "above … …" in the present invention should be interpreted in the broadest manner such that "on … …" not only means "directly on something", but also includes "on something" with the meaning of an intermediate feature or layer therebetween, and "on … …" or "above … …" not only means "on something" or "above something", but also includes the meaning of "on something" or "above something" without an intermediate feature or layer therebetween (i.e., directly on something).
Spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly as such.
As used throughout this application, the word "may" is used in a permissive sense (e.g., meaning having the potential to), rather than the mandatory sense (e.g., meaning must). The words "include", "including", and "contain" indicate open relationships and are thus meant to include, but not limited to. Similarly, the words "having," "having," and "with" also indicate an open relationship, and thus mean having, but not limited to. As used herein, the terms "first," "second," "third," and the like, refer to labels that distinguish between different elements and may not necessarily have an ordinal meaning according to their numerical designation.
In the present invention, various technical features in different embodiments described in the following description may be combined, substituted, and mixed with each other to constitute another embodiment.
Referring to fig. 2, a cross-sectional view of an exemplary semiconductor device according to a first embodiment of the present invention is schematically shown. As shown in fig. 2, the semiconductor device 1 provided in this embodiment includes a
It should be noted that X and Y axes are added in fig. 2 to further illustrate the spatial relationship of the components in the semiconductor device 1. The
In this embodiment, the
The
In this embodiment, the
In addition, the semiconductor device 1 may further include another insulating
In some embodiments,
In some embodiments, the semiconductor device 1 may further include a
The semiconductor device may for example be a memory device or any other suitable device. Referring to fig. 3, a cross-sectional view of a semiconductor device according to an example of a first embodiment of the present invention is schematically shown. As shown in fig. 3, the semiconductor device 1 provided in this example is a NAND flash memory device, but is not limited thereto. The memory cells in the NAND flash memory device are provided in the form of a plurality of NAND strings 222 extending vertically below the
The memory array device 228 can include a
As shown in fig. 2, the semiconductor device 1 may further include an
In this example, the
As mentioned above, the semiconductor device 1 may have the following advantages compared to the conventional memory device shown in fig. 1. First, since the I/
Fig. 4 is a flowchart of an exemplary method of manufacturing a semiconductor device according to the first embodiment of the present invention. Fig. 5 through 8 and fig. 2 schematically illustrate exemplary fabrication steps of a semiconductor device, wherein fig. 6 through 8 omit portions of the first and second semiconductor structures for clarity, although the invention is not limited thereto. It should be noted that the steps shown in fig. 4 are not exhaustive and that other steps may be performed before, after or in between any of the illustrated steps. The manufacturing method of the semiconductor device 1 provided in this embodiment includes the following steps S12-S20. As shown in fig. 4 and 5, step S12 is performed to provide
In step S12, a
As shown in fig. 4, 5, and 6, step S14 is optionally performed to thin the
After thinning the
After the insulating
As shown in fig. 4 and 8, step S20 may be performed to form the I/
As shown in fig. 2, after the I/
The following description sets forth in detail various embodiments of the disclosure. For simplicity of description, identical reference numerals are used to designate identical parts of each of the following embodiments. In order that the differences between the embodiments may be more readily understood, the following description will set forth in detail the differences between the different embodiments, and will not repeatedly describe equivalent features.
Referring to fig. 9, an exemplary semiconductor device according to a second embodiment of the present invention is schematically shown. As shown in fig. 9, the
By using the disclosed semiconductor device and method of manufacturing the same, parasitic capacitance generated between an I/O pad and a first substrate can be reduced, thereby improving the operating speed of a memory device or the speed for storing or reading data in the memory device. Further, the thickness of the insulating layer over the first substrate does not need to be increased to reduce parasitic capacitance, so that the cost for forming the insulating layer can be reduced and a high aspect ratio is not required. Thus, the formation of the I/O pad is not limited by a high aspect ratio, and the process difficulty for forming the I/O pad can be made easy while increasing the density of the NAND strings. Since the recess is formed on the first semiconductor structure including the peripheral device, the width of the recess of the first semiconductor structure is not limited to be similar to or the same as the width of the NAND string or the TSC, and the exposure light used in the photolithography process can have a large wavelength. Furthermore, no open circuit between the through-array contacts and the I/O pads or current leakage in the semiconductor device due to process errors will occur and no more advanced technology is required. Furthermore, different technology generations can still easily use the same architecture when increasing the number of conductor layers and dielectric layers to upgrade the storage capacity.
The foregoing description of the specific embodiments will so fully reveal the general nature of the invention that others can, by applying knowledge within the skill of the art to various applications (e.g., the specific embodiments), readily modify and/or adapt for various applications such as the treatment of diseases or conditions requiring treatment without undue experimentation and without departing from the general concept of the present invention. Therefore, such adaptations and modifications are intended to be within the meaning and range of equivalents of the disclosed embodiments, based on the present invention and the guidance presented herein. It is to be understood that the phraseology or terminology herein is for the purpose of description and not of limitation, such that the terminology or phraseology of the present specification is to be interpreted by the skilled artisan in light of the present disclosure and guidance.
Embodiments of the present invention have been described above with the aid of functional building blocks illustrating the implementation of specific functions and relationships thereof. Boundaries of these functional building blocks have been arbitrarily defined herein for convenience of description. Alternate boundaries can be defined so long as the specified functions and relationships thereof are appropriately performed.