阅读说明：本技术 半导体装置封装及其制造方法 (Semiconductor device package and method of manufacturing the same ) 是由 谢盛祺 王陈肇 李德章 陈建桦 于 2019-09-05 设计创作，主要内容包括：一种半导体装置封装包含玻璃载体、封装主体、第一电路层和第一天线层。所述玻璃载体具有第一表面和与所述第一表面相对的第二表面。所述封装主体安置于所述玻璃载体的所述第一表面上。所述封装主体具有穿透所述封装主体的互连结构。所述第一电路层安置于所述封装主体上。所述第一电路层具有电连接到所述封装主体的所述互连结构的再分布层RDL。所述第一天线层安置于所述玻璃载体的所述第二表面上。(A semiconductor device package includes a glass carrier, a package body, a first circuit layer, and a first antenna layer. The glass carrier has a first surface and a second surface opposite the first surface. The package body is disposed on the first surface of the glass carrier. The package body has an interconnect structure penetrating the package body. The first circuit layer is disposed on the package body. The first circuit layer has a redistribution layer RDL electrically connected to the interconnect structure of the package body. The first antenna layer is disposed on the second surface of the glass carrier.)

1. A semiconductor device package, comprising:

a glass carrier having a first surface and a second surface opposite the first surface;

a package body disposed on the first surface of the glass carrier, the package body having an interconnect structure penetrating the package body;

a first circuit layer disposed on the package body, the first circuit layer having a redistribution layer (RDL) electrically connected to the interconnect structure of the package body; and

a first antenna layer disposed on the second surface of the glass carrier.

2. The semiconductor device package of claim 1, further comprising an electronic component disposed on the first surface of the glass carrier, wherein the electronic component has an active surface facing the first circuit layer and electrically connected to the RDL of the first circuit layer.

3. The semiconductor device package of claim 2, wherein the electronic component is encapsulated by the package body.

4. The semiconductor device package of claim 2, wherein the package body has a cavity penetrating the package body to expose a portion of the first surface of the glass substrate, and the electronic component is disposed within the cavity.

5. The semiconductor device package of claim 4, further comprising a conductive layer within the cavity, wherein the conductive layer has a first portion disposed on a sidewall of the cavity and a second portion disposed on the portion of the first surface of the glass substrate exposed from the package body.

6. The semiconductor device package of claim 5, wherein the electronic component is disposed on the second portion of the conductive layer and spaced apart from the first portion of the conductive layer.

7. The semiconductor device package of claim 1, wherein the RDL of the first circuit layer and the interconnect structure of the package body define a dipole antenna.

8. The semiconductor device package of claim 1, further comprising:

a second circuit layer disposed between the package body and the glass carrier, wherein the second circuit layer has an RDL electrically connected to the interconnect structure of the package body; and

an electronic component disposed on the second circuit layer.

9. The semiconductor device package of claim 8, further comprising a through via penetrating the glass carrier and electrically connecting the RDL of the second circuit layer to the first antenna layer.

10. The semiconductor device package of claim 8, wherein the package body has a cavity that houses the electronic component.

11. The semiconductor device package of claim 10, further comprising a shield having a first portion and a second portion, wherein the first portion of the shield is disposed on the second circuit layer and surrounds the electronic component, and the second portion of the shield is disposed over the electronic component and electrically connected to the first portion of the shield.

12. A semiconductor device package, comprising:

a glass carrier having a first surface and a second surface opposite the first surface;

a first circuit layer disposed on the first surface of the glass carrier, the first circuit layer having a redistribution layer (RDL);

a first package body disposed on the first circuit layer, the first package body having an interconnect structure penetrating the first package body and electrically connected to the RDL; and

a first antenna layer disposed on the second surface of the glass carrier.

13. The semiconductor device package of claim 12, further comprising an electronic component disposed on the first circuit layer, wherein the electronic component has an active surface facing and electrically connected to the first circuit layer.

14. The semiconductor device package of claim 13, wherein the electronic component is encapsulated by the first package body.

15. The semiconductor device package of claim 12, further comprising a second package body disposed on the second surface of the glass carrier.

16. The semiconductor device package of claim 15, further comprising a second antenna layer disposed on a surface of the second package body facing away from the glass carrier.

17. A method of manufacturing a semiconductor device package, the method comprising:

(a) providing a glass carrier having a first surface and a second surface opposite the first surface;

(b) forming a circuit layer having a redistribution layer, RDL, on the first surface of the glass carrier;

(c) disposing an electronic component on the circuit layer and electrically connected to the RDL of the circuit layer; and

(d) forming a first package body on the circuit layer and covering the electronic component, the first package body having an interconnect structure penetrating the first package body and connected to the RDL of the circuit layer; and

(e) forming a first antenna layer on the second surface of the glass carrier.

18. The method of claim 17, wherein operation (d) further comprises:

disposing one or more conductive pillars on the circuit layer and electrically connected to the RDL of the circuit layer;

forming the first package body on the circuit layer to encapsulate the conductive pillars; and

removing a portion of the first package body to expose the conductive pillars.

19. The method of claim 17, further comprising forming a second package body on the second surface of the glass carrier to cover the first antenna layer.

20. The method of claim 19, further comprising forming a second antenna layer on a surface of the second package body facing away from the glass carrier.

Technical Field

The present disclosure relates to a semiconductor device package and a method of manufacturing the same, and more particularly, to a semiconductor device package including an antenna and a method of manufacturing the same.

