阅读说明：本技术 用于镀膜机的离子源 (Ion source for film plating machine ) 是由 唐洪波 黄乐 孙桂红 黄国兴 祝海生 于 2019-11-08 设计创作，主要内容包括：本发明提供了用于镀膜机的离子源,包括本体、限位柱和调节板,限位柱固定连接在本体的顶部,调节板一端设有安装孔,另一端开设有多个弧形孔,不位于本体顶部的中心,镀膜机的壳体的顶面设有通孔,限位柱穿过壳体顶面的通孔后再穿过调节板的安装孔。本发明的离子源本体和安装柱通过铰接杆铰接,离子源本体可根据安装需要转动,可根据限位杆的位置和移动判断离子源本体的位置和移动,在调节板的弧形孔中插入限位杆可限制本体的移动范围。(The invention provides an ion source for a film plating machine, which comprises a body, a limiting column and a regulating plate, wherein the limiting column is fixedly connected to the top of the body, one end of the regulating plate is provided with a mounting hole, the other end of the regulating plate is provided with a plurality of arc-shaped holes which are not positioned in the center of the top of the body, the top surface of a shell of the film plating machine is provided with a through hole, and the limiting column penetrates through the through hole on the top surface of the shell and then penetrates through. The ion source body and the mounting column are hinged through the hinge rod, the ion source body can rotate according to mounting requirements, the position and the movement of the ion source body can be judged according to the position and the movement of the limiting rod, and the limiting rod is inserted into the arc-shaped hole of the adjusting plate to limit the movement range of the body.)

1. An ion source for a coating machine, characterized in that: including body (1), spacing post (5) and regulating plate (4), spacing post (5) fixed connection is at the top of body (1), regulating plate (4) one end is equipped with the mounting hole, and a plurality of arc holes (6) have been seted up to the other end, do not lie in the center at body (1) top, and the top surface of coating machine's casing (9) is equipped with the through-hole, passes the mounting hole of regulating plate (4) again behind the through-hole of casing (9) top surface spacing post (5).

2. The ion source for coating machine of claim 1 wherein: the ion source also comprises a permanent magnet, an electromagnetic coil, a target material and an electric signal output device, wherein the permanent magnet, the electromagnetic coil, the target material and the electric signal output device are positioned in the body (1).

3. The ion source for coating machine of claim 2 wherein: the body (1) is in a cuboid shape, and one surface of the body (1) is provided with a through hole for the passing of atom, molecule, ion and other particle beams generated by bombarding the target material.

4. The ion source for coating machine of claim 1 wherein: two side faces of the body (1) adjacent to one face provided with the through hole are provided with a plurality of mounting pins (2) and mounting screws (8).

5. The ion source for coating machine of claim 4 wherein: the permanent magnet, the target material and the electric signal output device are arranged on a mounting seat, the mounting seat is positioned inside the body (1), and the mounting seat is connected with the body (1) through a plurality of mounting pins (2) and mounting screws (8).

6. The ion source for coating machine of claim 5 wherein: the installation pins (2) and the installation screws (8) are arranged at equal intervals, and the installation pins (2) and the installation screws (8) are alternately arranged.

7. The ion source for coating machine of claim 1 wherein: be equipped with two erection columns (3) and two hinge bar (7) on the body (1) and the side that is equipped with the through-hole one side relative, establish respectively at the both ends of body (1) and the central symmetrical arrangement of body (1) for two erection columns (3), erection column (3) are hollow, be equipped with hinge bar (7) in erection column (3), the one end of hinge bar (7) stretches out body (1) behind erection column (3), the other end stretches out the other end of cavity erection column (3).

8. The ion source for coating machine of claim 1 wherein: the limiting column (5) is positioned at the edge of the top.

9. The ion source for a coater of claim 8 wherein: the surface of the limiting column (5) is provided with an external thread, the mounting hole of the adjusting plate (4) is internally provided with an internal thread, and the limiting column (5) is connected with the adjusting plate (4) through the thread.

Technical Field

The invention relates to the technical field of coating production, in particular to an ion source for a coating machine.

Background

An ion source is a device that ionizes neutral atoms or molecules and extracts a stream of ions therefrom. Although there are many types of ion sources, the purpose of the ion source is mainly on-line cleaning, improving the energy distribution of the surface to be coated and modulating the energy of the reaction gas in the coating process. The ion source can greatly improve the bonding strength of the film and the substrate, and simultaneously, the hardness and the wear-resistant and corrosion-resistant characteristics of the film are improved.

In a coating production line, an ion source needs to be installed on a shell of a corresponding chamber on the production line so as to extract ion beam current according to the design direction and position. However, the substrate to be coated in the production line is in a moving or static state, and the direction or angle of the extracted ion beam current needs to be changed to meet the coating thickness and other requirements when different films are coated or under different process conditions.

