阅读说明：本技术 一种芯片安装结构及半导体产品及其加工工艺 (Chip mounting structure, semiconductor product and processing technology thereof ) 是由 王琇如 刘思勇 于 2020-04-17 设计创作，主要内容包括：本发明公开一种芯片安装结构及半导体产品及其加工工艺,包括芯片以及用于安装所述芯片的引线框架,其特征在于,所述引线框架具有用于放置所述芯片的基岛、分别位于所述基岛两侧的第一引脚、第三引脚、与所述基岛呈一体结构的第二引脚以及与所述基岛呈断开设置的第四引脚,所述芯片通过导电银胶粘结在所述基岛上,所述第一引脚、第三引脚以及所述第四引脚分别通过金属线与所述芯片电连接。本方案中将第一引脚与第四引脚采用断开式结构,使得可以在基岛上采用导电银胶对芯片进行粘结而不会形成短路,从而可以有效的提高产品散热效果,相对于现有技术中采用非导电性粘结剂的方案,本方案不会生击穿现象,产品稳定性好,质量能够得到保证。(The invention discloses a chip mounting structure, a semiconductor product and a processing technology thereof, which comprises a chip and a lead frame for mounting the chip, and is characterized in that the lead frame is provided with a base island for placing the chip, a first pin, a third pin, a second pin and a fourth pin, wherein the first pin and the third pin are respectively positioned at two sides of the base island, the second pin and the base island are in an integrated structure, the fourth pin and the base island are in a disconnected arrangement, the chip is bonded on the base island through conductive silver adhesive, and the first pin, the third pin and the fourth pin are respectively and electrically connected with the chip through metal wires. First pin and fourth pin adopt disconnected structure in this scheme for can adopt the conductive silver glue to bond the chip and can not form the short circuit on the base island, thereby can effectual improvement product radiating effect, for the scheme of adopting non-conductive binder among the prior art, this scheme can not produce the breakdown phenomenon, and product stability is good, and the quality can obtain guaranteeing.)

1. The utility model provides a chip mounting structure, includes the chip and is used for the installation the lead frame of chip, its characterized in that, the lead frame have be used for placing the base island of chip, be located respectively the first pin of base island both sides, third pin, with the base island is the second pin of an organic whole structure and with the base island is the fourth pin that the disconnection set up, the chip bonds through electrically conductive silver-colored glue on the base island, first pin, third pin and the fourth pin respectively through the metal wire with the chip electricity is connected.

2. The chip mounting structure according to claim 1, wherein the second pin and the fourth pin are located on both sides of the base island, respectively.

3. A semiconductor product having the chip mounting structure according to any one of claims 1 to 2.

4. A semiconductor product processing process, comprising the steps of:

s1, providing a lead frame, wherein the lead frame comprises a base island, a first pin, a third pin, a second pin and a fourth pin, wherein the first pin and the third pin are respectively arranged on two sides of the base island, and the second pin and the fourth pin are fixedly connected with the base island;

s2, cutting the lead frame, and cutting and disconnecting the fourth pin and the base island;

s3, welding a chip, arranging conductive silver adhesive on the base island, and bonding the chip on the base island through the conductive silver adhesive;

and S4, routing, wherein the chip is electrically connected with the first pin, the third pin and the fourth pin by adopting metal wires.

5. The semiconductor product processing process of claim 4, wherein the step S3 of bonding chips specifically comprises:

s31, providing a chip, wherein the chip is formed by cutting a silicon wafer through a carborundum grinding wheel, a diamond knife or laser etching;

s32, arranging conductive silver adhesive on the base island through a single-nozzle sprayer or a multi-nozzle sprayer;

s33, grabbing the chip, sucking up the chip by using a sucking disc, and moving the chip to the position above the base island provided with the conductive silver adhesive;

and S34, adhering the chip to the base island through the conductive silver adhesive.

6. The semiconductor product processing technology as claimed in claim 5, wherein the step S4 wire bonding is performed by ultrasonic thermocompression, and includes chip side bonding and pin side bonding.

7. The semiconductor product processing technology of claim 6, further comprising, after the wire bonding of step S4:

and S5, plastic packaging, namely packaging the chip, the metal wire, the lead frame and the like by using epoxy thermosetting resin.

8. The semiconductor product processing process of claim 7, further comprising, after the step S5 of plastic-sealing:

and S6, cutting ribs, namely cutting off the connecting ribs which have the supporting and connecting functions on the pins, wherein the ribs are cut in a stamping mode.