Background

Wireless communication devices, such as cell phones, typically include an antenna for transmitting and receiving Radio Frequency (RF) signals. Similarly, the wireless communication device includes an antenna and a communication module each disposed on a different portion of the circuit board. According to a similar method, the antenna and the communication module are separately manufactured and electrically connected together after being placed on the circuit board. Thus, the two components may incur separate manufacturing costs. Furthermore, it may be difficult to reduce the size of the wireless communication device to achieve a suitable compact product design. To reduce cost and Package size, an Antenna-in-Package (AiP) approach is provided. Generally, organic substrates are commonly used in the AiP system. However, due to process limitations of organic substrates, it is difficult to achieve fine pitches (less than 15/15 μm), and the thickness of the organic substrate is relatively thick, which would hinder the miniaturization of AiP systems.

Disclosure of Invention

According to some embodiments of the present disclosure, a semiconductor device package includes a glass carrier, a package body, a first circuit layer, and a first antenna layer. The glass carrier has a first surface and a second surface opposite the first surface. The package body is disposed on a first surface of the glass carrier. The package body has an interconnect structure penetrating the package body. The first circuit layer is disposed on the package body. The first circuit layer has a redistribution layer (RDL) electrically connected to the interconnect structure of the package body. The first antenna layer is disposed on the second surface of the glass carrier.

According to some embodiments of the present disclosure, a semiconductor device package includes a glass carrier, a first circuit layer, a first package body, and a first antenna layer. The glass carrier has a first surface and a second surface opposite the first surface. A first circuit layer is disposed on the first surface of the glass carrier. The first circuit layer has a redistribution layer (RDL). The first package body is disposed on the first circuit layer. The first package body has an interconnect structure penetrating the first package body and is electrically connected to the RDL. The first antenna layer is disposed on the second surface of the glass carrier.

According to some embodiments of the present disclosure, a method of manufacturing a semiconductor device package includes: (a) providing a glass carrier having a first surface and a second surface opposite the first surface; (b) forming a circuit layer having a redistribution layer (RDL) on a first surface of a glass carrier; (c) disposing electronic components on the circuit layer and electrically connecting them to an RDL of the circuit layer; and (d) forming a first package body on the circuit layer and covering the electronic component, the first package body having an interconnection structure penetrating the first package body and being connected to the RDL of the circuit layer; and (e) forming a first antenna layer on the second surface of the glass carrier.

Drawings

Fig. 1A illustrates a cross-sectional view of a semiconductor device package, according to some embodiments of the present disclosure.

Fig. 1B illustrates a schematic diagram of an antenna, according to some embodiments of the present disclosure.

Fig. 1C illustrates a schematic diagram of an antenna, according to some embodiments of the present disclosure.

Fig. 1D illustrates a schematic diagram of an antenna array in accordance with some embodiments of the present disclosure.

Fig. 1E illustrates a schematic diagram of a communication system, according to some embodiments of the present disclosure.

Fig. 1F illustrates a schematic diagram of an antenna array in accordance with some embodiments of the present disclosure.

Fig. 2 illustrates a cross-sectional view of a semiconductor device package, according to some embodiments of the present disclosure.

Fig. 3A, 3B, 3C, 3D, 3E, 3F, 3G, 3H, and 3I illustrate semiconductor fabrication methods according to some embodiments of the present disclosure.

Fig. 4 illustrates a cross-sectional view of a semiconductor device package, according to some embodiments of the present disclosure.

Fig. 5 illustrates a cross-sectional view of a semiconductor device package, according to some embodiments of the present disclosure.

Fig. 6A illustrates a cross-sectional view of a semiconductor device package, according to some embodiments of the present disclosure.

Fig. 6B illustrates an enlarged view of the structure surrounded by dotted lines illustrated in fig. 6A according to some embodiments of the present disclosure.

Fig. 6C illustrates a coupling structure of the semiconductor device package shown in fig. 6A according to some embodiments of the present disclosure.

Fig. 6D shows frequency responses of different semiconductor device packages, according to some embodiments of the present disclosure.

Fig. 7A illustrates a cross-sectional view of a semiconductor device package, according to some embodiments of the present disclosure.

Fig. 7B illustrates a top view of an interconnect layer of the semiconductor device package shown in fig. 7A according to some embodiments of the present disclosure.

Fig. 7C illustrates an enlarged view of the antenna shown in fig. 7A according to some embodiments of the present disclosure.

Fig. 7D illustrates a perspective view of the antenna shown in fig. 7A, according to some embodiments of the present disclosure.

Fig. 8 illustrates a cross-sectional view of a semiconductor device package, according to some embodiments of the present disclosure.

Fig. 9 illustrates a cross-sectional view of a semiconductor device package, according to some embodiments of the present disclosure.

Fig. 10 illustrates a cross-sectional view of a semiconductor device package, according to some embodiments of the present disclosure.

Fig. 11 illustrates a cross-sectional view of a semiconductor device package, according to some embodiments of the present disclosure.

Fig. 12A, 12B, 12C, 12D, and 12E illustrate semiconductor fabrication methods according to some embodiments of the present disclosure.

Fig. 13A, 13B, 13C, 13D, and 13E illustrate semiconductor fabrication methods according to some embodiments of the present disclosure.

Fig. 14A, 14B, 14C, and 14D illustrate semiconductor fabrication methods according to some embodiments of the present disclosure.

Fig. 15A, 15B, 15C, 15D, 15E, and 15F illustrate semiconductor fabrication methods according to some embodiments of the present disclosure.

Common reference numerals are used throughout the drawings and the detailed description to refer to the same or like components. The present disclosure will be readily understood by the following detailed description in conjunction with the accompanying drawings.

Detailed Description

As technology advances, various electronic components may be integrated into packages due to the shrinking size of the electronic components. For example, an antenna used or operating within a frequency band centered around 2.4GHz has a size that is 12.5 times the size of another antenna used or operating within a frequency band centered around 28 GHz. For example, an antenna used or operating within a frequency band centered around 2.4GHz has a size 25 times larger than that of another antenna used or operating within a frequency band centered around 60 GHz.