Disclosure of Invention

Aiming at the problems in the prior art, the invention aims to provide an ion source for a film plating machine, wherein an ion source body is hinged with a mounting column through a hinge rod, the ion source body can rotate according to the mounting requirement, the position and the movement of the ion source body can be judged according to the position and the movement of a limiting rod, and the movement range of the ion source body can be limited by inserting the limiting rod into an arc-shaped hole of an adjusting plate.

In order to achieve the purpose, the invention adopts the technical scheme that:

a top surface for coating machine's casing is equipped with the through-hole, and the mounting hole of regulating plate is passed again behind the through-hole that spacing post passed shell top surface.

As a further improvement of the above technical solution:

the ion source also comprises a permanent magnet, an electromagnetic coil, a target material and an electric signal output device, wherein the permanent magnet, the electromagnetic coil, the target material and the electric signal output device are positioned in the body.

The body is in a cuboid shape, and one surface of the body is provided with a through hole for the passage of atom, molecule, ion and other particle beams generated by bombarding the target material.

And a plurality of mounting pins and mounting screws are arranged on two adjacent side surfaces of the body, which are provided with the through holes.

The permanent magnet, the target material and the electric signal output device are arranged on a mounting seat, the mounting seat is located inside the body, and the mounting seat is connected with the body through a plurality of mounting pins and mounting screws.

The plurality of mounting pins and the mounting screws are arranged at even intervals, and the mounting pins and the mounting screws are alternately arranged.

Be equipped with two erection columns and two hinge bars on the body and the side that is equipped with the through-hole one side relative, two erection columns are established respectively at the both ends of body and the central symmetrical arrangement of relative body, and the erection column is hollow, is equipped with the hinge bar in the erection column, and the body is articulated behind the erection column to the one end of hinge bar, and the other end stretches out the other end of cavity erection column.

The limiting column is positioned at the edge of the top.

The surface of the limiting column is provided with an external thread, the mounting hole of the adjusting plate is internally provided with an internal thread, and the limiting column is connected with the adjusting plate through a thread.

Compared with the prior art, the invention has the beneficial effects that: the ion source body is hinged to the mounting column through the hinge rod, the ion source body can rotate according to mounting requirements, the limiting rod is located outside the coating machine shell, the position and the movement of the ion source body can be judged according to the position and the movement of the limiting rod, the limiting rod is inserted into the arc-shaped hole of the adjusting plate, and the moving range of the adjusting plate can be limited, so that the moving range of the body is limited.

Drawings

FIG. 1 is a schematic structural diagram of one embodiment of the present invention;

fig. 2 is a schematic structural view of the coating machine housing according to an embodiment of the present invention.

Detailed Description

The ion source for a coating machine provided by the invention is further described in detail and completely by combining the embodiment. The following examples are illustrative only and are not to be construed as limiting the invention.

An ion source for a film plating machine is shown in figures 1-2 and comprises a body 1, a permanent magnet, an electromagnetic coil, a target material and an electric signal output device, wherein the permanent magnet, the electromagnetic coil, the target material and the electric signal output device are positioned in the body 1, and one surface of the body 1 is provided with a through hole for allowing particle beams such as atoms, molecules and ions generated by bombarding the target material to pass through. The electromagnetic coil surrounds the outside of the permanent magnet, the electromagnetic coil is a conductive coil and is connected with an external power supply, and after the electromagnetic coil is electrified, the permanent magnet generates a magnetic field to guide the charged ion beam to move towards a set direction. In other words, the traveling direction of the charged particle beam can be changed as desired. When a coating production line is used for coating, an ion source is required to generate and guide a charged ion beam to bombard the target material so as to deposit the target material on the surface of a substrate to be coated, and coating is completed.

In this embodiment, the body 1 is a rectangular parallelepiped, and a through hole is formed in one surface of the body 1.

In this embodiment, two side surfaces of the body 1 adjacent to the side surface provided with the through hole are provided with a plurality of mounting pins 2 and mounting screws 8. Specifically, the permanent magnet, the target material and the electric signal output device are arranged on a mounting seat, the mounting seat is positioned inside the body 1, and the mounting seat is connected with the body 1 through a plurality of mounting pins 2 and mounting screws 8. A plurality of mounting pins 2 and the even interval arrangement of mounting screw 8, mounting pin 2 and mounting screw 8 arrange in turn, and mounting pin 2 is convenient for fix a position the mount pad, and mounting screw 8 is to the mount pad fixed connection after the location on body 1.