9. The semiconductor product processing process of claim 8, further comprising:

and S7, electroplating welding, namely electroplating the lead frame which is not cut off and is not packaged, so that a weldable layer is formed on the surface of the lead frame for subsequent welding.

10. The semiconductor product processing process of claim 9, further comprising:

and S8, forming, namely cutting the product subjected to electroplating welding, cutting off redundant parts and then bending the pins.

Technical Field

The invention relates to the technical field of semiconductors, in particular to a chip mounting structure, a semiconductor product and a processing technology of the semiconductor product.

Background

The semiconductor is a material with a conductive capability between a conductor and a non-conductor, and the semiconductor element belongs to a solid-state element according to the characteristics of the semiconductor material, and the volume of the semiconductor element can be reduced to a small size, so that the power consumption is low, the integration level is high, and the semiconductor element is widely introduced in the field of electronic technology.

Disclosure of Invention

The embodiment of the invention aims to: a chip mounting structure, a semiconductor product and a process for manufacturing the same are provided, which can solve the above-mentioned problems in the prior art.

In order to achieve the purpose, the invention adopts the following technical scheme:

on the one hand, provide a chip mounting structure, include the chip and be used for the installation the lead frame of chip, the lead frame have be used for placing the base island of chip, be located respectively the first pin of base island both sides, third pin, with the base island is the second pin of an organic whole structure and with the base island is the fourth pin that the disconnection set up, the chip bonds through electrically conductive silver-colored glue on the base island, first pin, third pin and fourth pin respectively through the metal wire with the chip electricity is connected.

As a preferable technical solution of the chip mounting structure, the second pin and the fourth pin are respectively located at two sides of the base island.

In another aspect, a semiconductor product having the chip mounting structure as described above is provided.

In another aspect, a semiconductor product processing process is provided, comprising the steps of:

s1, providing a lead frame, wherein the lead frame comprises a base island, a first pin, a third pin, a second pin and a fourth pin, wherein the first pin and the third pin are respectively arranged on two sides of the base island, and the second pin and the fourth pin are fixedly connected with the base island;

s2, cutting the lead frame, and cutting and disconnecting the fourth pin and the base island;

s3, welding a chip, arranging conductive silver adhesive on the base island, and bonding the chip on the base island through the conductive silver adhesive;

and S4, routing, wherein the chip is electrically connected with the first pin, the third pin and the fourth pin by adopting metal wires.

As a preferred technical solution of the semiconductor product processing technology, the step S3 of bonding a chip specifically includes:

s31, providing a chip, wherein the chip is formed by cutting a silicon wafer through a carborundum grinding wheel, a diamond knife or laser etching;

s32, arranging conductive silver adhesive on the base island through a single-nozzle sprayer or a multi-nozzle sprayer;

s33, grabbing the chip, sucking up the chip by using a sucking disc, and moving the chip to the position above the base island provided with the conductive silver adhesive;

and S34, adhering the chip to the base island through the conductive silver adhesive.

As a preferred technical solution of the semiconductor product processing technology, the step S4 of wire bonding is performed by using an ultrasonic hot pressing method, and includes chip-side bonding and pin-side bonding.

As a preferred technical solution of the semiconductor product processing process, after the wire bonding in step S4, the method further includes:

and S5, plastic packaging, namely packaging the chip, the metal wire, the lead frame and the like by using epoxy thermosetting resin.

As a preferred technical solution of the semiconductor product processing process, after the step S5 plastic packaging, the method further includes:

and S6, cutting ribs, namely cutting off the connecting ribs which have the supporting and connecting functions on the pins, wherein the ribs are cut in a stamping mode.

As a preferred technical solution of the semiconductor product processing technology, the method further comprises:

and S7, electroplating welding, namely electroplating the lead frame which is not cut off and is not packaged, so that a weldable layer is formed on the surface of the lead frame for subsequent welding.

As a preferred technical solution of the semiconductor product processing technology, the method further comprises:

and S8, forming, namely cutting the product subjected to electroplating welding, cutting off redundant parts and then bending the pins.

The invention has the beneficial effects that: first pin and fourth pin adopt disconnected structure in this scheme for can adopt the conductive silver glue to bond the chip and can not form the short circuit on the base island, thereby can effectual improvement product radiating effect, for the scheme of adopting non-conductive binder among the prior art, this scheme can not produce the breakdown phenomenon, and product stability is good, and the quality can obtain guaranteeing.