Semiconductor device packages that include an antenna or antenna structure may also be referred to as an in-package Antenna (AiP) or an on-package antenna (AoP). For example, as shown in fig. 1A, which shows a cross-sectional view of a semiconductor device package 1 in view of some embodiments of the present disclosure, the semiconductor device package 1 is an example of AiP/AoP. The semiconductor device package 1 includes a carrier 10, an electronic component 11, and an antenna 12 (or an antenna array including the antenna 12).

The electronic component 11 may comprise, for example, but is not limited to, a Radio Frequency (RF) Integrated Circuit (IC). When the semiconductor device package 1 is operated in a frequency band concentrated below about 5GHz, the distance between the electronic component 11 and the antenna 12 does not affect the performance of the semiconductor device package 1. However, the loss (or path loss) in the transmission path may become serious as the operating frequency (or operating frequency) of the semiconductor device package 1 increases. For example, the path loss in a relatively high frequency band (e.g., a millimeter band with a frequency spectrum between 30 gigahertz (GHz) and 300 GHz) in which millimeter waves are transmitted) is 10 times the loss in a relatively low frequency band (e.g., frequencies concentrated near 2.4 GHz). Accordingly, the antenna 12 and the electronic component 11 should be placed as close as possible to mitigate losses.

Fig. 1B illustrates a schematic diagram of an antenna 12, according to some embodiments of the present disclosure. Each of the arrows indicates a signal transmission direction. The antenna 12 may also be referred to as an omni-directional antenna. The antenna 12 is capable of equally transmitting and receiving radio signals in any direction in the horizontal plane. The area surrounded by dotted lines represents signal coverage. The antenna 12 may have a gain of about 1dB to 2 dB.

Fig. 1C is a schematic diagram illustrating an example of the antenna 12 according to other embodiments of the present disclosure. The antenna 12 may also be referred to as a directional antenna. The antenna 12 may comprise a millimeter-wave antenna. The area surrounded by dotted lines represents signal coverage. The antenna 12 may have a gain of about 7dB to 8 dB. The antenna 12 may have a gain that is approximately 4 times the gain of the aforementioned omni-directional antenna.

Fig. 1D is a schematic diagram illustrating an example of an antenna array including antennas 12 according to some embodiments of the present disclosure. The antenna array s may comprise a millimeter wave antenna. The antenna array may comprise an omni-directional antenna. The antenna array may include directional antennas. The antenna array may include an omni-directional antenna and a directional antenna. The area surrounded by dotted lines represents signal coverage. The antenna array may have a gain of about 13dB to 14 dB. The antenna array may have a gain that is approximately 16 times the gain of the aforementioned omni-directional antenna.

Fig. 1E is a schematic diagram showing an example of a communication system. The communication system includes an antenna array, a target a, a target B, and a target C. The communication system may comprise a beamforming system.

The antenna array shown in fig. 1E may comprise a millimeter wave antenna. The antenna array shown in fig. 1E may include a phased array of antennas. The antenna array shown in fig. 1E may comprise an omni-directional antenna. The antenna array shown in fig. 1E may include directional antennas. The antenna array shown in fig. 1E may include an omni-directional antenna and a directional antenna. The antenna array shown in fig. 1E may include switched beam antennas for beamforming.

Fig. 1F is a schematic diagram illustrating an example of an antenna array. The antenna array may include a phased array. The signals are transmitted or received by means of an antenna array and circuitry in the dashed box. The circuitry in the dashed box may include, for example (but not limited to), phase shift circuitry.

Fig. 2 illustrates a semiconductor device package 2 according to some embodiments of the present disclosure. The semiconductor device package 2 includes semiconductor devices 118A and 118B, protective layers 108 and 124, dielectric layers 110 and 126, a passivation layer 102, an antenna unit 104, an SMT device 132, conductive elements 106, 112, 114, 120 and 128, and a connection element 130.

Fig. 3A, 3B, 3C, 3D, 3E, 3F, 3G, 3H, and 3I show operations of fabricating a semiconductor device package according to some embodiments of the present disclosure.

Referring to fig. 3A, a passivation layer 102 is formed over the support carrier 100. The antenna element 104 is formed over the passivation layer 102.

Referring to fig. 3B, a conductive element 106 is formed over the antenna element 104.

Referring to fig. 3C, a protective layer 108 is formed over the structure shown in fig. 3B to surround the antenna element 104 and the conductive element 106. The protective layer 108 is made of or includes a molding compound material. The molding compound material may comprise an epoxy-based resin having a filler dispersed therein. The filler may comprise insulating fibers, insulating particles, other suitable elements, or combinations thereof. For example, the filler material comprises or is made of silicon oxide, silicon nitride, silicon carbide, carbon-containing polymeric materials, other suitable materials, or combinations thereof. In some embodiments, the protective layer 108 is formed using a transfer molding process, a compression process, an immersion process, another applicable process, or a combination thereof.

In some embodiments, the protective layer 108 is thinned using a planarization process until the conductive elements 106 are exposed. The planarization process may include a milling process, a Chemical Mechanical Polishing (CMP) process, an etching process, another applicable process, or a combination thereof. In some other embodiments, a planarization process is not performed. For example, the protective layer 108 is formed using a transfer molding process. By using a transfer molding process, the top surfaces of the conductive features 106 are not covered by the protective layer 108 during the formation of the protective layer 108. Accordingly, it may not be necessary to perform a planarization process to expose the conductive elements 106.

