High-efficient vacuum plating device with mix and plate

文档序号:1683444 发布日期:2020-01-03 浏览:28次 中文

阅读说明:本技术 一种具有混镀的高效真空电镀装置 (High-efficient vacuum plating device with mix and plate ) 是由 朱卫福 陆乾明 施建国 于 2019-11-08 设计创作,主要内容包括:本发明属于真空电镀技术领域,且公开了一种具有混镀的高效真空电镀装置,包括底板,所述底板的顶部安装有第一管体,且底板的一侧转动连接有第二管体,所述第二管体和第一管体的内壁均安装有密封垫,所述第一管体内壁靠近密封垫的一侧位置处安装有膜厚计,且第一管体内部靠近膜厚计的下方安装有加热管,所述第一管体内部靠近加热管的下方安装有坩埚,本发明通过插杆将转轴和连杆进行卡合,通过插销将插杆的一端进行卡合固定,需要将连杆取出放置靶材时,只需将插杆和插销拔出即可,让使用者可以将靶材一次性放置于连杆上,可以将连杆取出进行一次性放置,大大降低了靶材的放置难度,提高了靶材的放置效率。(The invention belongs to the technical field of vacuum electroplating, and discloses a high-efficiency vacuum electroplating device with mixed plating, which comprises a bottom plate, wherein a first pipe body is arranged at the top of the bottom plate, one side of the bottom plate is rotatably connected with a second pipe body, sealing gaskets are respectively arranged on the inner walls of the second pipe body and the first pipe body, a film thickness meter is arranged at one side of the inner wall of the first pipe body, which is close to the sealing gasket, a heating pipe is arranged in the first pipe body, which is close to the lower part of the film thickness meter, and a crucible is arranged in the first pipe body, which is close to the lower part of the heating pipe. The placing difficulty of the target is greatly reduced, and the placing efficiency of the target is improved.)

1. The utility model provides an efficient vacuum plating device with mix and plate which characterized in that: the device comprises a bottom plate (1), wherein a first pipe body (2) is installed at the top of the bottom plate (1), a second pipe body (3) is rotatably connected to one side of the bottom plate (1), sealing gaskets (4) are installed on the inner walls of the second pipe body (3) and the first pipe body (2), a film thickness meter (5) is installed at one side position, close to the sealing gaskets (4), of the inner wall of the first pipe body (2), a heating pipe (6) is installed below the first pipe body (2) and close to the film thickness meter (5), a crucible (7) is installed below the first pipe body (2) and close to the heating pipe (6), a vacuum pump (8) is installed at one side, adjacent to the second pipe body (3), of the first pipe body (2) and the vacuum pump (8), an exhaust pipe (9) is installed at one side, opposite to the first pipe body (2), of the exhaust pipe (9) is fixedly connected with the first pipe body (2) and opposite to, controller (10) are installed to the outer wall of second body (3), thick meter (5), heating pipe (6) and vacuum pump (8) of membrane all with controller (10) electric connection, bolt fixedly connected with motor (11) are passed through at the top of second body (3), the bottom of motor (11) is rotated and is connected with pivot (12), and motor (11) and controller (10) electric connection, pivot (12) extend to the inside one end block of second body (3) and have connecting rod (13), it has inserted bar (14) to run through between connecting rod (13) and pivot (12), the one end of inserted bar (14) is run through and has bolt (15).

2. The high-efficiency vacuum plating apparatus with hybrid plating according to claim 1, characterized in that: the connecting rod (13) is sleeved with a partition plate (16), an adjusting bolt (17) is connected between the partition plate (16) and the connecting rod (13) in a screwing mode, and an adjusting groove (18) is formed in the position, close to the partition plate (16), of one side of the connecting rod (13).

3. The high-efficiency vacuum plating apparatus with hybrid plating according to claim 2, characterized in that: finger rods (19) are mounted on two sides of the adjusting bolt (17), and finger grooves are formed in two sides of the finger rods (19).

4. The high-efficiency vacuum plating apparatus with hybrid plating according to claim 1, characterized in that: the bottom of the bottom plate (1) is provided with a bottom pad (20), and the bottom of the bottom pad (20) is provided with an anti-slip groove.

5. The high-efficiency vacuum plating apparatus with hybrid plating according to claim 1, characterized in that: the handle rod (21) is fixedly connected to one side of the second pipe body (3) close to the controller (10) through bolts, and a handle sleeve is sleeved on the handle rod (21).

6. The high-efficiency vacuum plating apparatus with hybrid plating according to claim 1, characterized in that: a finger hole is formed in one end of the inserting rod (14), and a pull ring is installed at the top of the inserting pin (15).

Technical Field

The invention belongs to the technical field of vacuum plating, and particularly relates to an efficient vacuum plating device with mixed plating.