The permanent magnet, the target material and the electric signal output device are not fixedly connected inside the body 1, because the mounting base can be stably connected to the body 1 in the operation process, namely, the permanent magnet, the target material and the electric signal output device are stably arranged inside the body 1. Meanwhile, after the mounting pin 2 and the mounting screw 8 are disassembled, the mounting seat can be taken out from the inside of the body 1, so that the internal parts can be conveniently overhauled and replaced. If permanent magnet, target and signal of telecommunication output device fixed connection are inside body 1, then obviously not convenient to overhaul, can only take the whole structure of casing 9 to replace, are unfavorable for resources are saved and reduce cost. Therefore, the mounting pin 2 and the mounting screw 8 are attached and detached from the outside of the housing 9.

In this embodiment, the body 1 is provided with two mounting posts 3 and two hinge rods 7 on the side opposite to the side provided with the through hole. The two mounting columns 3 are respectively arranged at two ends of the body 1 and are symmetrically arranged relative to the center of the body 1. The erection column 3 is hollow, is equipped with hinge bar 7 in the erection column 3, and hinge bar 7 passes erection column 3 promptly, and the one end of hinge bar 7 stretches out 3 back articulated bodies 1 of erection column, and the other end stretches out the other end of cavity erection column 3. In use, the mounting post 11 is mounted on the housing 9 of the coater and passes through the housing 9 of the coater. The cooperation of erection column 3 and hinge bar 7 is for the convenience of overhauing, and during the maintenance, only need remove hinge bar 7 and body 1's articulated, take off hinge bar 7, need not to operate erection column 3, when avoiding frequently operating erection column 3, influences the leakproofness between erection column 3 and the body 1. The specific manner of hinging the hinge rod 7 to the body 1 is well known to those skilled in the art and will not be described herein. It should be noted that, sealing cotton or sealant is arranged between the hinge rod 7 and the mounting column 3 to prevent external impurities from entering the interior of the film plating machine through a gap between the hinge rod 7 and the mounting column 3.

As can be seen from the above, the body 1 can rotate relatively to the mounting column 3 by the hinge of the hinge rod 7, the rotating direction is vertical to the length direction of the body 1, and the rotating range is 180 degrees

In this embodiment, the coating machine further includes a limiting column 5 and an adjusting plate 4. Spacing post 5 fixed connection is at the top of body 1, does not lie in the center at body 1 top, and the preferred, spacing post 5 lies in the edge at top. So set up, when body 1 rotated, spacing post 5 can take place the motion of non-rotation. Adjusting plate 4 one end is equipped with the mounting hole, and a plurality of arc holes 6 have been seted up to the other end, and spacing post 5 passes the mounting hole and spacing post 5 fixed connection. Preferably, the surface of the limiting column 5 is provided with external threads, the mounting hole of the adjusting plate 4 is internally provided with internal threads, and the limiting column 5 is connected with the adjusting plate 4 through threads. From the above, when the body 1 rotates, the adjusting plate 4 and the body 1 move together.

When the body 1 is used, the body is installed on a casing 9 of a film coating machine, as shown in fig. 1, a through hole is formed in the top surface of the casing 9, the limiting column 5 penetrates through the through hole in the top surface of the casing 9 and then penetrates through an installation hole of the adjusting plate 4, in other words, the body 1 is installed in the casing 9 of the film coating machine, and the adjusting plate 4 is installed outside the casing 9 of the film coating machine. This arrangement facilitates determination of the position and movement of the body 1 by the position and movement of the adjustment plate 4 outside the housing 9, and allows adjustment of the range of movement of the body 1. Specifically, a plurality of limiting rods are movably arranged on the shell 9 and movably inserted into the arc-shaped holes 6 of the adjusting plate 4 according to needs to limit the moving range of the adjusting plate 4, so that the moving range of the body 1 is limited.

The specific working process of the invention is as follows: install body 1 inside the casing 9 of coating machine, make the erection column pass casing 9, body 1's power wiring end is located casing 9 outside simultaneously, spacing post 5 passes casing 9's higher authority, then insert regulating plate 4 in spacing post 5, it is concrete, spacing post 5 passes the mounting hole of regulating plate 4, ion source operation in-process, can judge the position of the inside body 1 of casing 9 through regulating plate 4's position, need adjust body 1's direction, position and rotation direction etc., insert the gag lever post in arc hole 6, it is concrete, the gag lever post one end is inserted in the slot of casing 9 top surface, the other end overhang sets up.

Finally, it must be said here that: the above embodiments are only used for further detailed description of the technical solutions of the present invention, and should not be understood as limiting the scope of the present invention, and the insubstantial modifications and adaptations made by those skilled in the art according to the above descriptions of the present invention are within the scope of the present invention.