Referring to fig. 3D, a dielectric layer 110 is deposited over the protective layer 108 and the conductive elements 106. Conductive elements including conductive elements 112a, 112b, and 112c are then formed over dielectric layer 110. An opaque protective layer 108 can cause misalignment problems. For example, the conductive elements 112a, 112b, and 112c and the antenna element 104 may be misaligned.

Referring to fig. 3E, conductive element 114 is formed over conductive element 112, and semiconductor dies 118A and 118B are placed over conductive elements 112a, 112B, and/or 112c and dielectric layer 110. The adhesive film 116 is used to attach the semiconductor dies 118A and 118B to the conductive elements 112a, 112B, and/or 112 c.

Referring to fig. 3F, a protective layer 124 is formed over the structure shown in fig. 3E. The protective layer 124 surrounds the conductive element 114 and the semiconductor dies 118A and 118B. In some embodiments, the protective layer 124 is made of or includes a mold compound material. The molding compound material may comprise an epoxy-based resin having a filler dispersed therein. In some embodiments, the protective layer 124 is formed using a transfer molding process, a compression process, an immersion process, another applicable process, or a combination thereof. The protective layer 124 comprises a material having a dielectric constant (Dk) greater than 3. The protective layer 124 comprises a material having a loss tangent or dissipation factor (Df) greater than 0.01. The loss tangent or Df can get worse as the operating frequency grows relatively high.

In some embodiments, the protective layer 124 is thinned using a planarization process until the conductive features 114 and the conductive elements 120 of the semiconductor dies 118A and 118B are exposed. The planarization process may include a milling process, a CMP process, an etching process, another applicable process, or a combination thereof. In some other embodiments, a planarization process is not performed. For example, the protective layer 124 is formed using a transfer molding process, wherein the top surfaces of the conductive elements 114 and the conductive elements 120 of the semiconductor dies 118A and 118B are not covered by the protective layer 124.

Forming the protective layer 108 and the protective layer 124 in different stages may take a relatively long time, which may adversely affect the yield of the semiconductor device package.

Having a relatively large volume of the protective layer 108 and the protective layer 124 compared to other elements/components (e.g., the semiconductor die 118A and 118B, the antenna element 104, the conductive elements 106, 112, 114, etc.) may cause warpage issues.

Referring to fig. 3G, an interconnect structure is formed over the structure shown in fig. 3F. The interconnect structure includes a plurality of dielectric layers 126 and a plurality of conductive elements 128.

Referring to fig. 3H, connection elements 130 are formed over some of the conductive elements 128. In some embodiments, the conductive elements 130 include solder bumps. The solder bumps are made of tin and other metallic materials. In some embodiments, the conductive element 130 may include a metal pillar, such as a copper pillar. Then, according to some embodiments, surface mount devices 132 are placed on some of the conductive elements 128, as shown in fig. 3H. The surface mount devices 132 may include passive devices, such as capacitors, resistors, and/or inductors.

Referring to fig. 3I, the structure shown in fig. 3H is inverted and disposed on the tape frame 134 or carrier 134. The support carrier 100 is then removed. In some embodiments, a dicing operation is performed to obtain a plurality of semiconductor packages.

Then, according to some embodiments, the tape frame 134 or the carrier 134 is removed, as shown in fig. 2, in which one of the semiconductor device packages is shown.

Fig. 4 illustrates a cross-sectional view of a semiconductor device package 4, according to some embodiments of the present disclosure. The semiconductor device package 4 includes a carrier 40, an electronic component 41, a package body 42, a circuit layer 43, a protective layer 44, and electrical contacts 45.

In some embodiments, carrier 40 may be or include a glass substrate. Carrier 40 may include conductive pads, traces, and interconnects (e.g., vias). In some embodiments, carrier 40 may comprise a transparent material. In some embodiments, carrier 40 may comprise an opaque material. Carrier 40 comprises a material having a Dk of less than approximately 3.5. Carrier 40 comprises a material having a Dk of less than approximately 3. Carrier 40 comprises a material having a loss tangent or dissipation factor (Df) of less than approximately 0.005. Carrier 40 comprises a material having a Df of less than approximately 0.003. Carrier 40 has a surface 401 and a surface 402 opposite surface 401. It is easier to control the thickness of the glass carrier than the organic substrate, which can facilitate miniaturization of the semiconductor device package 4. In some embodiments, carrier 40 has a thickness of about 400 μm.

Conductive layer 40p is disposed on surface 402 of carrier 40. In some embodiments, conductive layer 40p defines a patterned antenna, such as a directional antenna, an omni-directional antenna, an antenna array. By way of example, the conductive layer 40p defines a patch antenna. The conductive layer 40p is a conductive material such as a metal or a metal alloy, or contains a conductive material such as a metal or a metal alloy. Examples of the conductive material include gold (Au), silver (Ag), copper (Cu), platinum (Pt), palladium (Pd), other metals or alloys, or a combination of two or more thereof.

Electronic component 41 is disposed on surface 401 of carrier 40. Electronic component 41 may be an active electronic component, such as an Integrated Circuit (IC) chip or die. Electronic component 41 has a backside surface bonded or attached to surface 401 of the carrier by adhesive element 41 h. The adhesive member 41h includes a gel, a Die Attach Film (DAF), and the like.

One or more interconnect structures 42p (e.g., conductive pillars or conductive elements) are disposed on surface 401 of carrier 40. Interconnect structure 42p is or includes a conductive material such as a metal or metal alloy. Examples of the conductive material include Au, Ag, Cu, Pt, Pd, or an alloy thereof.

The package body 42 is disposed on a surface 401 of the carrier 40. The package body 42 covers the electronic component 41 and exposes an active surface of the electronic component 41. For example, the surface 421 of the package body is substantially coplanar with the active surface of the electronic component 41. The package body 42 covers a portion of the interconnect structure 42p and exposes another portion (e.g., a top portion) of the interconnect structure 42p for electrical connection. In some embodiments, the package body 42 comprises an epoxy resin comprising a filler, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material comprising silicone dispersed therein, or a combination thereof.