Background

Vacuum plating is one of several types of physical deposition phenomena, vacuum evaporation, sputter plating, and ion plating. The method is characterized in that various metal and nonmetal films are deposited on the surface of a plastic part in a distillation or sputtering mode under a vacuum condition, and a very thin surface coating can be obtained in such a mode, and the method has the outstanding advantages of high speed and good adhesion.

In chinese patent with patent number "CN 201720345557.8", a high-efficient vacuum plating device with mix plating is disclosed, this patent describes "the carousel is under step motor drives, make the rotatory electroplating of cylinder harrow, can cover the arbitrary face of product, rational in infrastructure, function convenient to use, be fit for extensively promoting", the device that this patent provided can be with target rotatory electroplating, but need place the target in the device inside one by one, can't place the structure with the target and take out and once only place, greatly increased the degree of difficulty of placing of target, the efficiency of placing of target has been reduced, and the unable demand according to the user of the specification of placing the structure is adjusted, the application range of device has the limitation.

Disclosure of Invention

The invention aims to provide a high-efficiency vacuum plating device with mixed plating, and aims to solve the problems that targets are required to be placed inside the device one by one, a target placing structure cannot be taken out to be placed at one time, the placing difficulty of the targets is greatly increased, the placing efficiency of the targets and the specification of the placing structure cannot be adjusted according to the requirements of users, and the using range of the device is limited.

In order to achieve the purpose, the invention provides the following technical scheme: a high-efficiency vacuum electroplating device with mixed plating comprises a bottom plate, wherein a first pipe body is installed at the top of the bottom plate, a second pipe body is rotatably connected to one side of the bottom plate, sealing gaskets are installed on the inner walls of the second pipe body and the first pipe body, a film thickness meter is installed at a position, close to one side of the sealing gaskets, of the inner wall of the first pipe body, a heating pipe is installed inside the first pipe body and close to the lower portion of the film thickness meter, a crucible is installed inside the first pipe body and close to the lower portion of the heating pipe, a vacuum pump is installed at one side, adjacent to the second pipe body, of the first pipe body, an exhaust pipe is installed at one side, opposite to the first pipe body, one end, opposite to the vacuum pump, of the exhaust pipe is fixedly connected with the first pipe body, a controller is installed on the outer wall of the second pipe body, the film thickness meter, the heating pipe, the bottom of motor is rotated and is connected with the pivot, and motor and controller electric connection, the pivot extends to the inside one end block of second body and has the connecting rod, it has the inserted bar to run through between connecting rod and the pivot, the bolt has been run through to the one end of inserted bar.

Preferably, the connecting rod is sleeved with a partition plate, an adjusting bolt is connected between the partition plate and the connecting rod in a screwing mode, and an adjusting groove is formed in the position, close to the partition plate, of one side of the connecting rod.

Preferably, the finger rods are installed on two sides of the adjusting bolt, and the finger grooves are formed in two sides of each finger rod.

Preferably, the bottom of the bottom plate is provided with a bottom pad, and the bottom of the bottom pad is provided with an anti-slip groove.

Preferably, the second pipe body is fixedly connected with a handle rod through a bolt at a position close to one side of the controller, and a handle sleeve is sleeved on the handle rod.

Preferably, one end of the inserted link is provided with a finger hole, and the top of the inserted pin is provided with a pull ring.

Compared with the prior art, the invention has the beneficial effects that:

(1) according to the invention, the rotating shaft and the connecting rod are clamped through the inserted link, one end of the inserted link is clamped and fixed through the plug pin, and when the connecting rod needs to be taken out and placed with the target material, the inserted link and the plug pin are only required to be pulled out, so that a user can place the target material on the connecting rod at one time and take out the connecting rod for one-time placement, the placing difficulty of the target material is greatly reduced, and the placing efficiency of the target material is improved.

(2) According to the invention, the connecting rod supports the partition plate, and the adjusting bolt is screwed down to be inserted into the adjusting groove, so that the connecting rod and the partition plate are fixed, the distance between the partition plates can be adjusted according to the requirements of users, and the effect of improving the application range of the device is achieved.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a front elevational view of the second tubular body of the present invention shown closed;