Drawings

The invention is explained in more detail below with reference to the figures and examples.

Fig. 1 is a schematic diagram of a chip mounting structure according to an embodiment of the present invention.

Fig. 2 is a flow chart of a semiconductor product processing process according to an embodiment of the invention.

Fig. 3 is a flow chart of a chip bonding process according to an embodiment of the invention.

In the figure:

100. a first pin; 200. a second pin; 300. a third pin; 400. a fourth pin; 500. a base island; 600. a chip; 700. a metal wire.

Detailed Description

In order to make the technical problems solved, technical solutions adopted, and technical effects achieved by the present invention clearer, the technical solutions of the embodiments of the present invention are described in further detail below, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, unless otherwise expressly specified or limited, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

As shown in fig. 1, the present embodiment provides a chip mounting structure, which includes a chip 600 and a lead frame for mounting the chip 600, wherein the lead frame has a base island 500 for placing the chip 600, a first pin 100 and a third pin 300 respectively located at two sides of the base island 500, a second pin 200 integrated with the base island 500, and a fourth pin 400 disconnected from the base island 500, the chip 600 is adhered to the base island 500 by a conductive silver paste, and the first pin 100, the third pin 300, and the fourth pin 400 are electrically connected to the chip 600 by metal wires 700.

First pin and fourth pin adopt disconnected structure in this scheme for can adopt the conductive silver glue to bond the chip and can not form the short circuit on the base island, thereby can effectual improvement product radiating effect, for the scheme of adopting non-conductive binder among the prior art, this scheme can not produce the breakdown phenomenon, and product stability is good, and the quality can obtain guaranteeing.

On the basis that the scheme is disclosed, the form of the lead frame can be reasonably designed according to actual needs, and the specific structure of the lead frame in the embodiment is that the second pin and the fourth pin are respectively located on two sides of the base island.

Meanwhile, the embodiment also provides a semiconductor product which is provided with the chip mounting structure.

The semiconductor product adopting the chip mounting structure has good heat dissipation performance and discharge breakdown performance, and can be suitable for high-power products.

As shown in fig. 2-3, the semiconductor product processing process according to the embodiment includes the following steps:

s1, providing a lead frame, wherein the lead frame comprises a base island, a first pin, a third pin, a second pin and a fourth pin, wherein the first pin and the third pin are respectively arranged on two sides of the base island, and the second pin and the fourth pin are fixedly connected with the base island;

s2, cutting the lead frame, and cutting and disconnecting the fourth pin and the base island;

s3, welding a chip, arranging conductive silver adhesive on the base island, and bonding the chip on the base island through the conductive silver adhesive;

the step S3 of bonding the chip specifically includes:

s31, providing a chip, wherein the chip is formed by cutting a silicon wafer, and specifically, the step of manufacturing the chip by the silicon wafer comprises the following steps:

1. back grinding, namely grinding off the redundant silicon on the back of the silicon wafer;

2. dicing, namely cutting the silicon wafer into chips;

before cutting, the back face of a silicon wafer is placed on a sucker towards the sucker, a protective adhesive tape is arranged on the front face of the silicon wafer, the front face of the silicon wafer is adsorbed by the sucker in a turnover mode, the back face of the silicon wafer is ground through a grinding wheel, the protective adhesive tape is peeled off by the turnover face after grinding is completed, and then the silicon wafer is cleaned with warm water and then is dried.

Specifically, the chip is formed by cutting a silicon wafer through a diamond grinding wheel, a diamond knife or laser etching;

the diamond wheel method is to rotate a diamond grinding wheel at a high speed and grind and slice the diamond grinding wheel. The method has the characteristics of high efficiency and low residual stress, and is the current main scribing method.

The diamond knife method is to use the pepper of the diamond knife to flower dogs along the edge of the chip, and then to use the brittleness of the chip to crack and separate the chip by a mechanical method.

The laser etching method is to melt the silicon chip by high-power shock laser to form fine groove marks, and then crack and separate the silicon chip by a mechanical scheme.

Specifically, in this embodiment, silicon wafer dicing is performed by using a diamond wheel method. A protective tape is placed under the silicon wafer during the ride.