The circuit layer 43 is disposed on the surface 421 of the package body 42. The circuit layer 43 includes one or more interconnect layers (e.g., redistribution layers, RDLs) 43r and one or more dielectric layers 43 d. A portion of interconnect layer 43r is covered or encapsulated by dielectric layer 43d, while another portion of interconnect layer 43r is exposed from dielectric layer 43d to provide an electrical connection. The exposed portions of interconnect layer 43r are electrically connected to interconnect structure 42p and the active surface of electronic component 41.

In some embodiments, the dielectric layer 43d may comprise a prepreg composite fiber (e.g., prepreg), borophosphosilicate glass (BPSG), silicon oxide, silicon nitride, silicon oxynitride, Undoped Silicon Glass (USG), any combination of two or more thereof, and the like. Examples of prepregs may include, but are not limited to, multilayer structures formed by stacking or laminating several prepregs/sheets. In some embodiments, there may be any number of interconnect layers 43r depending on the design specification. In some embodiments, the interconnect layer 43r is formed of or includes Au, Ag, Cu, Pt, Pd, or alloys thereof.

A protective layer 44 is disposed on the circuit layer 43 to cover a portion of the interconnect layer 43r exposed from the dielectric layer 43d and to expose another portion of the interconnect layer 43r exposed from the dielectric layer 43d for electrical connection. In some embodiments, the protective layer 44 may be or include a solder mask or other suitable material.

The electrical contact 45 is disposed on the interconnect layer 43r exposed from the protective layer 44. In some embodiments, the electrical contacts 45 may comprise solder or other suitable material.

Fig. 5 illustrates a cross-sectional view of a semiconductor device package 5, according to some embodiments of the present disclosure. The semiconductor device package 5 is similar to the semiconductor device package 4 in fig. 4, and differences therebetween are described below.

Package body 42 has or defines a cavity 42c to expose a surface 401 of carrier 40. The conductive element 52 has a first portion 52a disposed on a sidewall of the cavity 42c and a second portion 52b disposed on a surface 401 of the carrier 40 exposed from the package body 42. The electronic component 41 is disposed within the cavity 42c and on the portion 52b of the conductive element 52. The electronic component 41 is spaced from the portion 52a of the conductive element 52. For example, there is a gap between the portion 52a of the conductive element 52 and the electronic component 41. In some embodiments, the dielectric layer 43d is disposed within the gap between the portion 52a of the conductive element 52 and the electronic component 41. In some embodiments, conductive element 52 may act as an electromagnetic interference (EMI) shield to protect electronic component 41 from EMI. The conductive element 52 is formed of or includes Au, Ag, Cu, Pt, Pd, or an alloy thereof.

Fig. 6A illustrates a cross-sectional view of a semiconductor device package 6, according to some embodiments of the present disclosure. The semiconductor device package 6 is similar to the semiconductor device package 4 in fig. 4, and the differences therebetween are described below.

Circuit layer 43 is disposed on surface 401 of carrier 40. In some embodiments, a portion of interconnect layer 43r of circuit layer 43 disposed directly on surface 401 of carrier 40 may define an antenna. Electronic component 41 is disposed on circuit layer 43 and electrically connected to interconnect layer 43r exposed from dielectric layer 43 d. The interconnect structure 42p is disposed on the circuit layer 43, and is electrically connected to the interconnect layer 43r exposed from the dielectric layer 43 d.

The package body 42 is disposed on the circuit layer 43. The package body 42 has or defines a cavity 42c to accommodate the electronic component 41. In some embodiments, the electronic component 41 is spaced from the sidewall of the cavity 42 c. For example, there is a gap between the side wall of the cavity 42c and the electronic component 41. In some embodiments, a dielectric layer 43d is disposed within the gap between the sidewalls of the cavity 42c and the electronic component 41. The package body 42 covers a portion of the interconnect structure 42p and exposes another portion of the interconnect structure 42p for electrical connection. The conductive layer 42cp is disposed on the package body 42. A portion of conductive layer 42cp is electrically connected to the exposed portion of interconnect structure 42 p.

Fig. 6B is an enlarged view of the structure surrounded by dotted lines as shown in fig. 6A. Carrier 40 spacing or separating the antenna elements (e.g., conductive layer 40p) from interconnect layer 43r (which may include a corresponding antenna pattern) may facilitate signal coupling. For example, in one condition where carrier 40 spaces or separates an antenna element (e.g., conductive layer 40p) from interconnect layer 43r (which may include a corresponding antenna pattern) by a distance D61 in a range of approximately 200 μm to approximately 400 μm, the operating frequency of semiconductor device package 6 may be extended by a bandwidth in a range of approximately 3GHz to approximately 6 GHz. Gain or increase in bandwidth of the operating frequency of the semiconductor device package 6 may be achieved by changing the material of the carrier 40 (e.g., with a relatively low Dk material) or changing the coupling distance.

Fig. 6C illustrates a coupling structure of the semiconductor device package 6 as illustrated in fig. 6A. The coupling structure comprises a three-layer antenna or radiator 60. The coupling structure may include more or more layers of antennas. The coupling structure may help extend the bandwidth of the operating frequency of the semiconductor device package 6.

Fig. 6D shows frequency responses of different semiconductor device packages, according to some embodiments of the present disclosure.

Referring to fig. 6D, a curve G2b represents the frequency response of the semiconductor device package 6 as shown in fig. 6A. Curve G2b' represents the frequency response of another semiconductor device package (not shown) similar to the semiconductor device package 6 shown in fig. 6A, except that the conductive layer 40p and the carrier 40 are eliminated. The semiconductor device package 6 having the link design has a relatively wide/wide operating frequency bandwidth.