FIG. 3 is an enlarged view of portion A of FIG. 1;

in the figure: 1-a bottom plate; 2-a first tube; 3-a second tube; 4-a sealing gasket; 5-film thickness meter; 6-heating a tube; 7-a crucible; 8-a vacuum pump; 9-an air exhaust pipe; 10-a controller; 11-a motor; 12-a rotating shaft; 13-a connecting rod; 14-a plunger; 15-a bolt; 16-a separator; 17-an adjusting bolt; 18-an adjustment tank; 19-finger; 20-a bottom pad; 21-handle bar.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-3, the present invention provides the following technical solutions: the utility model provides a high-efficient vacuum plating device with mix and plate, comprising a base plate 1, first body 2 is installed at the top of bottom plate 1, and one side of bottom plate 1 rotates and is connected with second body 3, sealed 4 of filling up is all installed to the inner wall of second body 3 and first body 2, one side position department that the inner wall of first body 2 is close to sealed 4 installs thick gauge 5, and the inside below of thick gauge 5 of being close to of first body 2 installs heating pipe 6, the inside below of being close to heating pipe 6 of first body 2 installs crucible 7, vacuum pump 8 is installed to one side that first body 2 is adjacent to second body 3, vacuum pump 8 adopts PVX-16 vacuum pump, rated flow is 16m3H, the motor power is 0.55KW, the exhaust tube 9 is installed for one side of the first pipe body 2 to the vacuum pump 8, one end of the exhaust tube 9 relative to the vacuum pump 8 is fixedly connected with the first pipe body 2, the controller 10 is installed on the outer wall of the second pipe body 3, the controller 10 adopts a PLC (programmable logic controller) and can be edited, the model is PLCCPU226, the output frequency is 30KHZ, the working voltage is 24V, the film thickness meter 5, the heating pipe 6 and the vacuum pump 8 are electrically connected with the controller 10, the top of the second pipe body 3 is provided with a boltFixedly connected with motor 11, motor 11 adopts GH-28-750-60S driving motor, the bottom of motor 11 rotates and is connected with pivot 12, and motor 11 and controller 10 electric connection, the one end block that pivot 12 extends to the inside of second body 3 has connecting rod 13, when connecting rod 13 needs to be dismantled, extract inserted bar 14 and bolt 15, pull connecting rod 13 down, let connecting rod 13 and pivot 12 separate, let the user be convenient for place the target body on connecting rod 13, disposable being connected with pivot 12, improve the efficiency of placing of target body, it has inserted bar 14 to run through between connecting rod 13 and the pivot 12, the one end of inserted bar 14 has run through bolt 15.

Further, a partition plate 16 is sleeved on the connecting rod 13, an adjusting bolt 17 is connected between the partition plate 16 and the connecting rod 13 in a screwing mode, the partition plate 16 is supported through the connecting rod 13, the adjusting bolt 17 enters an adjusting groove 18 by screwing the adjusting bolt 17, so that the connecting rod 13 and the partition plate 16 are fixed, the distance between the partition plates 16 can be adjusted according to the requirements of users, and the adjusting groove 18 is formed in the position, close to the partition plate 16, of the connecting rod 13.

Furthermore, the two sides of the adjusting bolt 17 are both provided with a finger 19, the adjusting bolt 17 is convenient to rotate through the finger 19 and the finger groove, and the two sides of the finger 19 are both provided with the finger groove.

Specifically, the bottom pad 20 is installed at the bottom of the bottom plate 1, the anti-skid property of the bottom of the floor 1 is improved through the bottom pad 20 and the anti-skid grooves, the bottom plate 1 is more stable, and the anti-skid grooves are formed in the bottom of the bottom pad 20.

It is worth to be noted that a handle 21 is fixedly connected to a side position of the second tube 3 close to the controller 10 through a bolt, the second tube 3 is convenient to open through the handle 21 and the handle sleeve, and the handle sleeve is sleeved on the handle 21.

Preferably, one end of the insert rod 14 is provided with a finger hole, the insert rod 14 and the plug pin 15 are convenient to pull through the finger hole and the pull ring, and the pull ring is installed on the top of the plug pin 15.

The working principle and the using process of the invention are as follows: when the device is used, the device is moved to a use point, the skid resistance of the bottom plate 1 is increased through the bottom pad 20, the device is more stable, after the device is stably placed, the second pipe body 3 is opened through the rod 21, the second pipe body 3 is opened to the maximum opening angle, the inserting rod 14 and the plug pin 15 are pulled out, the connecting rod 13 is separated from the rotating shaft 12, the adjusting bolt 17 is unscrewed through the finger rod 19, the partition plate 16 is pulled on the connecting rod 13, the partition plate 16 is moved to the position required by a user, the adjusting bolt 17 is screwed down, the adjusting bolt 17 enters the adjusting groove 18, the connecting rod 13 is fixed with the partition plate 16, the target body is placed through the partition plate 16, the connecting rod 13 is inserted back to the original position, the inserting rod 14 and the plug pin 15 are inserted back to the original position, the rotating shaft 12 and the connecting rod 13 are fixed, raw materials to be electroplated are placed in the crucible 7, the second pipe body 3 is closed, the vacuum pump 8 is started, and the vacuum pump 8 pumps, the heating pipe 6 heats the raw material to raise the temperature of the raw material, so that the raw material is gasified and attached to the outside of the target material to finish electroplating.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

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