S32, arranging conductive silver adhesive on the base island through a single-nozzle sprayer or a multi-nozzle sprayer;

the conductive silver adhesive adopts thermosetting resin such as epoxy resin or polyamide resin containing silver powder, the chip and the base island are bonded at normal temperature, and then thermosetting treatment is carried out at 150-300 ℃ for 30 seconds-2 minutes. The heat conduction and the electric conduction are mainly completed by the silver powder. It features its adhesion at ordinary temp and low cost.

The equipment for setting the conductive silver angle in the scheme comprises a support frame, a glue tank arranged above the support frame and a spray head arranged below the support frame and communicated with the glue tank, wherein in the working process, pressure is applied to the glue tank, conductive silver glue is extruded from the spray head, then the support frame controls the position of the spray head to descend, so that the conductive silver glue is contacted with a base island, a conductive pin is coated on the base island, and if a single-nozzle spray head is adopted for coating, the spray head is controlled to move relative to the base island, so that the conductive silver glue is distributed in a specific range on the base island.

S33, grabbing the chip, sucking up the chip by using a sucking disc, and moving the chip to the position above the base island provided with the conductive silver adhesive;

in the scheme, the chip position is firstly confirmed through the CCD camera before the chip is grabbed, the sucker moves towards the chip position, the chip is arranged on a workbench provided with a thimble, the thimble jacks up the chip to enable the sucker to conveniently grab the chip, the sucker grabs the chip and then is lifted upwards, and the thimble withdraws the workbench to move to the next chip to be grabbed.

And S34, adhering the chip to the base island through the conductive silver adhesive.

In the process of adhering the chip, the sucker drives the chip to move to the position above the conductive pins of the drawing, the sucker descends, the chip is covered on the base island, and pressure is applied to enable the chip to be adhered to the base island.

And S4, routing, wherein the chip is electrically connected with the first pin, the third pin and the fourth pin by adopting metal wires. And the step S4 of routing is carried out by adopting an ultrasonic hot-pressing method, and comprises chip side bonding and pin side bonding. And the chip is electrically connected with the pins of the lead frame by using metal wires with the diameter of 20-50 mu m.

And S5, plastic packaging, namely packaging the chip, the metal wire, the lead frame and the like by using epoxy thermosetting resin. For preventing the influence and destruction of the external environment.

In the packaging process, the resin block is conveyed to the lower part of a hydraulic cylinder of an injection mold, preheated by methods such as radio frequency heating and the like, and then heated to a melting temperature, then the molten resin is poured into a plastic packaging mold cavity through a channel under the extrusion of the hydraulic cylinder, and the resin loses fluidity and is solidified after standing for 20-50 seconds.

After the molding, the resin is not completely cured although it has been formed into a solid state, and is subjected to a thorough curing treatment in an incubator under a curing condition of typically 175 ℃ for 5 hours.

And S6, cutting ribs, namely cutting off the connecting ribs which have the supporting and connecting functions on the pins, wherein the ribs are cut in a stamping mode.

And S7, electroplating welding, namely electroplating the lead frame which is not cut off and is not packaged, so that a weldable layer is formed on the surface of the lead frame for subsequent welding. The alloy for electroplating welding adopts Sn-20Pb, and the thickness of the plating layer is 7.5-15 μm.

And S8, forming, namely cutting the product subjected to electroplating welding, cutting off redundant parts and then bending the pins.

And finally, performing electrical property detection and appearance inspection, wherein the electrical property detection comprises detecting whether short circuit exists or not, detecting image planes of circuit function, voltage resistance, frequency resistance and the like, and the operation temperature comprises normal temperature measurement (25 ℃), high temperature measurement (80 ℃) and low temperature measurement (-5 ℃) which are determined according to different products.

In the description herein, it is to be understood that the terms "upper," "lower," "left," "right," and the like are used in an orientation or positional relationship merely for convenience in description and simplicity of operation, and do not indicate or imply that the referenced device or element must have a particular orientation, configuration, and operation in a particular orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used merely for descriptive purposes and are not intended to have any special meaning.

In the description herein, references to the description of "an embodiment," "an example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be appropriately combined to form other embodiments as will be appreciated by those skilled in the art.

The technical principle of the present invention is described above in connection with specific embodiments. The description is made for the purpose of illustrating the principles of the invention and should not be construed in any way as limiting the scope of the invention. Based on the explanations herein, those skilled in the art will be able to conceive of other embodiments of the present invention without inventive effort, which would fall within the scope of the present invention.