Fig. 7A illustrates a cross-sectional view of a semiconductor device package 7, according to some embodiments of the present disclosure. The semiconductor device package 7 is similar to the semiconductor device package 4 in fig. 4, and differences therebetween are described below.

The semiconductor device package 7 includes an antenna 73 disposed on a surface 401 of the carrier 40 and adjacent to a lateral surface 403 of the carrier 40. In some embodiments, the antenna 73 is or includes a dipole antenna. In some embodiments, the dipole antenna may comprise a two-dimensional (2D) dipole antenna or a three-dimensional (3D) dipole antenna. In some embodiments, the antenna 73 is electrically connected to the interconnect layer 43 r.

Fig. 7B illustrates a top view of the interconnect layer 43r of the circuit layer 43 of the semiconductor device package 7 as illustrated in fig. 7A. Referring to fig. 7B, the interconnect layer 43r may include a patch antenna surrounded by an antenna 73 (e.g., a dipole antenna array).

Fig. 7C illustrates an enlarged view of the antenna 73 illustrated in fig. 7A, according to some embodiments of the present disclosure. Referring to fig. 7C, the antenna 73 may include a 2D dipole antenna. The antenna 73 may include patterned conductive traces.

Fig. 7D illustrates a perspective view of the antenna 73 shown in fig. 7A according to other embodiments of the present disclosure. Referring to fig. 7D, the antenna 73 may include a 3D dipole antenna. Antenna 73 may comprise a curved conductive member or plate. Antenna 73 may comprise an "L" shaped or "L-like" shaped conductive member or plate.

Fig. 8 illustrates a cross-sectional view of a semiconductor device package 8, according to some embodiments of the present disclosure. The semiconductor device package 8 is similar to the semiconductor device package 6 in fig. 6A, and the differences therebetween are described below.

The semiconductor device package 8 includes an antenna 83 disposed on a surface 402 of the carrier 40 and adjacent to the lateral surface 403 of the circuit layer 40. In some embodiments, antenna 83 is electrically connected to interconnect layer 43r through conductive element 40 v. In some embodiments, antenna 83 is electrically connected to conductive layer 40 p. In some embodiments, antenna 83 is or includes a dipole antenna. In some embodiments, the dipole antenna may comprise a 2D dipole antenna or a 3D dipole antenna. In some embodiments, antenna 83 has the same or similar structure as antenna 73 as shown in fig. 7A, 7B, 7C, and 7D.

Fig. 9 illustrates a cross-sectional view of a semiconductor device package 9 according to some embodiments of the present disclosure. The semiconductor device package 9 is similar to the semiconductor device package 6 in fig. 6A, and differences therebetween are described below.

The semiconductor device package 9 further includes conductive elements 91a and 91 b. Conductive element 91a is disposed on circuit layer 43 and adjacent to electronic component 41. A portion of the conductive element 91a is encapsulated by the package body 42, and another portion of the conductive element 91a is exposed from the package body 42. In some embodiments, the conductive element 91a surrounds the electronic component 41. The conductive element 91b is disposed on the package body 42 and electrically connected to the conductive element 91 a. The conductive elements 91a and 91b may define an EMI shield to protect the electronic assembly 41 from EMI.

Fig. 10 illustrates a cross-sectional view of a semiconductor device package 10 according to some embodiments of the present disclosure. The semiconductor device package 10 is similar to the semiconductor device package 6 in fig. 6A, and the differences therebetween are described below.

Referring to fig. 10, the package body 42 is omitted. The protective layer 44 is disposed on the circuit layer 43. The protective layer 44 covers a portion of the interconnect layer 43r exposed from the dielectric layer 43d, and exposes another portion of the interconnect layer 43r exposed from the dielectric layer 43 d. The underfill 41u is disposed between the active surface of the electronic component 41 and the protective layer 44. In some embodiments, the underfill 41u may include a filler having a relatively small size compared to the size of the package body 42. In some embodiments, the underfill 41u may have no filler. In other embodiments, the underfill 41u may be omitted. Electrical contacts 45 are disposed on exposed portions of the interconnect layer 43r of the circuit layer 43.

Fig. 11 illustrates a cross-sectional view of a semiconductor device package 110, according to some embodiments of the present disclosure. The semiconductor device package 110 is similar to the semiconductor device package 10 in fig. 10, except that the semiconductor device package 110 further includes a package body 42 disposed between the circuit layer 43 and the carrier 40. One or more interconnect structures 42p penetrate package body 42 to electrically connect to interconnect layer 43r of circuit layer 43.

Fig. 12A, 12B, 12C, 12D, and 12E illustrate semiconductor fabrication methods according to some embodiments of the present disclosure. In some embodiments, the methods in fig. 12A, 12B, 12C, 12D, and 12E may be used to fabricate the semiconductor device package 5 in fig. 5.

Referring to fig. 12A, a carrier 40 is provided. The package body 42 is formed on the carrier 40. The package body 42 includes a molding compound material. The molding compound material may comprise an epoxy-based resin having a filler dispersed therein. The package body is formed by, for example, a transfer molding technique, a compression technique, an immersion technique, a laser drilling technique, a photolithography technique, another applicable technique, or a combination thereof. One or more openings 42h and cavities 42c are formed through the package body 42 to expose the carrier 40. The patterned conductive layer 42p' is formed with the opening 42h and the cavity 42 c.

Referring to fig. 12B, an interconnect structure 42p is formed on the patterned conductive layer 42p' as shown in fig. 12A by, for example, but not limited to, electroplating techniques. Interconnect structure 42p may include conductive elements 52a and 52 b. The electronic component 41 is attached to the conductive element 52b by an adhesive element 41 h.

Referring to fig. 12C, a circuit layer 43 (e.g., RDL structure) that may include a dielectric layer 43d and an interconnect layer 43r is formed on the package body 42. Interconnect layer 43r is electrically connected to interconnect structure 42p and the conductive ends of electronic component 41. Dielectric layer 43d is formed by, for example, but not limited to, photolithographic techniques. The interconnect layer 43r is formed by, for example, but not limited to, electroplating techniques.

Referring to fig. 12D, more RDL structures may be formed on the RDL structure as shown in fig. 12C. In some embodiments, there are any number of RDL structures depending on different design specifications.

Referring to fig. 12E, a portion of carrier 40 as shown in fig. 12D is removed from the underside or bottom side by, for example, but not limited to, a grinding technique. A conductive layer 40p (e.g., a patterned antenna) is formed on the thinned or ground carrier 40. In some embodiments, carrier 40 may comprise glass, which may facilitate alignment between conductive layer 40p and interconnect layer 43 r. In some embodiments, carrier 40 may comprise glass, which may alleviate warpage issues that may occur at various stages of manufacturing.

In some embodiments, the protective layer 44 and the electrical contacts 45 are formed on the interconnect layer 43r exposed from the dielectric layer 43d to form the semiconductor device package 5 as shown in fig. 5.

Fig. 13A, 13B, 13C, 13D, and 13E illustrate semiconductor fabrication methods according to some embodiments of the present disclosure. In some embodiments, the methods in fig. 13A, 13B, 13C, 13D, and 13E may be used to fabricate the semiconductor device package 9 in fig. 9.

Referring to fig. 13A, a carrier 40 is provided. A circuit layer 43 (e.g., RDL structure) that may include a dielectric layer 43d and an interconnect layer 43r is formed on carrier 40. Dielectric layer 43d is formed by, for example, but not limited to, photolithographic techniques. The interconnect layer 43r is formed by, for example, but not limited to, electroplating techniques.

Referring to fig. 13B, an interconnect structure 42p and conductive elements 91a are formed on the circuit layer 43 to electrically connect to the interconnect layer 43r exposed from the dielectric layer 43 d. In some embodiments, interconnect structure 42p and conductive element 91a are formed by, for example (but not limited to), electroplating techniques.

Referring to fig. 13C, electronic component 41 is attached or bonded to interconnect layer 43r exposed from dielectric layer 43 d. The package body 42 is formed to encapsulate the interconnect structure 42p, the conductive elements 91a, and the electronic component 41. The package body 42 may comprise a molding compound material.

Referring to fig. 13D, portions of the package body 42 are removed to expose the interconnect structure 42p and the conductive elements 91 a. The patterned conductive layer 42cp (including the conductive element 91b) is formed on the package body 42. Conductive layer 42cp is electrically connected to interconnect structure 42p, and conductive element 91b is electrically connected to conductive element 91 a.

Referring to fig. 13E, a portion of carrier 40 as shown in fig. 13D is removed from the underside or bottom side by, for example, but not limited to, a grinding technique. A conductive layer 40p (e.g., a patterned antenna) is formed on the thinned or ground carrier 40. In some embodiments, carrier 40 may comprise glass, which may facilitate alignment between conductive layer 40p and interconnect layer 43 r. In some embodiments, carrier 40 may comprise glass, which may alleviate warpage issues that may occur at various stages of manufacturing.

In some embodiments, a protective layer 44 and electrical contacts 45 are formed on the package body 42 to form the semiconductor device package 9 as shown in fig. 9.

Fig. 14A, 14B, 14C, and 14D illustrate semiconductor fabrication methods according to some embodiments of the present disclosure. In some embodiments, the methods of fig. 14A, 14B, 14C, and 14D may be used to fabricate the semiconductor device package 10 of fig. 10.

Referring to fig. 14A, a carrier 40 is provided. A circuit layer 43 (e.g., RDL structure) that may include a dielectric layer 43d and an interconnect layer 43r is formed on carrier 40. Dielectric layer 43d is formed by, for example, but not limited to, photolithographic techniques. The interconnect layer 43r is formed by, for example, but not limited to, electroplating techniques. A protective layer 44 is formed on the circuit layer 43 to expose a portion of the interconnect layer 43 r.

Referring to fig. 14B, electrical contacts 45 are formed on the protective layer 44 and electrically connected to the interconnect layer 43r exposed from the protective layer 44.

Referring to fig. 14C, the electronic component 41 is attached or bonded to the interconnect layer 43r exposed from the protective layer 44. An underfill 41u is formed between the electronic component 41 and the circuit layer 43.

Referring to fig. 14D, the structure as shown in fig. 14C is bonded to or disposed on a carrier 30 (e.g., tape frame). As shown in fig. 14D, at least a portion of the electronic component 41, the underfill 41u, and the electrical contacts 45 are within the carrier 30 or covered by the carrier 30. A conductive layer 40p (e.g., an antenna pattern) is formed on a surface of carrier 40 facing away from circuit layer 43.

In some embodiments, the carrier 30 is removed to form the semiconductor device package 10 as shown in fig. 11.

Fig. 15A, 15B, 15C, 15D, 15E, and 15F illustrate semiconductor fabrication methods according to some embodiments of the present disclosure.

Referring to fig. 15A, a carrier 40 is provided. Conductive elements 40v are formed in carrier 40. In some embodiments, conductive element 40v extends within carrier 40 without penetrating carrier 40.

Referring to fig. 15B, a circuit layer 43 (e.g., RDL structure) that may include a dielectric layer 43d and an interconnect layer 43r is formed on carrier 40. The interconnect layer 43r is electrically connected to the conductive element 40 v. Dielectric layer 43d is formed by, for example, but not limited to, photolithographic techniques. The interconnect layer 43r is formed by, for example, but not limited to, electroplating techniques.

Referring to fig. 15C, a protective layer 44 is formed on the circuit layer 43 to expose a portion of the interconnect layer 43 r. A portion of carrier 40 as shown in fig. 15B is removed from the underside or bottom side by, for example but not limited to, a grinding technique. A portion of carrier 40 as shown in fig. 15B is removed to expose conductive elements 40 v. A conductive layer 40p (e.g., a patterned antenna) is formed on the thinned or ground carrier 40. In some embodiments, carrier 40 may comprise glass, which may facilitate alignment between conductive layer 40p and interconnect layer 43 r. In some embodiments, carrier 40 may comprise glass, which may alleviate warpage issues that may occur at various stages of manufacturing.

Referring to fig. 15D, a package body 62 is formed on carrier 40 to encapsulate or cover conductive layer 40 p. The package body 42 may comprise a molding compound material.

Referring to fig. 15E, a conductive layer 62p is formed on a surface of the package body 62 facing away from the carrier 40. In some embodiments, conductive layer 62p may define an antenna, such as a patch antenna. In some embodiments, conductive layer 62p may be coupled to conductive layer 40p for signal transmission therebetween.

Referring to fig. 15F, electrical contacts 45 are formed on the protective layer 44 and electrically connected to the interconnect layer 43 r. The electronic component 41 is attached or bonded to the interconnect layer 43 r. An underfill 41u is then formed between the electronic component 41 and the circuit layer 43 to form a semiconductor device package.

As used herein, the terms "substantially," "approximately," and "about" are used to indicate and explain small variations. For example, when used in conjunction with numerical values, the term can refer to a range of variation of less than or equal to ± 10% of the stated numerical value, such as less than or equal to ± 5%, less than or equal to ± 4%, less than or equal to ± 3%, less than or equal to ± 2%, less than or equal to ± 1%, less than or equal to ± 0.5%, less than or equal to ± 0.1%, or less than or equal to ± 0.05%. As another example, the thickness of a film or layer is "substantially uniform" may refer to a standard deviation of less than or equal to ± 10% of the average thickness of the film or layer, such as less than or equal to ± 5%, less than or equal to ± 4%, less than or equal to ± 3%, less than or equal to ± 2%, less than or equal to ± 1%, less than or equal to ± 0.5%, less than or equal to ± 0.1%, or less than or equal to ± 0.05%. The term "substantially coplanar" may refer to two surfaces located along the same plane within a few microns, for example, within 40 μm, within 30 μm, within 20 μm, within 10 μm, or within 1 μm located along the same plane. Two surfaces or components may be considered "substantially perpendicular" if the angle between the two surfaces or components is, for example, 90 ° ± 10 °, e.g., ± 5 °, ± 4 °, ± 3 °, ± 2 °, ± 1 °, ± 0.5 °, ± 0.1 ° or ± 0.05 °. The terms "substantially," "approximately," and "approximately" when used in connection with an event or circumstance may refer to instances in which the event or circumstance occurs precisely, and instances in which the event or circumstance occurs in close proximity.

As used herein, the singular terms "a" and "the" may include plural referents unless the context clearly dictates otherwise. In the description of some embodiments, a component provided "on" or "over" another component may encompass the case where the preceding component is directly on (e.g., in physical contact with) the succeeding component, as well as the case where one or more intermediate components are located between the preceding component and the succeeding component.

As used herein, the terms "conductive", "electrically conductive", and "conductivity" refer to the ability to carry electrical current. Conductive materials generally refer to those materials that exhibit little or no resistance to current flow. One measure of conductivity is Siemens (Siemens)/meter (S/m). Typically, the conductive material has a conductivity greater than approximately 104S/m (e.g., at least 10)⁵S/m or at least 10⁶S/m) of the above-mentioned material. The conductivity of a material can sometimes change with temperature. Unless otherwise specified, the conductivity of the material was measured at room temperature.

Additionally, amounts, ratios, and other numerical values are sometimes presented herein in a range format. It is to be understood that such a range format is used for convenience and brevity, and should be interpreted flexibly to include not only the numerical values explicitly recited as the limits of the range, but also to include all the individual numerical values or sub-ranges encompassed within that range as if each numerical value and sub-range is explicitly recited.

While the present disclosure has been described and illustrated with reference to particular embodiments thereof, such description and illustration are not intended to limit the present disclosure. It will be clearly understood by those skilled in the art that various changes may be made and equivalents may be substituted for elements thereof without departing from the true spirit and scope of the present disclosure as defined by the appended claims. The illustrations may not be drawn to scale. There may be a difference between the art reproduction in the present disclosure and the actual device due to variables in the manufacturing process, and the like. There may be other embodiments of the disclosure that are not specifically illustrated. The specification and drawings are to be regarded in an illustrative rather than a restrictive sense. Modifications may be made to adapt a particular situation, material, composition of matter, method, or process to the objective, spirit and scope of the present disclosure. All such modifications are intended to be within the scope of the claims appended hereto. Although the methods disclosed herein have been described with reference to particular operations performed in a particular order, it should be understood that these operations may be combined, sub-divided, or reordered to form equivalent methods without departing from the teachings of the present disclosure. Accordingly, unless specifically indicated herein, the order and grouping of the operations is not a limitation of the present disclosure.

Drawing translation

FIG. 1E

Target A | Target A

Target B

Target C

Antenna array for Antenna

FIG. 6D

Coupling Design

Single patch design Single Patch design

Gain of Gain

HFSSDesign1 HFSS design1

Freq frequency